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초소형 고밀도 정보저장장치를 위한 고종횡비의 팁을 갖는 정전 구동형 폴리 실리콘 프로브 어레이 개발
전종업(Jong Up Jeon),이창수(Chang-Soo Lee),최재준(Jae-Joon Choi),민동기(Dong-Ki Min),전동렬(Dongryeol Jeon) Korean Society for Precision Engineering 2006 한국정밀공학회지 Vol.23 No.6
In this study, a probe array has been developed for use in a data storage device that is based on scanning probe microscope (SPM) and MEMS technology. When recording data bits by poling the PZT thin layer and reading them by sensing its piezoresponse, commercial probes of which the tip heights are typically shorter than 3㎛ raise a problem due to the electrostatic forces occurring between the probe body and the bottom electrode of a medium. In order to reduce this undesirable effect, a poly-silicon probe with a high aspect-ratio tip was fabricated using a molding technique. poly-silicon probes fabricated by the molding technique have several features. The tip can be protected during the subsequent fabrication processes and have a high aspect ratio. The tip radius can be as small as 15 ㎚ because sharpening oxidation process is allowed. To drive the probe, electrostatic actuation mechanism was employed since the fabrication process and driving/sensing circuit is very simple. The natural frequency and DC sensitivity of a fabricated probe were measured to be 18.75 ㎑ and 16.7 ㎚/V, respectively. The step response characteristic was investigated as well. Overshoot behavior in the probe movement was hardly observed because of large squeeze film air damping forces. Therefore, the probe fabricated in this study is considered to be very useful in probe-based data storages since it can stably approach toward the medium and be more robust against external shock.
Seung Ho Yeom,강관구,박진영,이성혁 대한기계학회 2023 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.37 No.1
This study numerically investigates the dynamic behavior and heat transfer characteristics of electro-thermal drilling probes with five probe-tip shapes by analyzing the evolution of thin molten liquid layers. Commercial code ANSYS Fluent (v.20.2) was used to simulate the melting process with the dynamic mesh technique and estimate the probe velocity for different probe-tip shapes through energy conservation between the heating power and melting rate of surrounding ice. The results revealed that using the cone-shaped probe tip allowed the probe to move faster than the flat or round tip shapes because its molten liquid mass flow rate was higher than the rates of other tip shapes. Moreover, the fastest penetration was achieved using a 30° cone probe tip with the lowest heat flux because the liquid layer thickness and thermal resistance were the smallest.
Dip-pen nanolithography를 위한 이중 팁을 가진 질화규소 프로브의 설계 및 제조
김경호(Kyung Ho Kim),한윤수(Yoonsoo Han) 한국표면공학회 2014 한국표면공학회지 Vol.47 No.6
We report the design, fabrication of a Si₃N₄ probe and calculation of its mechanical properties for DPN(dip pen nanolithography), which consists of dual tips. Concept of dual tip probe is to employ individual tips on probe as either an AFM tip for imaging or a writing tip for nano patterning. For this, the dual tip probe is fabricated using low residual stress Si₃N₄ material with LPCVD deposition and MEMS fabrication process. On the basis of FEM analysis we show that the functionality of dual tip probe for imaging is dependent on the dimensions of dual tip probe, and high ratio of widths of beam areas is preferred to minimize curvature variation on probe.
탐침형 정보저장 기술을 위한 실리콘 탐침의 나노 마멸 특성에 관한 연구
이용하(Y. H. Lee),정구현(K. H. Chung),김대은(D. E. Kim),유진규(J. G. Yoo),홍승범(S. B. Hong) 한국정밀공학회 2004 한국정밀공학회 학술발표대회 논문집 Vol.2004 No.10월
The reliability issue of the probe tip/recording media interface is one of the most crucial concerns in the Atomic Force Microscope (AFM)-based recording technology. In this work, the tribological characteristics of the probe/media interface were investigated by performing wear tests using an AFM. The ranges of applied normal load and sliding velocity for the wear test were 10 to 50nN and 2 to 20㎛/s respectively. The damage of the probe tip was quantitatively as well as qualitatively characterized by Field Emission Scanning Probe Microscope (FESEM) analysis and calculated based on Archard’s wear equation. It was shown that the wear coefficient of the probe tip was in the order of 10?⁴ ~10?³, and significant contamination at the end of the probe tip was observed. Thus in order to implement the AFM-based recording technology, tribological optimization of the probe/media interface must be achieved.
