Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth

Jang, Yunchang,Roh, Hyun-Joon,Park, Seolhye,Jeong, Sangmin,Ryu, Sanywon,Kwon, Ji-Won,Kim, Nam-Kyun,Kim, Gon-Ho Elsevier 2019 CURRENT APPLIED PHYSICS Vol.19 No.10

<P><B>Abstract</B></P> <P>A phenomenology-based virtual metrology (VM) for monitoring SiO<SUB>2</SUB> etching depth was proposed by Park (2015). It achieved high prediction accuracy by introducing newly developed plasma information (PI) variables as designated inputs, called PI-VM. The PI variables represent the state of the plasma, the sheath, and the target during the process. We investigate how a PI variable can help to improve prediction accuracy of VM and how it plays a special role in the statistical selection. We choose only PI<SUB>EEDF</SUB> among the three PI variables to focus on the investigation. The PI<SUB>EEDF</SUB> is determined from the ratio of line-intensities of optical emission spectroscopy. We apply Pearson's correlation filter (PCF), principal component analysis (PCA), and stepwise variable selection (SVS) as statistical selection methods on the variables set including PI<SUB>EEDF</SUB> or not. Multilinear regression is used to model the VM. This study reveals that PI<SUB>EEDF</SUB> variable is a good variable in terms of independence from other input variables and explanatory power for an output variable. Especially, VM using SVS method applied to variable sets including PI<SUB>EEDF</SUB> achieves the highest accuracy, comparable to Park's PI-VM. This study shows that PI<SUB>EEDF</SUB> variable is particularly useful for monitoring of the fine variations in semiconductor manufacturing process and it also extends the utilization of OES sensor data.</P>

광교산 등산시설의 만족도에 관한 연구

박진기(Park Jang Geun),이원회(Lee Won Hee) 한국사회체육학회 2000 한국사회체육학회지 Vol.14 No.-

The purpose of this study was to offer the fundamental data on the satisfaction level of facilities, which focused on analyzing the number of facilities, the location of facilities, facility management and public relationship for the climbers of the Kangkyo Mountain. This study examined the social and economic characteristics'. gender, age, occupation, educational background, personal income, and the climbers characteristics ' the types of climbers, climbing career, a day of the week for climbing and time spent in the park. For the purpose of this study, a developed questionnaire was used and samples included 206 climbers who lived in Suwon. (1) The satisfaction level about the number of facility showed the difference among the group classified by occupation, educational background. The highest level was women by gender, 30-39 by age, high school graduated people by educational background, functional part by occupation, 2,000,000-2,990,000 won by personal income. (2) The satisfaction level about the location of facility showed the difference among the group classified by occupation and educational background. The highest level was women by gender, over 40-49 by age, high school graduated people by educational background, house wife by occupation, 2,000,000-2,990,000 won by personal income. (3) The satisfaction level about the facility management showed the difference among the group classified by gender, occupation, personal income, and educational background. The highest level was a woman by gender, over 50 by age, high school graduated people by educational background, house wife by occupation, 2,000,000-2,990,000 won by personal income. (4) The satisfaction level about public relationship showed the difference among the group classified by age. The highest level was women by gender, 40-49 by age, the rest group by educational background, management part by occupation, over 3,000,000 won by personal income. On the base of the above results, organized public relationship program and effectual facility management system are needed Fundamental data for improving plans must be studied by the different point of view from national parks.

