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전도성 고분자 센서 어레이를 이용한 휘발성 유기 화합물 가스 인식
이경문,주병수,유준부,황하룡,이병수,이덕동,변형기,허증수 한국센서학회 2002 센서학회지 Vol.11 No.5
휘발성 유기 화합물 가스(Volatile Organic Compounds)를 인식하고 분석하기 위하여 전도성 고분자 센서어레이를 이용한 시스템을 제작하였다. Polypyrrole와 Polyaniline을 화학중합법으로 센서에 전도성고분자막을 형성하였고 이를 통해 VOC 검지용 센서 어레이를 제작하였다. 센서어레이로부터 측정되는 다차원 데이터는 주성분분석법(PCA)과 RBF(Radial Basis Function Network)을 이용하였다. 제안된 시스템으로 VOCs 가스를 인식하는데 있어서 RBF Network이 PCA방식보다 더욱 효율적인 것으로 판단되었다. We fabricated gas recognition system using conducting polymer sensor array for recognizing and analyzing VOCs(Volatile Organic Compounds) gases. The polypyrrole and polyaniline thin film sensors which were made by chemical polymerization were employed to detect VOCs. The multi-dimensional sensor signals obtained from the sensor array were analyzed using PCA(principal component analysis) technique and RBF(radial basis function) Network. Throughout the experimental trails, we confirmed that RBF Network is effective than PCA technique in identifying VOCs.
송갑득,박영일,이상문,이윤수,최낙진,주병수,서무교,허증수,이덕동 한국센서학회 2002 센서학회지 Vol.11 No.6
센서의 안정도와 감도를 개선시킬 수 있는 단일전극을 가진 열선형 마이크로 가스센서를 제작하였다. 일반적으로, 금속산화물 반도체를 이용한 가스센서는 히터전극과 감지전극의 두 개의 전극을 가지고 있다. 제작된 센서는 히터전극위에 감지물질을 형성하여 단일 전극을 가지는 구조를 가지고 있다. 히터와 감지전극으로 사용되는 Pt는 glass 기판위에 스퍼터링법으로 형성하였으며, SnO_2 감지물질은 제작된 Pt 전극위에 열증착시켜 형성하였다. SnO_2막은 lift-off 공정을 이용해서 패턴을 형성하고 1시간 동안 산소분위기에서 열산화하였다. 제작된 소자의 크기는 1.92x.1 mm^2 이다. CO 가스에 대한 감지특성을 조사한 결과 1,000 ppm에 대해 100 mV의 출력변화를 나타내었으며, 넓은 농도범위(0 ~ 10,000 ppm에서 선형적인 전압출력을 나타내었다. 또한 가스 반응 전과 반응 후의 전압출력을 비교해 볼 때, 1 % 이내의 편차를 나타내는 우수한 회복성을 나타내었다. Micro gas sensor with single electrode was proposed for improving stability and sensitivity, Generally, metal oxide gas sensors have two electrodes for heating and sensing. This fabricated new type sensor have only a single electrode by forming a sensing material onto heating electrode. Pt as a heating and sensing electrode was sputtered on glass and a SnO_2 sensing material was thermally evaporated on Pt electrode. SnO_2 was patterned by lift-off process and then thermally oxidized in O_2 condition for 1 hr., 600 ℃. The size fabricated sensor was 1.9 x 2.1 mm^2. As a result of CO gas sensing characteristics, this sensor showed 100 mV change for 1,000 ppm and linearlity for wide range(0 ~ 10,000 ppm) of gas concentrations. And the sensor shows a good recovery characteristics of 1 % deviation compared to initial resistance.
