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펨토초 레이저 리소그라피 기술을 이용한 Fresnel zone plate 제작 연구
손익부(I. B. Sohn),노영철(Y. C. Noh),고명진(M. J. Ko) 한국레이저가공학회 2011 한국레이저가공학회지 Vol.14 No.2
We fabricated the Fresnel zone plate using femtosecond laser lithography-assisted micro-machining, which is a combined process of nonlinear lithography and wet etching. We investigated the focusing properties by launching a 632.8㎚ wavelength He-Ne laser beam into the zone plate. The spot size of the primary focal point was 27㎛ and the intensity of focal point was 0.565W/㎠.
펨토초 레이저 어블레이션을 이용한 알루미나 세라믹 기판의 정밀 마이크로 드릴링
김성훈,손익부,노영철,이종민,정성호 한국레이저가공학회 2008 한국레이저가공학회지 Vol.11 No.1
The characteristics of femtosecond laser ablation of Al_(2)O_(3), for preCISIOn microfabrication are studied experimentally. Specifically, the process time during femtosecond laser drilling of microholes with sub-1OO μm diameter are investigated for varying laser fluence, scan speed and beam path designs like trepanning with continuously changed start points. The accumulation of sub-micrometer size particles within the hole and the deterioration of edge clarity and roundness for decreasing hole diameter are examined and through process optimization the microdrilling with good hole quality is achieved using a femtosecond laser system (repetitionrate 1 kHz, wavelength 785 nm, pulse duration 185 fs).