Advanced Process Control of the Critical Dimension in Photolithography

Wu, Chien-Feng,Hung, Chih-Ming,Chen, Juhn-Horng,Lee, An-Chen Korean Society for Precision Engineering 2008 International Journal of Precision Engineering and Vol.9 No.1

This paper describes two run-to-run controllers, a nonlinear multiple exponential-weight moving-average (NMEWMA) controller and a dynamic model-tuning minimum-variance (DMTMV) controller, for photolithography processes. The relationships between the input recipes (exposure dose and focus) and output variables (critical dimensions) were formed using an experimental design method, and the photolithography process model was built using a multiple regression analysis. Both the NMEWMA and DMTMV controllers could update the process model and obtain the optimal recipes for the next run. Quantified improvements were obtained from simulations and real photolithography processes.

Advanced Process Control of the Critical Dimension in Photolithography

Chien-Feng Wu,Chih-Ming Hung,Juhn-Horng Chen,An-Chen Lee 한국정밀공학회 2008 International Journal of Precision Engineering and Vol.9 No.1

This paper describes two run-to-run controllers, a nonlinear multiple exponential-weight moving-average (NMEWMA) controller and a dynamic model-tuning minimum-variance (DMTMV) controller, for photolithography processes. The relationships between the input recipes (exposure dose and focus) and output variables (critical dimensions) were formed using an experimental design method, and the photolithography process model was built using a multiple regression analysis, Both the NMEWMA and DMTMV controllers could update the process model and obtain the optimal recipes for the next run Quantified improvements were obtained from simulations and real photolithography processes.

Improvement of bond strength and durability of concrete incorporating high volumes of class F fly ash

Wu, Chung-Hao,Chen, Chien-Jung,Lin, Yu-Feng,Lin, Shu-Ken Techno-Press 2021 Advances in concrete construction Vol.12 No.5

This study experimentally investigated the improvement of bond strength and durability of concrete containing high volume fly ash. Concrete mixtures made with 0%, 25% and 60% replacement of cement with class F fly ash were prepared. Water-binder ratios ranged from 0.28 to 0.72. The compressive, flexural and pullout bond strength, the resistance to chloride-ion penetration, and the water permeability of concrete were measured and presented. Test results indicate that except for the concretes at early ages, the mechanical properties, bond strength, and the durability-related chloride-ion permeability and water permeability of concrete containing high volume (60% cement replacement) fly ash were obviously superior to the concrete without fly ash at later ages of beyond 56 days. The enhanced bond strength for the high volume fly-ash concrete either with or without steel confinement is a significant finding which might be valuable for the structural application.

Chrysophanol-induced Necrotic-like Cell Death through an Impaired Mitochondrial ATP Synthesis in Hep3B Human Liver Cancer Cells

Chien-Hang Ni,Jing-Gung Chung,Po-Yuan Chen,Hsu-Feng Lu,Jai-Sing Yang,Hui-Ying Huang,Shin-Hwar Wu,Siu-Wan Ip,Chin-Tung Wu,Su-Yin Chiang,Jaung-Geng Lin,W. Gibson Wood 대한약학회 2012 Archives of Pharmacal Research Vol.35 No.5

Liver cancer is the most common form of cancer in Taiwan and it usually responds to chemotherapy. However, patients often have side effects to the chemotherapeutic drugs. Thus new agents are urgently required to treat liver cancer. Chrysophanol, one of the anthraquinone derivatives, was reported to inhibit some human cancer cell growth which may be due to the induction of apoptosis similar to other anthraquinone derivatives though such actions have not been reported. In the present study, we reported that chrysophanol inhibits cell growth in Hep3B liver cancer cells based on the following observations: 1) induc cell morphological changes; 2) decreased percentage of viable cells; 3) induced S phase arrest of cell cycle progression; 4) induced DNA damage as measured by comet assay and DAPI staining. Chrysophanolinduced cell death however, seems to be related to necrotic processes rather than typical apoptosis. Chrysophanol induced reactive oxygen species and Ca2+ production and decreased mitochondrial membrane potential (ΔΨm) and ATP levels in Hep3B cells. No effects were observed on known protein regulators of apoptosis such as Bax and Bcl-2. Chrysophanolinduced cell death took place independently of caspase-8 and -9. Based on our findings, we propose that chrysophanol reduces cellular ATP levels causing a drop in energy resulting in necrotic-like cell death.

