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ISPM을 이용한 PECVD 공정 내 발생입자 측정 연구
김동빈,문지훈,김형우,강병수,윤주영,강상우,김태성,Kim, Dongbin,Mun, Jihun,Kim, HyeongU,Kang, Byung Soo,Yun, JuYoung,Kang, SangWoo,Kim, Taesung 한국입자에어로졸학회 2015 Particle and Aerosol Research Vol.11 No.4
Particles which generated from plasma enhanced chemical vapor deposition (PECVD) during thin film deposition process can affect to the process yield. By using light extinction method, ISPM can measure particles in the large-diameter pipe (${\leq}300mm$). In our research, in-situ particle monitor (ISPM) sensor was installed at the 300 mm diameter exhaust-line to count the particles in each size. In-house flange for mounting the transmitting and receiving parts of ISPM was carefully designed and installed at a certain point of exhaust line where no plasma light affect to the light extinction measurement. Measurement results of trend changes on particle count in each size can confirm that ISPM is suitable for real-time monitoring of vacuum process.
김동빈(Kim, Dongbin) 인제대학교 디자인연구소 2014 Journal of Integrated Design Research (JIDR) Vol.13 No.2
오늘날 타이포그래피는 글자와 단어, 문장에 대한 다양한 변용과 조작을 통해 의미의 파생 및 확장을 이룬다. 변용과 조작의 방법 중 시각적 분절 표현이 대표적이다. 분절은 언어의 표현행위 자체보다 그 이상의 변별적 의미를 만들어내는 것이다. 언어분절의 단위는 ‘문단’, ‘문장’, ‘절’, ‘구’, ‘단어’, ‘음절’, ‘음소’ 등이다. 분절은 음운론적 분절과 의미론적 분절 등 이중성을 갖는다. 분절의 단위와 이중성은 타이포그래피의 분절 표현에서도 유사하다. 타이포그래피에서 분절 표현은 언어적 측면 못지않게 시각적 표현 측면도 중요하다. 분절을 시각적 표현 측면으로 보면 형태의 분화다. 타이포그래피에서 분절 표현의 대상이 되는 ‘음소’, ‘음절’, ‘단어’ 등이 갖는 시각적 형태로부터 분화된 자립적인 요소들은 각각 부여된 시각적 역할을 담당하게 된다. 타이포그래피에서 분절 표현이 야기하는 의미작용은 메타 언어적 관점으로 바라볼 수 있다. 메타언어는 어떤 담론에 대한 2차 담론이며 다른 발화 행위나 텍스트에 대한 2차 발화 행위 혹은 텍스트이다. 타이포그래피에서 분절 표현은 1차적 의미와 정보전달에 구속받지 않고 2차적 발화 행위로서 다중적 의미를 산출함으로써 메타 언어적 기능을 수행한다. Today, Typography comprises derivation and extension of various transformations and manipulations of a letter, a word and a sentence. The visual segment expression is typical among the ways of transformation and manipulation. The segment creates more distinction meaning than the linguistic expression does. Units of the linguistic expression are a paragraph, a sentence, a phrase, a word, a syllable, and a phoneme. The segment shows dualism like phonemics and semantics. The units and dualism of segment are similar with the segment expression in Typography. The segment expression in Typography is important in both linguistic and visual sides. The segment is seen as division of a form under the visual expression side in Typography. Subjects which are a phoneme, a syllable, and a word to be segment expressed take the visual roles after they are separated. The signification of segment expression in Typography can be treated as the Meta linguistic perspective. Meta linguistic is the second discourse causing from another discourse and is also the different articulation or the second articulation text. The segment expression in Typography does not just passes over the first meaning and information, but it produces and carries out multiple meanings as the second articulation action.
다양한 조건의 저압 공정 모니터링을 위한 입자 집속 장치 개발
김명준,김동빈,강상우,김태성,Kim, Myungjoon,Kim, Dongbin,Kang, Sang-Woo,Kim, Taesung 한국입자에어로졸학회 2017 Particle and Aerosol Research Vol.13 No.2
As semiconductor process was highly integrated, particle contamination became a major issue. Because particle contamination is related with process yields directly, particles with a diameter larger than half pitch of gate should be controlled. PBMS (Particle beam mass spectrometry) is one of powerful nano particle measurement device. It can measure 5~500 nm particles at ~ 100 mtorr condition in real time by in-situ method. However its usage is restricted to research filed only, due to its big device volume and high price. Therefore aperture changeable aerodynamic lenses (ACALs) which can control particle focusing characteristics by changing its aperture diameter was proposed in this study. Unlike conventional aerodynamic lenses which changes particle focusing efficiency when operating condition is changed, ACALs can maintain particle focusing efficiency. Therefore, it can be used for a multi-monitoring system that connects one PBMS and several process chambers, which greatly improves the commercialization possibility of the PBMS. ACALs was designed based on Stokes number and evaluated by numerical method. Numerical analysis results showed aperture diameter changeable aerodynamic lenses can focus 5 to 100 nm standard particles at 0.1 to 10 torr upstream pressure.