최낙진,심창현,송갑득,주병수,이윤수,이상문,이덕동,허증수 한국센서학회 2002 센서학회지 Vol.11 No.5
단일 기판위에 온도측정용 Pt 박막과 Pt 히터 그리고 가스 감지를 위하여 순수한 SnO_2 박막과 Pt가 첨가된 SnO_2박막을 설계하고 제작하였다. 제작된 소자는 실내환경가스인 이산화탄소, 프로판 그리고 부탄의 분류에 응용되었다. 동작 온도를 가변하기 위하여 히터의 입력 전압을 사다리꼴로 인가하면서 SnO_2 감지막의 반응특성과 실내환경가스들에 대한 분류여부를 조사하였다. 감지막 반응특성곡선에서 여러 변수들을 추출한 후 주성분분석(principal component analysis : PCA)을 통하여 가스 분류 특성을 검증하였다. Two SnO_2 based sensing films(pure SnO_2 and SnO_2/Pt) and a Pt thin film for temperature sensor on an alumina substrate were designed and fabricated for classifying the indoor environmental gases. By controlling the heating power in the shape of trapezoid, unique four sensing response curves created from both SnO_2 film and SnO_2/Pt film. Then, various parameters were extracted from sensing response curves and carried out principal component analysis(PCA). The results confirm that a sensor array with the proposed operating mode was extremely effective in classifying indoor environmental gases such as CO_2, C_3H_8, C_4H_10.
MOVPE of ZnSe with DIPSe and DMZn
Jeung-Soo Huh,Jeong-Ok Lim 한국진공학회(ASCT) 1998 Journal of Korean Vacuum Science & Technology Vol.2 No.2
Diisopropylselenide (DIPSe) is employed for the metalorganic vapor phase epitaxy (MOVPE) of ZnSe in order to eliminate premature gas phase reaction while maintaining negligible carbon incorporation and preserving relatively low growth temperature. In combination with dimethylzinc, single crystalline ZnSe layers were grown on GaAs at temperature around 450℃. Secondary ion mass spectrometry showed a negligible carbon incorporation in ZnSe films grown from DIPSe even at high [VI]/[II] ratios, in contrast of a carbon concentration of 10²¹ ㎝-³ in ZnSe films grown from diallyselenide (DASe). Crystalline and interface quality are demonstrated by secondary electron microscopy, secondary ion mass spectroscopy and double crystal X-ray diffraction.
MOVPE of ZnSe with DIPSe and DMZn
Soo, Huh-Jeung,Ok, Lim-Jeong The Korean Vacuum Society 1998 Journal of Korean Vacuum Science & Technology Vol.2 No.2
Diisopropylselenide (DIPSe) is employed for the metalorganic vapor phase epitaxy (MOVPE) of ZnSe in order to eliminate premature gas phase reaction while maintaining negligible carbon incorporation and preserving relatively low growth temperature. In combination with dimethylzinc, single crystalline ZnSe layers were grown on GaAs at temperature around 450$^{\circ}C$. Secondary ion mass spectrometry showed a negligible carbon incorporation in ZnSe films grown from DIPSe even at high [Ⅵ]/[II] ratios, in contrast of a carbon concentration of 1021 cm-3 in ZnSe films grown from diallyselenide (DASe). Crystalline and interface quality are demonstrated by secondary electron microscopy, secondary ion mass spectroscopy and double crystal X-ray diffraction.
HUH, Jeung Soo,Lim, Jeong Ok,Sohn, Byung Ki 한국센서학회 1995 센서학회지 Vol.4 No.4
A novel biomaterial capable of incorporating biotinylated biomolecule has been synthesized. Our strategy is to biotinylate one-dimensional electroactive polymers and use a bridging streptavidin protein on Langmuir-Blodgett (LB) organized films. These copolymers are derivatized with long alkyl chains and biotin moieties to bind, respectively, to the hydrophobic surface and the biotinylated species, through the biotin and streptavidin complexation. We utilize the polymer assembly approach to attach a signal transducing biomolecule biotinylated phycoerythrin (B-PE) into this novel biomaterial by binding the unoccupied biotin binding sites on the hound streptavidin (4 sites total). The pressure-area isotherm of the protein injected monolayer showed area expansion. A characteristic fluorescent emission peak at 516nm was detected from the monolayer transferred onto a solid substrate. These observations demonstrated the promise of the organized thin polymer assemblies for their application to the sensor system.