Nucleophosmin modulates the alleviation of atopic dermatitis caused by the marine-derived compound dihydroaustrasulfone alcohol

Han-Chun Hung,Chien-Wei Feng,Yen-You Lin,Chun-Hong Chen,Kuan-Hao Tsui,Wu-Fu Chen,Chieh-Yu Pa,Jyh-Horng Sheu,Chun-Sung Sung,Zhi-Hong Wen 생화학분자생물학회 2018 Experimental and molecular medicine Vol.50 No.-

Atopic dermatitis (AD) is a chronic inflammatory skin disease, and its prevalence is increasing. AD usually elicits skin barrier dysfunction, dry skin and itching. As the mechanisms of AD remain unknown, there is an urgent need to find effective therapies. Because of the diversity and complexity of marine environments, the discovery of drugs from marine organisms as novel therapeutic agents for human diseases has seen renewed interest. Dihydroaustrasulfone alcohol (WA-25), the synthetic precursor of austrasulfone, which is a natural product isolated from a Formosan soft coral, has been shown to possess many therapeutic effects in our previous studies. However, the detailed mechanisms and therapeutic effects of WA-25 on AD are incompletely understood. We performed in vitro and in vivo studies to examine the effects of WA-25 on AD. We showed that WA-25 blocks inflammation and oxidative stress. Simultaneously, we also found that WA-25 reduces the AD scores and AD-induced transepidermal water loss (TEWL), scratching behavior, and alloknesis. WA-25 is more effective in cases of AD than are the drugs that are currently used clinically. Importantly, we also found that when nucleophosmin (NPM) was inhibited or when its expression was reduced, the anti-inflammatory and anti-AD effects of WA-25 were blocked. These data suggest that NPM plays dual roles in inflammation and AD. Overall, these results suggest that WA-25 is a potential anti-inflammatory and AD therapeutic agent that is modulated by NPM.

Breast density analysis for whole breast ultrasound images : Whole breast ultrasound density analysis

Chen, Jeon-Hor,Huang, Chiun-Sheng,Chien, Kuang-Che Chang,Takada, Etsuo,Moon, Woo Kyung,Wu, Jeffery H. K.,Cho, Nariya,Wang, Yi-Fa,Chang, Ruey-Feng Wiley (John WileySons) 2009 Medical physics Vol.36 No.11

<P>Breast density has been established as an independent risk factor associated with the development of breast cancer. The terms mammographic density and breast density are often used interchangeably, since most breast density studies are performed with projection mammography. It is known that increase in mammographic density is associated with an increased cancer risk. A sensitive method that allows for the measurement of small changes in breast density may provide useful information for risk management. Despite the efforts to develop quantitative breast density measurements from projection mammograms, the measurements show large variability as a result of projection imaging, differing body position, differing levels of compression, and variation of the x-ray beam characteristics. This study used two separate computer-aided methods, threshold-based and proportion-based evaluations, to analyze breast density on whole breast ultrasound (US) imaging and to compare with the grading results of three radiologists using projection mammography. Thirty-two female subjects with 252 images per case were included in this study. Whole breast US images were obtained from an Aloka SSD-5500 ultrasound machine with an ASU-1004 transducer (Aloka, Japan). Before analyzing breast density, an adaptive speckle reduction filter was used for removing speckle noise, and a robust thresholding algorithm was used to divide breast tissue into fatty or fibroglandular classifications. Then, the proposed approaches were applied for analysis. In the threshold-based method, a statistical model was employed to determine whether each pixel in the breast region belonged to fibroglandular or fatty tissue. The proportion-based method was based on three-dimensional information to calculate the volumetric proportion of fibroglandular tissue to the total breast tissue. The experimental cases were graded by the proposed analysis methods and compared with the ground standard density classification assigned by a majority voting of three experienced breast radiologists. For the threshold-based method, 28 of 32 US test cases and for the proportion-based density classifier, 27 of 32 US test cases were found to be in agreement with the radiologist 'ground standard' mammographic interpretations, resulting in overall accuracies of 87.5% and 84.4%, respectively. Moreover, the concordance values of the proposed methods were between 0.0938 and 0.1563, which were less than the average interobserver concordance of 0.3958. The experiment result showed that the proposed methods could be a reference opinion and offer concordant and reliable quantification of breast density for the radiologist.</P>

Effects of post anneal for the INZO films prepared by ultrasonic spray pyrolysis

Lan, Wen-How,Li, Yue-Lin,Chung, Yu-Chieh,Yu, Cheng-Chang,Chou, Yi-Chun,Wu, Yi-Da,Huang, Kai-Feng,Chen, Lung-Chien Techno-Press 2014 Advances in nano research Vol.2 No.4

Indium-nitrogen co-doped zinc oxide thin films (INZO) were prepared on glass substrates in the atmosphere by ultrasonic spray pyrolysis. The aqueous solution of zinc acetate, ammonium acetate and different indium sources: indium (III) chloride and indium (III) nitrate were used as the precursors. After film deposition, different anneal temperature treatment as 350, 450, $550^{\circ}C$ were applied. Electrical properties as concentration and mobility were characterized by Hall measurement. The surface morphology and crystalline quality were characterized by SEM and XRD. With the activation energy analysis for both films, the concentration variation of the films at different heat treatment temperature was realized. Donors correspond to zinc related states dominate the conduction mechanism for these INZO films after $550^{\circ}C$ high temperature heat treatment process.