http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
최낙진,반태현,곽준혁,백원우,김재창,허증수,이덕동 한국전기전자재료학회 2003 전기전자재료학회논문지 Vol.16 No.12
Nerve gas sensor based on tin oxide was fabricated and its characteristics were examined. Target gas is dimethyl methyl phosphonate(C$_3$ $H_{9}$ $O_3$P, DMMP) that is simulant gas of nerve gas. Sensing materials were Sn $O_2$ added a-Al$_2$ $O_3$ with 0∼20wt.% and were physically mixed each material. They were deposited by screen printing method on alumina substrate. The sensor device was consisted of sensing electrode with interdigit(IDT) type in front and a heater in back side. Total size of device was 7${\times}$10${\times}$0.6㎣. Crystallite size & phase identification and morphology of fabricated Sn $O_2$ powders were analyzed by X-ray diffraction and by a scanning electron microscope, respectively. Fabricated sensor was measured as flow type and resistance change of sensing material was monitored as real time using LabVIEW program. The best sensitivity was 75% at adding 4wt.% $\alpha$-Al$_2$ $O_3$, operating temperature 30$0^{\circ}C$ to DMMP 0.5ppm. Response and recovery time were about 1 and 3min., respectively. Repetition measurement was very good with $\pm$3% in full scale.$\pm$3% in full scale.
Detection of Blood Agent Gas Using SnO₂ Thin Film Gas Sensor
최낙진,이덕동,곽준혁,임연태,주병수,반태현 한국대기환경학회 2004 한국대기환경학회지 Vol.20 No.E2
In this study, thin film gas sensor based on tin oxide was fabricated to examine its characteristics. Target gas is acetonitrile (CH₃CN) which is a blood simulant for the chemical warfare agent. Sensing materials are SnO₂, SnO₂/Pt, and Sn/Pt with thickness from 1000 to 3000Å. The sensor consists of a sensing electrode with inter-digit (IDT) type in front side and a heater in rear side. Resistance changes of sensing materials are monitored on real time basis using a data acquisition board with a 12-bit analog to digital converter. Sensitivities are measured at different operating temperatures also with different gas concentrations and film thickness. The high sensitivity is obtained for Sn (3000Å)/Pt (30Å) at 300℃ for 3 ppm. Response and recovery times were about 40 and 160 s, respectively. Repetition measurements showed very good results with ±3% in full scale range.