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RISS 인기검색어
- 검색키워드
- 저자 : Jongsung Park(박종성) (검색결과 79 건)
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박종성(Jongsung Park),정규원(Kyuwon Jeong) 한국생산제조학회 2006 한국생산제조학회지 Vol.15 No.3
The ultra-precision stage is demanded for some industrial fields such as semiconductor lithography, ultra-precision machining, and fabrication of nano structure. A new stage was developed for those applications in order to obtain nano meter resolution. This stage consists of symmetric double parallelogram mechanism using flexure hinges. The mechanical properties such as strength of the flexures and deformations along the applied force were analyzed using FEM. The stage is actuated by a piezoelectric actuator and its movement was measured by a ultra-precision linear encoder. In order to improve positioning performance, a PID controller was designed based on the identified second order transfer function. Experimental results showed that this stage could be positioned within below 5 ㎚ resolution irrespective of hysteresis and creep by the controller.
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박종성(Jongsung Park),정규원(Kyuwon Jeong) 한국생산제조학회 2006 한국생산제조시스템학회 학술발표대회 논문집 Vol.2006 No.5
The ultra-precision positioning system is demanded for some industrial fields, such as semiconductor lithography and fabrication of the nano structure. In this paper, the ultra-precision stage which consists of flexure hinges, piezoelectric actuator, and ultra-precision linear encoder, is designed and developed. From the step responses of the system, the system transfer function of the ultra-precision stage system was derived by a second order model system. In order to have robustness for the system uncertainty and external disturbances, the weighting functions were selected and the H∞ controller was designed using them. For the designed controller, the simulation was performed and the designed stage system was applied. Experimental results found that this stage could be controlled below 5㎜ resolution and irrespective of hysteresis and creep by this designed controller.
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주파수 응답 해석에 의한 나노 스테이지 모델링 및 강인 제어
박종성(Jongsung Park),정규원(Kyuwon Jeong) 한국생산제조학회 2007 한국생산제조시스템학회 학술발표대회 논문집 Vol.2007 No.5
The nano-stage system is widely used in some industrial fields, such as semiconductor lithography and fabrication of the nano structure. In this paper, the nano stage which is designed and fabricated is consisted of flexure hinges, piezoelectric actuator, and ultra-precision linear encoder. In order to make a system transfer function of the nano-stage system, the frequency responses for the sinusoidal inputs was analyzed. From the bode diagram, the system was modeled in 4th order system. Also, in order to have robustness for the system uncertainty and external disturbances, some weighting functions were selected and the H<SUB>∞</SUB> controller was designed by loop-shaping method. For the designed robust controller, the simulation was performed and the designed stage system was applied.
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박종성(Jongsung Park),정규원(Kyuwon Jeong) 한국생산제조학회 2007 한국생산제조시스템학회 학술발표대회 논문집 Vol.2007 No.10
In this paper, a nano stage which is designed is consisted of flexure hinge of notched type based in symmetric double parallelogram mechanism and piezoelectric actuator, and ultra-precision linear encoder. For a scanner like AFM, the resonant frequency is important factor in scan rate. Modal analysis was executed in order to analyze dynamic characteristic for this stage. The contact of stage and piezoelectric actuator was modeled in nonlinear contact element. The natural frequencies and mode shapes were found. Also, the frequency responses for the sinusoidal inputs was analyzed. From the bode diagram, two resonant frequencies were found. In comparison with the results by modal analysis presented many differences.
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박종성(Jongsung Park),정규원(Kyuwon Jeong) 한국생산제조학회 2006 한국생산제조시스템학회 학술발표대회 논문집 Vol.2006 No.5
The ultra-precision positioning system is demanded for some industrial fields, such as semiconductor lithography and fabrication of the nano structure. In this paper, the ultra-precision stage which consists of flexure hinges, piezoelectric actuator, and ultra-precision linear encoder, is designed and developed. From the step responses of the system, the system transfer function of the ultra-precision stage system was derived using system identification tool and reduced second order model system. In order to have robustness for the system uncertainty and external disturbances, the weighting functions were selected and the H<SUB>∞</SUB> controller was designed using them. For the designed controller, the simulation was performed and the designed stage system was applied.
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박종성(Jongsung Park),임철현(Cheolhyun Lim),김우람(Wooram Kim),박병욱(Byungwook Park),이진석(Jin-seok Lee),이석호(Sukho Lee) 한국태양광발전학회 2020 Current Photovoltaic Research Vol.8 No.1
In this study, we predict the generation of end-of-life photovoltaic modules when Feed in Tariff applied, in Republic of Korea. Based on the installation of photovoltaic modules, we prepared three different senarios in order to estimate the generation of end-of-life photovoltaic modules. The senarios are i) early worn-out, ii) mid worn-out and iii) late-worn out senario. We selected the mid worn-out senario to estimated the amount of end-of-life photovoltaic modules in this study. Establishment of the end-of-life module generation scenario predicted generation of end-of-life photovoltaic module, and forecasted generation amount of end-of-life module to which Feed in Tariff was applied in consideration of installed photovoltaic modules installed by Feed in Tariff support. The generation of Feed in Tariff-applied end-of-life modules increased from 2021 to 2025 compared to without Feed in Tariff, and since then, the Feed in Tariff-applied end-of-life modules were generated as waste modules during the relevant period (2021 ~ 2025).
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