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12인치 Wafer Final Polishing 장비 개발
박종권,우에다,이상열,신현성 한국공작기계학회 2008 한국공작기계학회 춘계학술대회논문집 Vol.2008 No.-
In this paper, we reported a final polishing machine for 300 mm bare wafer. The final polishing system of bare 300 mm wafer is developed for replacing multistage polishing and grinding process with high quality of flatness required in 0.13 ㎛ design rule. The machine had three polishing tables and eight rotating heads that carries wafers attached on a indexing column so that three steps of the process were possible. The machine structure and components were designed and developed with support of numerical analysis for static and dynamic characteristics. The prototype built with utilities were tested, and the results of surface quality and flatness were discussed.
Preparation and Properties of Inverse Perovskite Mn3GaN Thin Films and Heterostructures
H. Tashiro,R. Suzuki,T. Miyawaki,K. Ueda,H. Asano 한국물리학회 2013 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.63 No.3
Thin films and heterostructures of Mn3GaN with an inverse perovskite structure were grownepitaxially on SrTiO3 (001) and (La0.18Sr0.82)(Al0.59Ta0.41)O3 (001) (LSAT) substrates by ionbeam sputtering, and their structural and electrical properties have been investigated. Mn3GaNepitaxial thin films showed metallic behavior of temperature-dependent resistivity with a smallmaximum at 290-340 K. The maximum resistivity could be attributed to the magnetic transitionfrom antiferromagnetism to paramagnetism. It has been found that epitaxial heterostructuresformed by ferroelectric Ba0.7Sr0.3TiO3 and Mn3GaN layers exhibit a large magnetocapacitanceeffect of more than 2000% in an applied magnetic filed of 1.5 T.
Crystal distortions in geometrically frustrated ACr<sub>2</sub>O<sub>4</sub> (A = Zn,Cd)
Lee, S-H,Gasparovic, G,Broholm, C,Matsuda, M,Chung, J-H,Kim, Y J,Ueda, H,Xu, G,Zschack, P,Kakurai, K,Takagi, H,Ratcliff, W,Kim, T H,Cheong, S-W IOP Pub 2007 Journal of Physics, Condensed Matter Vol.19 No.14
<P>In this paper, we discuss neutron and synchrotron x-ray diffraction data obtained from single crystals of ACr<SUB>2</SUB>O<SUB>4</SUB> (A = Zn, Cd). The Cr spinels undergo three-dimensional spin-Peierls transitions at low temperatures that involve cubic-to-tetragonal lattice distortions and magnetic long-range ordering. Our results show that the magnetic structures selected by these systems are closely related to the lattice distortions that are undertaken. </P>
CHANDRA OBSERVATIONS OF THE AKARI NEP DEEP FIELD
T. Miyaji,M. Krumpe,H. Brunner,T. Ishigaki,H. Hanami,A. Markowitz,T. Takagi,T. Goto,M. A. Malkan,H. Matsuhara,C. Pearson,Y. Ueda,T. Wada 한국천문학회 2017 天文學論叢 Vol.32 No.1
The AKARI NEP Deep Field Survey is an international multiwavelength survey over 0.4 deg$^2$ of the sky. This is the deepest survey made by the InfraRed Camera (IRC) of the infrared astronomical satellite AKARI with 9 filters continuously covering the 2-25 μm range, including three filters in the Spitzer gap between the IRAC and MIPS coverages. This enabled us to make sensitive MIR detection of AGN candidates at z ~ 1, based on hot dust emission in the AGN torus. It is also efficient in detecting highly obscured Compton-thick AGN population. In this article, we report the first results of X-ray observations on this field. The field was covered by 15 overlapping Chandra ACIS-I observations with a total exposure of ~ 300 ks, detecting $\approx 450$ X-ray sources. We utilize rest-frame stacking analysis of the MIR AGN candidates that are not detected individually. Our preliminary analysis shows a marginal detection of the rest-frame stacked Fe K$\alpha$ line from our strong Compton-thick candidates.
Yanagisawa, Y.,Suetomi, Y.,Piao, R.,Yamagishi, K.,Takao, T.,Hamada, M.,Saito, K.,Ohki, K.,Yamaguchi, T.,Nagaishi, T.,Kitaguchi, H.,Ueda, H.,Shimoyama, J.,Ishii, Y.,Tomita, M.,Maeda, H. The Korea Institute of Applied Superconductivity a 2018 초전도와 저온공학 Vol.20 No.2
The present article briefly overviews the plan for a new project on joint technology for HTS wires/cables and describes the development plan for the world's highest field NMR magnet, which is a major development item in the project. For full-fledged social implementation of superconducting devices, high temperature superconducting (HTS) wire is a key technology since they can be cooled by liquid nitrogen and they can generate a super-high magnetic field of >>24 T at liquid helium temperatures. However, one of the major drawbacks of the HTS wires is their availability only in short lengths of a single piece of wire. This necessitates a number of joints being installed in superconducting devices, resulting in a difficult manufacturing process and a large joint resistance. In Japan, a large-scale project has commenced, including two technical demonstration items: (i) Development of superconducting joints between HTS wires, which are used in the world's highest field 1.3 GHz (30.5 T) NMR magnet in persistent current mode; the joints performance is evaluated based on NMR spectra for proteins. (ii) Development of ultra-low resistive joints between DC superconducting feeder cables for railway systems. The project starts a new initiative of next generation super-high field NMR development as well as that of realization of better superconducting power cables.