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DC Servo Motor를 이용한 초정밀 위치결정기구의 컴퓨터 시뮬레이션 및 제어성능 평가
박기형,김재열,윤성운,이규태,곽이구,송인석,한재호 韓國工作機械學會 2000 한국생산제조학회지 Vol.9 No.6
Recently, High accuracy and precision arc required in various industrial field especially, semiconductor manufacturing apparatus, Ulna precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. As such technology has been rapidly developed, this field needs the positioning accuracy as high as submicron. It is expected that the accuracy of 10nm and 1nm is required in precision work and ultra precision work field, respectively by the beginning of 2000s. High speed and low vibration arc also needed. This work deals with the design method and control system of Ultra precision positioning apparatus. Control perfor-mance and stability analysis were performed in advance by modeling and designing the controller with Simulink.