콜롬비아 소가모스에서 미세먼지 감축 시나리오 분석

박일수(Park, Il-Soo),장유운(Jang, Yu-Woon),하상섭(Ha, Sang-Sub),장수환(Jang, Su-Hwan),정경원(Chung, Kyung-Won),김혜원(Kim, Hye-Won),김희선(Kim, Hee-Sun) 한국외국어대학교 중남미연구소 2016 중남미연구 Vol.35 No.2

콜롬비아 소가모스 지역에서 미세먼지 감축 시나리오를 TAPM 모델을 활용하여 도출하고 평가하였다. 시나리오 1의 제철소 및 금속 등 중공업 오염원을 대상으로 미세먼지 방지 기술을 이용하여 배출량을 80% 감축하는 방안에서는 도시 중심 평균 농도는 6.5 μg m-3로 1.5 % 감소하였고, 모델영역에서 최고 평균농도는 387 μg m-3 로 변동 없었다. 시나리오 2의 벽돌 및 석회공장 등을 대상으로 연료를 석탄에서 코크스로 교체하여 90 % 감축하는 방안에서는 도시 중심 평균 농도는 4.5 μg m-3로 31.8%, 모델영역에서 최고 평균농도는 111 μg m-3 로 71.6 % 감소하였다. 시나리오 1과 시나리오 2를 결합한 시나리오 3에서는 도시 중심에서 평균 농도는 4.3 μg m-3로 34.8 %, 모델영역에서 최고 평균농도는 110 μg m-3 로 71.7 % 감소하였다. 소가모스 지역에서 대기환경을 개선하는 로드맵 수립에는 수공업에서 주로 사용되는 석탄 연료를 청정연료인 코크스로 교체하는 방안이 최우선으로 고려되어야 하겠다. 이후 미세먼지 방지 시설을 굴뚝에 설치하는 방안도 차선책으로 고려하여 환경과 경제가 선 순환하는 녹색성장관점에서 장기적인 미세먼지 개선 마스터 플랜이 수립되어야 하겠다. Reduction scenarios for PM10 concentration in Sogamoso, Colombia were analyzed using the TAPM( The Air Pollution Model). The average concentration of PM10 in the downtown area was 6.5 μg m-3, a reduction of 1.5 %. The maximum average concentration in the model domain was 387 μg m-3 without any reduction in scenarios 1 which the PM10 emissions from heavy industries such as iron and metal was reduced by 80 % using the prevention technology. In scenario 2 which the PM10 emissions from the brick and lime industries was reduced by 90 % substituting coke (a cleaner fuel) for coal, the average concentration of PM10 in the downtown area was 4.5 μg m-3, a reduction of 31.8 % , the maximum average concentration in the model domain was 111 μg m-3 , a reduction of 71.6 %. In scenario 3 which the scenarios 1 and 2 were combined, the average concentration of PM10 in the downtown area was 4.3 μg m-3, a reduction of 34.8 % and the maximum average concentration was 110 μg m-3, a reduction of 71.7 %. To put forward a road map for the reduction of PM10 in the Sogamos region, substituting coke for coal in manual industries should have priority over reduction policies. Also, it is highly recommended that a longterm master plan for reducing PM10 concentrations should be established with a focus on environmentally-friendly development and future green growth policy with a win-win relationship between economy and environment.

지상라이다를 이용한 미기록 외래종 갯쥐꼬리풀(Spartina Alterniflora)의 분포특성과 관리방안 연구 -다도해 해상국립공원 진도 남동리 해안을 사례로-

박정원 ( Jung Won Park ),김하송 ( Ha Song Kim ),장성건 ( Seong Geon Jang ),천숙진 ( Sook Jin Chun ),육관수 ( Kwan Soo Yuk ) 한국도서학회 2015 韓國島嶼硏究 Vol.27 No.3

