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안병인,김영식,박성찬 한국광학회 2017 Current Optics and Photonics Vol.1 No.2
We propose a new graphical method for selecting a pair of optical and housing materials to simultaneouslyathermalize and achromatize an LWIR optical system. To have a much better opportunity toselect the IR glasses and housing materials, an athermal glass map is expanded by introducing the DOEwith negative chromatic power. Additionally, from the depth of focus in an LWIR optical system, thetolerable housing boundary is provided to realize an athermal and achromatic system even for not readilyavailable housing material. Thus, we can effectively determine a pair of optical and housing materials byreducing the thermal shift to be less than the depth of focus. By applying this method to design a nightvision camera lens, the chromatic and thermal defocuses are reduced to less than the depth of focus, overthe specified waveband and temperature ranges.
실리콘 웨이퍼에서 실험계획법을 이용한 암시야 레이저산란의 매개변수 선정
안병인,김경범 忠州大學校 2010 한국교통대학교 논문집 Vol.45 No.-
In this paper, parameters of laser scattering based on design of experiment are selected and laser scattering patterns have been analyzed for surface inspection of silicon wafer. First of all, scattering parameters are identified through the detail investigation of light scattering attributes and scattering influence factors. As a result of experiments, scattered lights are increased approximately 37% in wafer surface with micro defects, in comparison to no micro ones. In addition, optimum parameters using the design of experiment are selected for obtaining robust and high quality laser scattering images. It is shown that scattered light components are linearly increased according to the increase of micro defect sizes, and the depth of micro-defects give a large influence on optical deflection.