박동건(Dong-Gun Park),박용준(Yong Joon Park),임슬기(Seul-Ki Lim),김일(Il Kim),신상훈(Sanghun Shin),조현철(Hyun Chul Cho),박승필(SeungPil Park),김동원(Dong-Won Kim) 한국표면공학회 2012 한국표면공학회지 Vol.45 No.2
Probe tip, which should have not only superior electrical characteristics but also good abrasion resistance for numerous contacts with semiconductor pads to confirm their availability, is essential for MEMS probe card. To obtain good durability of probe tip, it needs thick and crack-free rhodium layer on the tip. However, when the rhodium thickness deposited by electroplating increased, unwanted cracks by high internal stress led to serious problem of MEMS probe tip. This article reported the method of thick Rh deposition with Au buffer layer on the probe tip to overcome the problem of high internal stress and studied mechanical and electrical properties of that. MEMS probe tip with double-Rh layer had good contact resistance and durability during long term touch downs.
Lei Wang,C. David Wright,Mustafa. M. Aziz,Ci Hui Yang,Guo Wei Yang 대한금속·재료학회 2014 ELECTRONIC MATERIALS LETTERS Vol.10 No.6
The capping layer and the probe tip that serve as the protective layer and the recording tool, respectively, for phase-change probe memory play an important role on the writing performance of phase-change probe memory, thus receiving considerable attention. On the other hand, their influence on the readout performance of phasechange probe memory has rarely been reported before. A three-dimensional parametric study based on the Laplace equation was therefore conducted to investigate the effect of the capping layer and the probe tip on the resulting reading contrast for the two cases of reading a crystalline bit from an amorphous matrix and reading an amorphous bit from a crystalline matrix. The results indicated that a capping layer with a thickness of 2 nm and an electrical conductivity of 50 Ω−1m−1 is able to provide an appropriate reading contrast for both the cases, while satisfying the previous writing requirement, particularly with the assistance of a platinum silicide probe tip.
터빈 블레이드 팁 형상과 간극 크기에 따른 전압 손실 연구
이기선(Ki Seon Lee),박승덕(Seoung Duck Park),노영철(Young Chul Noh),곽재수(Jae Su Kwak),전용민(Yongmin Jun) 한국유체기계학회 2008 유체기계 연구개발 발표회 논문집 Vol.2008 No.-
Leakage (Jaw through turbine blade tip gap causes strong leakage vortex on the blade suction side and induces large aerodynamic losses. In this study. The conventional plane tip and various squealer tip blades wore tested in a linear cascade in order to measure the effect of the tip shape on the aerodynamic loss by the tip leakage vortex Three tip gap clearances of 0.6%. 1.39'c. and 2.0% of blade span were tested. Flow measurement was conducted at one chord downstream from the trailing edge with five-hole probe. Results showed that the leakage vortex was stronger than passage vortex and the mass averaged overall total pressure loss through the cascade was the lowest for suction side tip compared to other tested tip cases. For all tested cases. the mass averaged overall total pressure loss was higher at 1.3% of tip gap clearance.