갯쥐꼬리풀(Spartina alterniflora)은 북미 대서양 연안 뉴펀들랜드, 캐나다 남쪽에서 아르헨티나 북부의 갯벌이 원산이며, 생장이 강한 특성으로 세계의 기수지역과 해안에서 생태공학적 용도로 도입된 바 있다. 그러나 매우 빠르게 갯벌을 피복하여 자생종의 생장을 방해하고, 염습지 종다양성을 감소 시켰고, 결과적으로 과다생육으로 갯벌 무척추동물의 서식지를 잠식해 사라지게 하여 무척추동물을 먹이로 하는 조류 또한 생태계 내에서 감소키는 등 많은 환경문제를 야기 시켰다. 우리나라에서는 2008년 전후에 다도해해상국립공원에 유입된 것으로 판단된다. 현재 다도해해상국립공원 남동리 해안에서 분포하고 있는 갯쥐꼬리풀(Spartina alterniflora)군락은 습지내 총 6개의 염생식물 군락면적(8,487.7㎡) 중 75.34%의 비율(6,394.86㎡)로 분포하고 있다. 또한 2008년에 11.54㎡ 이던 분포 면적이 2015년 현재 약 550배가 늘어난 6,394.22㎡로 조사되었고 생육지 고도 범위인 0.69m~1.1m를 요인 값으로 두고 GIS 분석한 하였다. 그 결과 앞으로 확산 될 예상 면적은 12,584㎡이며 현재보다 약 6,189.14㎡가 늘어날 것으로 예측되며 우리나라에서도 역시 확산이 빠르고 넓게 늘어날 것으로 판단된다. 향후 계속 분포역이 확대 될 것으로 예상하고 관리방안을 위하여 시범 연구를 실시하였다. 갯쥐꼬리풀군락 중 일부를 첫 번째는 뿌리째 뽑아내기와 두 번째 지상부 제거 후 포장덮기 방법 등 국외사례의 문헌을 바탕으로 방재를 실시하였으나 전체 면적을 방재하기에는 많은 인력과 시간 그리고 예산이 소요되므로 다각적인 방안을 강구하여야 한다. Spartina alterniflora is native to the Atlantic coast from Newfoundland, the south of Canada and northern Argentina. There it forms a dominant part of brackish coastal saltmarshes. Due to its strong growth, the Spartina alternifolra was introduced to the rider area and coast as a use for ecological engineering. The Spartina alterniflora community can crowd out native species, reduce the biodiversity of saltmarsh and alter the environment. As a result, the invertebrates living in mud flats disappeared due to the encroaching of Spartina alterniflora, and the birds which eat off invertebrates went along as well. The Spartina alterniflora was first introduced in South Korea in 2008 and is known to have flowed in the Dadohaehaesang National Park. Compared to 2008, in 2015 the distribution area of the Spartina alterniflora has increased 550 times. (11.54㎡ in 2008 to 6,394.22㎡ in 2015). The large increase of Spartina alterniflora calls for urgent management and additionary study on the subject. Thus, this study analyzed the geo-spatial information on the Spartina alterniflora such as its distribution area, the height of habitats and expected expansion area, and can act as the preliminary data for management.

필리핀 여행 후 발생한 쯔쯔가무시병 1예

김계형,김낙현,김문석,김충종,전재현,박완범,장원종,박상원,김익상,오명돈,최강원 대한감염학회 2008 감염과 화학요법 Vol.40 No.6

Infectious diseases imported from other countries have increased as more and more Koreans are going abroad for various purposes. Tsutsugamushi disease from other endemic area such as Southeast Asia is important, because it can occur in any season and eschar may be absent. We report a case of imported tsutsugamushi disease acquired in the Philippines. A patient presented with fever, headache, and maculopapular skin rash. However, eschar was absent. Polymerase chain reaction (PCR) for 56-kDa gene of Orientia tsutsugamushi using buffy coat was positive. Serum indirect immunofluorescent antibody assay was initially negative but became positive with a titer of 1:320 at follow-up, Sequencing analysis revealed the strain to be 100% identical to the TW73R strain identified in Taiwan. After the patient received doxycycline, body temperature normalized in 12 hours. Tsutsugamushi disease is one of the differential diagnoses that should be included for patients with fever who have recently returned from Southeast Asian countries. PCR for O. tsutsugamushi using patient's buffy coat was useful for early diagnosis.

