http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Ge 기판 위에 HfO<sub>2</sub> 게이트 산화물의 원자층 증착 중 In Situ 질소 혼입에 의한 전기적 특성 변화
김우희,김범수,김형준,Kim, Woo-Hee,Kim, Bum-Soo,Kim, Hyung-Jun 한국진공학회 2010 Applied Science and Convergence Technology Vol.19 No.1
Ge은 Si에 비하여 높은 이동도를 갖기 때문에 차세대 고속 metal oxide semiconductor field effect transistors (MOSFETs) 소자를 위한 channel 물질로서 각광받고 있다. 그러나 화학적으로 안정한 게이트 산화막의 부재는 MOS 소자에 Ge channel의 사용에 주요한 장애가 되어왔다. 특히, Ge 기판 위에 고품질의 계면 특성을 갖는 게이트 절연막의 제조는 필수 요구사항이다. 본 연구에서, $HfO_xN_y$ 박막은 Ge 기판 위에 플라즈마 원자층 증착법(plasma-enhanced atomic layer deposition, PEALD)을 이용하여 증착되었다. 플라즈마 원자층 증착공정 동안에 질소는 질소, 산소 혼합 플라즈마를 이용한 in situ 질화법에 의하여 첨가되었다. 산소 플라즈마에 대한 질소 플라즈마의 첨가로 성분비를 조절함으로써 전기적 특성과 계면 성질을 향상시키는데 초점을 맞추어서 연구를 진행하였다. 질소 산소의 비가 1:1이었을 때, EOT의 값의 10% 감소를 갖는 고품질의 소자특성을 보여주었다. X-ray photoemission spectroscopy (XPS)와 high resolution transmission electron microscopy (HR-TEM)를 사용하여 박막의 화학적 결합 구조와 미세구조를 분석하였다. Ge is one of the attractive channel materials for the next generation high speed metal oxide semiconductor field effect transistors (MOSFETs) due to its higher carrier mobility than Si. But the absence of a chemically stable thermal oxide has been the main obstacle hindering the use of Ge channels in MOS devices. Especially, the fabrication of gate oxide on Ge with high quality interface is essential requirement. In this study, $HfO_xN_y$ thin films were prepared by plasma-enhanced atomic layer deposition on Ge substrate. The nitrogen was incorporated in situ during PE-ALD by using the mixture of nitrogen and oxygen plasma as a reactant. The effects of nitrogen to oxygen gas ratio were studied focusing on the improvements on the electrical and interface properties. When the nitrogen to oxygen gas flow ratio was 1, we obtained good quality with 10% EOT reduction. Additional analysis techniques including X-ray photoemission spectroscopy and high resolution transmission electron microscopy were used for chemical and microstructural analysis.
인터넷 쇼핑에서의 소비자 구매행동에 관한 연구 -부산지역 직장인을 중심으로-
김우희,천명환,Kim Woo-Hee,Chun Myung-Hwan 대한경영정보학회 2000 경영과 정보연구 Vol.4 No.-
With rapid advances on Interactive technology, and the growing popularity of the Internet, Internet shopping receives considerable attention in both the popular-press and academic journals. The Internet has enormous commercial possibilities. But it is a new and dynamic medium that poses special challenges for marketers. The revolutionary nature of the Internet mandates that established wisdom on consumer marketing along with marketing-mix strategies has to be reexamined and perhaps radically revised. In order to assist marketers in this endeavor it is critical to understand consumers' buying behaviors of Internet shopping. But research in this area still very much its infancy. This study examined previous researches of Internet shopping and developed conceptual framework of Internet shopping modes. Additionally, this study examined empirical investigation of Internet shopping. Preliminary results suggests that there are significant differences in individuals' perceptions of Internet shopping and traditional shopping modes. Various factors influences on consumers' buying behavior on Internet shopping. There are Individuals' factors(personality, lifestyle, prior experience, perceived risk etc), shopping mall factors(trust, vividness, security, promotion, etc), product characteristics(product category, brand, etc), situational factors(time pressure, locational constraints etc), social/cultural factors(Norms, importance of other peoples etc). Additionally, We conducted empirical study of the impact of the Internet on consumer shopping behavior. We gathered consumers' reactions via an open-ended survey using a sample of 90 shoppers. We related the reactions to the factors of consumers' satisfaction or dissatisfaction of the Internet shopping. Consequently, there are many questions regarding factors that might influence Internet shopping. From theoretical and practical perspectives, studies that examine these factors would seem to offer much to the discipline. This paper has attempted th provide insights and direction of future empirical examination of Internet shopping.
