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RF 마그네트론 스퍼터링법으로 증착한 ZnO 박막의 증착온도에 따른 구조 및 전기적 특성
오수영,김응권,이태용,강현일,이종환,송준태,Oh, Su-Young,Kim, Eung-Kwon,Lee, Tae-Yong,Kang, Hyun-Il,Lee, Jong-Hwan,Song, Joon-Tae 한국전기전자재료학회 2007 전기전자재료학회논문지 Vol.20 No.11
In this study we investigated the variation of the substrate temperatures using RF sputtering to identify the effect on the structure and electrical properties by c-axis orientation of ZnO thin film. ZnO thin films were prepared on Al/Si substrate. In our experimental results, ZnO thin film at $300^{\circ}C$ was well grown with (002) peak of ZnO thin film, the thin film showed the high resistivity with the value of $5.9{\times}10^7\;{\Omega}cm$ and the roughness with 27.06 nm. As increased the substrate temperatures, the grain size of ZnO thin films was increased. From these results, we could confirm the suitable substrate temperature of ZnO thin films for FBAR(film bulk acoustic resonator).
저온공정을 이용한 AlN 박막의 우선배향성과 모폴로지에 관한 연구
오수영,김응권,이태용,강현일,유현규,송준태,Oh, Su-Young,Kim, Eung-Kwon,Lee, Tae-Yong,Kang, Hyun-Il,Yu, Hyun-Kyu,Song, Joon-Tae 한국전기전자재료학회 2008 전기전자재료학회논문지 Vol.21 No.5
In this paper, we investigated the (002) preferred orientation and morphology characteristics of AlN thin film by using reactive rf sputtering. Additionally, AlN thin films grown in the range from 150 to 300 W were studied under room temperature without substrate heating and post annealing. Sputtered AlN thin films were well grown on Si substrates and the (002) main peak in XRD patterns showed the highest intensity at 300 W with $0.25^{\circ}$ degree of full width at half-maximum (FWHM). As increased RF power, the surface roughness was increased from 1.0 to 3.4 nm. In Fourier transformation infrared spectroscopy (FTIR), $A_1$ (TO) and $E_1$ (TO) mode closed to AlN thin film confirmed the changes with increasing the intensity rate. From these results, we could confirm a chance of the growth of AlN thin film by only low temperature.
Ga doped ZnO 박막의 열처리 조건에 따른 구조 및 전기적 특성에 관한 연구
오수영,김응권,이태용,강현일,김봉석,송준태,Oh, Su-Young,Kim, Eung-Kwon,Lee, Tae-Yong,Kang, Hyun-Il,Kim, Bong-Seok,Song, Joon-Tae 한국전기전자재료학회 2007 전기전자재료학회논문지 Vol.20 No.9
In this study we present the effect of annealing temperatures on the structural, electrical and optical characteristics of Ga-doped ZnO (GZO) films. GZO target is deposited on coming 7059 glass substrates by DC sputtering. and then GZO films are annealed at temperatures of 400, 500, $600^{\circ}C$ in air ambient for 20 min. in this case of as-grown film, it shows the resistivity of $6{\times}10^{-1}{\Omega}{\cdot}cm$ and transmittance under 85%, whereas the electrical and optical properties of film annealed at $500^{\circ}C$ are enhanced up to $1.9{\times}10^{-3}{\Omega}{\cdot}cm$ and 90%, respectively.
오수영 ( Soo Young Oh ) 대한주산의학회 2015 Perinatology Vol.26 No.1
주산기 치료의 발전에 따라서 극단적 조산(extreme preterm birth)의 생존율은 최근 꾸준히 증가하고 있다. 이러한 생존경계출산(periviable birth)이 임박한 산모에 대한 적절한 상담과 주산기 처치는 산과 의사와 신생아 의사 모두에게 가장 어려운 문제 중의 하나이다. 본 종설에서는 1) 최근 생존경계출산의 주산기 처치에 관한 어떠한 국제적 지침들이 제시되어 왔는지 살펴보고, 2) 생존경계출산에 대한 산과적 처치 중 산전 스테로이드 투여와 황산마그네슘 치료에 대한 문헌들을 고찰하며 3) 마지막으로 생존경계출산의 산과적 처치에 관한 우리나라의 모체태아의학 교수진들의 진료 패턴에 대한 설문 조사 결과를 제시하고자 한다. Survival of extreme preterm birth infants had recently been increasing steadily. Proper counseling and optimal management of women impending periviable birth is one of the most intricate situations in both obstetricians and pediatricians. This article aimed 1) to discern several international recommendations on perinatal care of periviable birth proposed recently, 2) to provide reviews of best available evidence on the use of antenatal corticosteroids and magnesium sulfate in impending periviable birth, and 3) to present the results from survey on the obstetrical management in periviable birth targeting maternal-fetal medicine faculty members of the tertiary hospitals in our country.