우리나라 노인여성의 골다공증성 척추골절로 인한 경제적 부담 추계

강혜영,강대룡,장영화,박성은,최원정,문성환,양규현,Kang, Hye-Young,Kang, Dae-Ryong,Jang, Young-Hwa,Park, Sung-Eun,Choi, Won-Jung,Moon, Seong-Hwan,Yang, Kyu-Hyun 대한예방의학회 2008 예방의학회지 Vol.41 No.5

Objectives : To estimate the economic burden of osteoporotic vertebral fracture (VF) from a societal perspective. Methods : From 2002 to 2004, we identified all National Health Insurance claims records for women ${\geq}50$ years old with a diagnosis of VF. The first 6-months was defined as a "clearance period," such that patients were considered as incident cases if their first claim of fracture was recorded after June 30, 2002. We only included patients with ${\geq}$ one claim of a diagnosis of, or prescription for, osteoporosis over 3 years. For each patient, we cumulated the claims amount for the first visit and for the follow-up treatments for 1 year. The hospital charge data from 4 hospitals were investigated to measure the proportion of the non-covered services. Face-to-face interviews were conducted with 106 patients from the 4 study sites to measure the out-of-pocket spending outside of hospitals. Results : During 2.5 years, 131,453 VF patients were identified. The patients had an average of 3.38 visits, 0.40 admissions and 6.36 inpatient days. The per capita cost was 1,909,690 Won: 71.5% for direct medical costs, 20.6% for direct non-medical costs and 7.9% for indirect costs. The per capita cost increased with increasing age: 1,848,078 Won for those aged 50-64, 2,084,846 Won for 65-74, 2,129,530 Won for 75-84and 2,121,492 Won for those above 84. Conclusions : Exploring the economic burden of osteoporotic VF is expected to motivate to adopt effective treatment options for osteoporosis in order to prevent the incidence of fracture and the consequent costs.

광교산 등산객들의 특징과 시설 만족도

박장근,이원희,장미영 명지대학교 예체능연구소 2000 藝體能論集 Vol.11 No.-

본 연구는 수원시 광교산을 이용하는 등산객을 대상으로 등산시설의 만족도 조사를 하였으며. 광교산 등산시설에 대한 마케팅 전략을 제시하는데 목적을 두었다. 설문조사를 위하여 3개 등산코스에서 총206명을 대상으로 실시하여 다음과 같은 결과를 도출하였다. 본 연구의 결과 시설 수, 시설위치 부분에서는 대체적으로 긍정적 경향으로 나타났지만 시설 수에 있어서는 20대의 집단에서 부정적으로 나타났다. 또한 시설관리, 홍보활동 부분에서는 보통보다 낮은 만족도를 나타내어, 광교산 관리담당기관이 등산객을 위한 현실적이고 효율적인 관리·운영 프로그램 개발이 필요할 것으로 사료된다. 등산객들의 선호도 및 만족도를 조사함으로써 상이한 세분시장에 상응하는 마케팅전략이 제시될 수 있을 것이다. 마케팅 대안 및 차 후 연구의 방향이 제시되었다.