Ge 기판 위에 HfO₂ 게이트 산화물의 원자층 증착 중 In Situ 질소 혼입에 의한 전기적 특성 변화
김우희(Woo-Hee Kim),김범수(Bumsoo Kim),김형준(Hyungjun Kim) 한국진공학회(ASCT) 2010 Applied Science and Convergence Technology Vol.19 No.1
Ge은 Si에 비하여 높은 이동도를 갖기 때문에 차세대 고속 metal oxide semiconductor field effect transistors (MOSFETs) 소자를 위한 channel 물질로서 각광받고 있다. 그러나 화학적으로 안정한 게이트 산화막의 부재는 MOS 소자에 Ge channel의 사용에 주요한 장애가 되어왔다. 특히, Ge 기판 위에 고품질의 계면 특성을 갖는 게이트 절연막의 제조는 필수 요구사항이다. 본 연구에서, HfOxNy 박막은 Ge 기판 위에 플라즈마 원자층 증착법(plasma-enhanced atomic layer deposition, PEALD)을 이용하여 증착되었다. 플라즈마 원자층 증착공정 동안에 질소는 질소, 산소 혼합 플라즈마를 이용한 in situ 질화법에 의하여 첨가되었다. 산소 플라즈마에 대한 질소 플라즈마의 첨가로 성분비를 조절함으로써 전기적 특성과 계면 성질을 향상시키는데 초점을 맞추어서 연구를 진행하였다. 질소 산소의 비가 1:1이었을 때, EOT의 값의 10% 감소를 갖는 고품질의 소자 특성을 보여주었다. X-ray photoemission spectroscopy (XPS)와 high resolution transmission electron microscopy (HR-TEM)를 사용하여 박막의 화학적 결합 구조와 미세구조를 분석하였다. Ge is one of the attractive channel materials for the next generation high speed metal oxide semiconductor field effect transistors (MOSFETs) due to its higher carrier mobility than Si. But the absence of a chemically stable thermal oxide has been the main obstacle hindering the use of Ge channels in MOS devices. Especially, the fabrication of gate oxide on Ge with high quality interface is essential requirement. In this study, HfOxNy thin films were prepared by plasma-enhanced atomic layer deposition on Ge substrate. The nitrogen was incorporated in situ during PE-ALD by using the mixture of nitrogen and oxygen plasma as a reactant. The effects of nitrogen to oxygen gas ratio were studied focusing on the improvements on the electrical and interface properties. When the nitrogen to oxygen gas flow ratio was 1, we obtained good quality with 10% EOT reduction. Additional analysis techniques including X-ray photoemission spectroscopy and high resolution transmission electron microscopy were used for chemical and microstuctural analysis.
Won-Hee Lee(이원희),Seung-Sub Eum(엄승섭),Woo-Hee Kim(김우희),Yong-Joon Lee(이용준) 한국컴퓨터정보학회 2017 韓國컴퓨터情報學會論文誌 Vol.22 No.12
Investigations into family-friendly company culture have been carried out for various companies and conglomerates. But there has never been such investigation for police organization, so this investigation is intended to see the effect on organizational commitment and job performance of the organization culture that makes use of family-friendly program for the police organization. To this end, how the internal factors of family-friendly organization culture affects organization commitment and job performance is empirically analyzed with structural equation modeling. And it is found that family-friendly program has significant effect on organizational life and welfare, and the welfare, in return, is found to have significant effect on job performance.
대학 홍보에서 마케팅 PR 활용에 관한 연구 -마케팅 PR전략의 실천방안을 중심으로-
최석현,김우희,Choi, Seok-Hyun,Kim, Woo-Hee 대한경영정보학회 2007 경영과 정보연구 Vol.21 No.-
The purpose of this study is to analyze the case on the strategic MPR that has rapidly growing for years. And the Brand, which was at first used to be distinguished from many other products or services, is going through its gradually expanded definition, not merely for the highlight of the distinctions. This study was performed to review the literature on concept and meaning of Marketing Public Relations(MPR) which was used for IMC planning and to identify formation, development, and functional characteristics of MPR. MPR is a series of public communication act in order to gain credibility on their products and services with consumers and prospects from consumer-oriented viewpoint. The subject of the study are Colleges or Universities who try hard to work their various and strategic PR communication. The results of this research indicates that maximization of the integrated effect between marketing and public relations shall be achieved in planning MPR strategy. The meaning of this study is to verify the significance and need of the Colleges or Universities' specialized characteristics in strategic MPR activities. It is expected that this research will provide meaningful suggestions to PR and marketing practitioners.