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Ge 기판 위에 HfO<sub>2</sub> 게이트 산화물의 원자층 증착 중 In Situ 질소 혼입에 의한 전기적 특성 변화
김우희,김범수,김형준,Kim, Woo-Hee,Kim, Bum-Soo,Kim, Hyung-Jun 한국진공학회 2010 Applied Science and Convergence Technology Vol.19 No.1
Ge은 Si에 비하여 높은 이동도를 갖기 때문에 차세대 고속 metal oxide semiconductor field effect transistors (MOSFETs) 소자를 위한 channel 물질로서 각광받고 있다. 그러나 화학적으로 안정한 게이트 산화막의 부재는 MOS 소자에 Ge channel의 사용에 주요한 장애가 되어왔다. 특히, Ge 기판 위에 고품질의 계면 특성을 갖는 게이트 절연막의 제조는 필수 요구사항이다. 본 연구에서, $HfO_xN_y$ 박막은 Ge 기판 위에 플라즈마 원자층 증착법(plasma-enhanced atomic layer deposition, PEALD)을 이용하여 증착되었다. 플라즈마 원자층 증착공정 동안에 질소는 질소, 산소 혼합 플라즈마를 이용한 in situ 질화법에 의하여 첨가되었다. 산소 플라즈마에 대한 질소 플라즈마의 첨가로 성분비를 조절함으로써 전기적 특성과 계면 성질을 향상시키는데 초점을 맞추어서 연구를 진행하였다. 질소 산소의 비가 1:1이었을 때, EOT의 값의 10% 감소를 갖는 고품질의 소자특성을 보여주었다. X-ray photoemission spectroscopy (XPS)와 high resolution transmission electron microscopy (HR-TEM)를 사용하여 박막의 화학적 결합 구조와 미세구조를 분석하였다. Ge is one of the attractive channel materials for the next generation high speed metal oxide semiconductor field effect transistors (MOSFETs) due to its higher carrier mobility than Si. But the absence of a chemically stable thermal oxide has been the main obstacle hindering the use of Ge channels in MOS devices. Especially, the fabrication of gate oxide on Ge with high quality interface is essential requirement. In this study, $HfO_xN_y$ thin films were prepared by plasma-enhanced atomic layer deposition on Ge substrate. The nitrogen was incorporated in situ during PE-ALD by using the mixture of nitrogen and oxygen plasma as a reactant. The effects of nitrogen to oxygen gas ratio were studied focusing on the improvements on the electrical and interface properties. When the nitrogen to oxygen gas flow ratio was 1, we obtained good quality with 10% EOT reduction. Additional analysis techniques including X-ray photoemission spectroscopy and high resolution transmission electron microscopy were used for chemical and microstructural analysis.
전략유형, 혁신의 차원 및 성과의 관계에 관한 이론적 연구
김우희,최원일 대한경영정보학회 2000 경영과 정보연구 Vol.5 No.-
In recent years many companies have faced with significant environmental changes. To cope with these changes, companies have shown considerable interest and commitment to innovation, In their quest for superior performance, these companies have explored different types and sources of innovation. This study examines how competitive strategy influences companies' emphasis on different innovation types (product, administrative. and process) and sources (incubative, acquisitive and imitative). This study suggests that different strategies are associated with distinct patterns of innovation types and sources. Further, the fit between competitive strategies and innovation types and sources is associated with superior company performance. Based on this concept this study suggests several hypotheses. These hypotheses, if supported by empirical study, will be very useful to the company to improve financial performance.
경도 정신지체 학생에 대한 탐구 지향적인 과학교수 방법 연구 : 물질에 관한 학습 특성을 중심으로 On Learning Characteristics of the Matter
김우희,하미경 단국대학교 1998 論文集 Vol.33 No.-
In the investigation, student with mental retardation were observed over a 8month period, in order to determine the characteristics of mental retardation manifested themselves in the context of inquiry-oriented, hands-on science curriculum. Analysis of all relevant data obtained from observations and field notes, audiotape recordings and student products, and interviews of the student suggested that several characteristics commonly attributed to students with mild mental retardation were observed how they interact with the science curriculum. These characteristics included attentiveness, capability of logical reasoning, and the students’ outerdirectedness. Based on these characteristics, we can imply science teaching for students with mental retardation as follow: First students were able to construct scientific knowledge actively through inquiry-oriented science curriculum. Second, hands-on scientific skills were useful in promoting appropriate social behavior, attentiveness and perseverance. Third, peers were helpful in applications of skills through mutual encouragement, but were less helpful in promoting learning outcomes. Forth, elaborative questioning and detailed instructions by teachers often seemed to be necessary, especially for successful knowledge construction.