돼지 미성숙 난포란의 회수 및 체외수정에 관한 연구

박성원,김정혁,홍승표,이지삼,정장용,박희성 진주산업대학교 농업기술연구소 1999 農業技術硏究所報 Vol.12 No.-

본 연구는 돼지의 체외수정에 있어서 난포란의 회수방법과 체외수정란 및 체외발달율을 조사하여 체외수정의 기본 원리를 밝히고자 본 연구를 수행하였다. 도축장으로부터 채집한 난소의 난포에서 흡입법, 세절법 및 흡입후세절법 등으로 난포란을 채취하여 등급별로 분류하여 회수율을 조사하였으며, 채취한 난포란은 액상정액과 정소상체미부 정액을 사용하여 체외수정을 시킨후 TCM-199 와 NCSU-23 배양액으로 체외배양을 실시하였다. 본 연구에서 얻은 결과를 요약하면 다음과 같다. 회수방법당 각각 37개의 난소에서 회수한 난포란의 수는 흡입법이 1,365개, 세절법이 1,884개 및 흡입후 세절법이 3.830개로써 난소당 난포란의 수는 각각 36.9, 50.9 및 103.5개로써 회수방법간에 유의적(P<0.05)인 차이가 있었다. 액상정액과 정소상체미부 정액을 사용하였을 때 수정율은 각각 83.0 및 83.% 로써 정액간에 유의적(P<0.05) 인 차이는 없었다. 체외수정이 이루어진 난자들의 분할율도 액상정액(60.8%) 과 정소상체미부 정액(69.0%) 간에 유의적(P<0.05) 인 차이는 없었다. 2-4세포기로의 발달율은 24.6 및 28.4%로써 배양액간에 위의적(P<0.05)인 차이는 없었으며, 상실배로의 발달율도 TCM-199 와 NCSU-23 배양액이 각각 14.8 및 24.5% 로써 이들간에 유의적(P<0.05)인 차이는 없었다. To improve the efficiency of in vitro production of embryos with follicular oocytes in pig, the recovery rates, in vitro fertilization and development, and the time required for collectng and processing oocytes by aspiration with or without slicing were evaluated comparatively. The oocytes were collected by aspiration of follicles(2-6mm) with or without slicing ovaries after aspiration, and classified into grade I-IV oocytes by the morpholoy of cumulus cells attached and the homogeneity of cytoplasmic granules. The grade Ⅰ-Ⅱ oocytes were matured invitro for 46 hours in TCM-199 and NCSU-23 supplemented with 1㎍/㎖ FSH, 2IU/㎖ hCG, 1㎍/㎖ estradiol-17 at 39℃ under 5% CO_2 in air. They were fertilized in vitro by epididymis sperm and ejaculated sperm treated with hypotaurin for 24 hours. and then the zygotes were co-cultured in vitro with pFF(porcine follicular fluid) for 7-9 days. The results obtained were as follows: The number of ocytes recovered per ovary was averaged 30.7 by aspiration, 50.8 by slicing and 103.5 by aspiration post slicing. The number of grade Ⅰ oocytes recovered was total 0.2% by aspiration, 0.1% by slicing and 0.1% by aspiration post slicing. The oocytes recovered per ovary was significantly(P<0.05) higher as recovery methods. The cleavage rates of the embryos obtained from 83.0(ejaculate sperm) and 83.1(epididymis sperm) respectively(P<0.05). In vitro developmental rates(9.9 and 18.6%) of embryos cultured in TCM-199 and NCSU-23 up to morula stage were non significantly(P<0.05) different between the culture media.

단세포군항체 및 Cross-Agglutinin Absorption 방법에 의한 렙토스피라균의 동정

장원종,박경희 건국대학교 의과학연구소 1995 건국의과학학술지 Vol.5 No.-

Since 1984, many cultures of Leptospira interrogans have been isolated from patients and wild rodents. The majority of isolates were identified as serogroup Icterohemorrhagiae serovar lai and two isolates(HS7, HK14) were identified as serogroup Canicola serovar canicola. Yet some isolates(18R, 30R, HM3, AP33, CH88-19, HK12) did not belong to any known serovar in Icterohemorragiae. Therefore, we tried to cross-agglutinin absorption test(CATT) to identify the serovar of above seven local strains with reference strains. We also tried to analyze the distribution of major antigenic determinants among reference strains and local strains in Korea with absorbed sera, by means of monoclonal antibodies and factor analysis. Local strains, AP33 could be identified serovar lai by CATT and using monoclonal antibodies. We proved that AP33 shared the major common antigen with serovar lai by factor analysis. Local strain, 30R and HM3 were proved same strain using CATT, monoclonal antibodies, and factor analysis. Local strain, 18R, 30R, HM3, CH88-12, and CH88-19 were antigenically different from reference strains.