신명수(Myung-soo Shin),박준협(Jun-hyub Park),서정윤(Jeong-yun Seo) 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.5
The Probe Card is a test component which is to classify the good semiconductor chips before and after the packaging. The yield of semiconductor product can be improved by analysis of probe test information. An micro-probe tip must be manufactured using thin film to evaluate integrity of the semiconductor with narrow distance between pads. An electric break down of natural oxide film on metal contact, which is known as fritting, is a factor to decrease the performance of probe card. Therefore, a force over 5 gf is necessary to make good contact to electrodes. In addition, the probe tip has the life of more than 200,000 cycles, and the over drive above 50um to contact all pads, simultaneously. In this study, fatigue tests were performed for micro probe tip of BeCu to validate reliability of the probe. The fatigue test of load control with 5㎐ frequency was performed, in ambient environment. The fatigue cycles were compression-compression with mean stress, at stress ratio, R=0.l.
마찰력현미경을 이용한 나노스케일 마멸시험 시 다이아몬드 탐침으로의 MoS₂ 마멸입자 전이현상
송현준(Hyunjun Song),임형우(Hyeongwoo Lim),성권일(Kwon Il Seong),안효석(Hyo Sok Ahn) 한국트라이볼로지학회 2019 한국윤활학회지(윤활학회지) Vol.35 No.5
In friction and wear tests that use friction force microscopy (FFM), the wear debris transfer to the tip apex that changes tip radius is a crucial issue that influences the friction and wear performances of films and coatings with nanoscale thicknesses. In this study, FFM tests are performed for bilayer MoS₂ film to obtain a better understanding of how geometrical and chemical changes of tip apex influence the friction and wear properties of nanoscale molecular layers. The critical load can be estimated from the test results based on the clear distinction of the failure area. Scanning electron microscopy and energy-dispersive spectroscopy are employed to measure and observe the geometrical and chemical changes of the tip apex. Under normal loads lower than 1000 nN, the reuse of tips enhances the friction and wear performance at the tip-sample interface as the contact pair changes with the increase of tip radius. Therefore, the reduction of contact pressure due to the increase of tip radius by the transfer of MoS₂ or Mo-dominant wear debris and the change of contact pairs from diamond/MoS₂ to partial MoS₂ or Mo/MoS₂ can explain the critical load increase that results from tip reuse. We suggest that the wear debris transfer to the tip apex should be considered when used tips are repeatedly employed to identify the tribological properties of ultra-thin films using FFM.
오영련(Young Ryun Oh),김윤재(Yun Jae Kim),남현석(Hyun Suk Nam),박웅기(Ung Gi Park),이학주(Hak Joo Lee),김정엽(Jung Yub Kim),박준협(Jun Hyub Park) 대한기계학회 2012 大韓機械學會論文集A Vol.36 No.8
마이크로 프로브 팁의 설계는 매우 복잡하고 많은 비용이 든다. 이 논문에서는 새로운 타입의 프로브 팁을 유한요소해석을 이용하여 설계하였다. 유한요소해석을 이용하여 설계를 함으로써 복잡한 설계과정을 단순화 할 수 있다. 우선, 기존 프로브 팁의 실험 결과를 이용하여 유한요소해석기법을 검증하였다. 기존 프로브 팁의 물성은 100 ㎛ 의 압축 길이시 12.5 gf 의 접촉하중이 측정되었다. 본 연구에서는 새로운 타입의 프로브 팁을 제안하였다. 새로 설계된 프로브 팁의 재료는 NiCo 이며 프로브 팁의 물성은 100 ㎛ 의 압축 길이시 1~2 gf 의 접촉하중을 나타내었다. The design process of a micro-probe tip is very complicated and expensive. To avoid these problems, in this study, we used element (FE) analysis. To simplify design process . A new pre-probe tip (cobra-needle type) made of Ni and Co was designed by FE analysis. Experimental results were compared with those obtained by FE analysis to verify the reliability of the analysis. The contact force and over drive were respectively found to be 12.5 gf(Contact Force) and 100 ㎛(Over drive). We propose the new designed probe tip. Material of new designed probe tip is NiCo. Values of Property are 1~2 gf(Contact Force) and 100 μ㎛(Over drive).