뇌동맥류 파열시 조기 및 후기수술간의 비교분석

박원호,김범태,변박장 순천향의학연구소 1995 Journal of Soonchunhyang Medical Science Vol.1 No.1

Authors compared the surgical outcome of ruptured intracraniai aneurysms in all of 400 patients with their age, sex, admission day from ictus and history of hypertension. The radiological findings with Fisher grade of subarachnoid hemorrhage, hydrocephalus, aneurysmal multiplicity, location of aneurysm, size of aneurysm and the intervals and incidences of clinical vasospasm and rebleeding were investigated. The relationship between preoperative neurological grade and early versus late surgical outcome, causes of unfavorable outcome in the aggravated group were evaluated together. And they were analyzed statistically with a multiple logistic regression model for the retrospective research of the 10 years period from 1984 to 1993. The results were as follows: 1) Age ranged from 19 to 78 years old and the mean of them was 52 years old. The proportion of male and female was each 154 cases (38.5%) and 246 cases(61.5%) and the ratio of them was 1:1.6. 2) The 105 cases (26.2%) of the early surgery (ES) operated less than 3 days from ictus, and the 295 cases (73.8%) of the late surgery (LS) operated with the lapse of more than 3 days from ictus. 3) The duration of hospitalization distributed from a day to 444 days and the average period of them were 26 days in the case of ES and 42 days in the case of LS respectively. 4) The distribution of the preoperative neurological grade appeared 6.7% in grade 1, 67.8% in grade 2, 12.3% in grade 3, 9.3% in grade 4 and 3.0% in grade 5 by Hunt and Hess classification respectively. 5) The history of hypertension were noted each 49 cases in the ES and 130 cases in the LS, and the percentage of them was 45% of all. 6) The proportion of the Fisher grade from 1 to 4 appeared 7.5%, 47.3%, 24% and 17.2% in order respectively. 7) The hydrocephalus occurred 15 cases in the ES and 47 cases in the LS. 8) The radiological finding of aneurysmal multiplicity revealed to 353 cases (88.2%) in single, 39 cases (9.8%) in two and 8 cases (2.0%) in more than three of aneurysms respectively. The site of ruptured aneurysm noted anterior communicating artery in 141 cases (35.2%), internal cerebral artery in 121 cases (30.2%), middle cerebral artery in 107 cases (26.8%), anterior cerebral artery in 19 cases (4.8%) and vertebro-basilar artery in 12 cases (3.0%) respectively. The size of aneurysm was less than 3mm in 15 cases (3.7%), 3∼10mm in 302 cases (75.5%), 11∼25mm in 78 cases (19.5%) and more than 25mm in 5 cases (1.3%). 9) The intervals of clinical vasospasm were less than 3 days in 9 cases, between 4∼7 days in 18 cases, between 8∼14 days in 19 cases, between 15∼21 days in 7 cases, more than 21 days in 6 cases and their incidence occurred to 14.8%. The intervals of rebleeding were less than 3 days in 9 cases, between 4∼7 days in 8 cases, between 8∼14 days in 4 cases, between 15∼21 days in 4 cases, more than 21 days in 3 cases and their incidence occurred to 7%. 10) The causes of unfavorable outcome were initial massive bleeding in 44 cases, delayed ischemic deficit in 11 cases, surgical procedure in 10 cases, medical problem in 2 cases, hydrocephalus in one case and others in 2 cases. The follow-up periods following discharge ranged from one month to more than 24 months in 221 cases (55.3%) of all. 11) In the cases of ES, the percentages of the improved group including a good recovery and moderate disabled state, and those of the aggravated group including a severe disabled state, vegetative state and death were 85% and 15% respectively according to Hunt grade 1, 2 and 3 at admission. In the case of LS, those of the improved groupand the aggravated group were 90% and 10% respectively, but there were not significant to the surgical outcome with the time difference between early and late surgery (P>0.05). Factors affecting the surgical outcome were rebleeding, clinical vasospasm and past history of hypertension (P<0.05). In conclusion, the decision of operation timing between early and late surgery must be considered according to the preoperative neurological grade with the above mentioned prognostic factors and additional supports of the prospective study.