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FeRAM 소자 제작 중에 발생하는 Pt/Al 반응 기구
조경원,홍태환,권순용,최시경,Cho Kyoung-Won,Hong Tae-Whan,Kweon Soon-Yong,Choi Si-Kyong 한국재료학회 2004 한국재료학회지 Vol.14 No.10
The capacitor contact barrier(CCB) layers have been introduced in the FeRAM integration to prevent the Pt/Al reaction during the back-end processes. Therefore, the interdiffusion and intermetallic formation in $Pt(1500{\AA})/Al(3000{\AA})$ film stacks were investigated over the annealing temperature range of $100\sim500^{\circ}C$. The interdiffusion in Pt/Al interface started at $300^{\circ}C$ and the stack was completlely intermixed after annealing over $400^{\circ}C$ in nitrogen ambient for 1 hour. Both XRD and SBM analyses revealed that the Pt/Al interdiffusion formed a single phase of $RtAl_2$ intermetallic compound. On the other hand, in the presence of TiN($1000{\AA}$) barrier layer at the Pt/Al interface, the intermetallic formation was completely suppressed even after the annealing at $500^{\circ}C$. These were in good agreement with the predicted effect of the TiN diffusion barrier layer. But the conventional TiN CCB layer could not perfectly block the Pt/Al reaction during the back-end processes of the FeRAM integration with the maximum annealing temperature of $420^{\circ}C$. The difference in the TiN barrier properties could be explained by the voids generated on the Pt electrode surface during the integration. The voids were acted as the starting point of the Pt/Al reaction in real FeRAM structure.
Mg<sub>8</sub>Ti<sub>2-</sub>(10, 20 wt.%)Ni 수소저장합금의 제조 및 수소화 특성 평가
김경일,홍태환,Kim, Kyeong-Il,Hong, Tae-Whan 한국재료학회 2010 한국재료학회지 Vol.20 No.10
The hydrogen energy had recognized clean and high efficiency energy source. The research field of hydrogen energy was production, storage, application and transport. The commercial storage method was using high pressure tanks but it was not safety. However metal hydride was very safety due to high chemical stability. Mg and Mg alloys are attractive as hydrogen storage materials because of their lightweight and high absorption capacity (about 7.6 wt%). Their range of applications could be further extended if their hydrogenation properties and degradation behavior could be improved. The main emphasis of this study was to find an economical manufacturing method for Mg-Ti-Ni-H systems, and to investigate their hydrogenation properties. In order to examine their hydrogenation behavior, a Sievert's type automatic pressure-compositionisotherm (PCI) apparatus was used and experiments were performed at 423, 473, 523, 573, 623 and 673 K. The results of the thermogravimetric analysis (TGA) revealed that the absorbed hydrogen contents were around 2.5wt.% for (Mg8Ti2)-10 wt.%Ni. With an increasing Ni content, the absorbed hydrogen content decreased to 1.7 wt%, whereas the dehydriding starting temperatures were lowered by some 70-100 K. The results of PCI on (Mg8Ti2)-20 wt.%Ni showed that its hydrogen capacity was around 5.5 wt% and its reversible capacity and plateau pressure were also excellent at 623 K and 673 K.
임샛별,유희정,홍태환,정미원,Lim, Saet-Byeol,You, Hee-Jung,Hong, Tae-Whan,Jung, Mie-Won 한국재료학회 2010 한국재료학회지 Vol.20 No.9
$Al_2O_3$ has received wide attention with established use as a catalyst and growing application in structural or functional ceramic materials. On the other hand, the boehmite (AlO(OH)) obtained by sol-gel process has exhibited a decrease in surface area during phase transformation due to a decline in surface active site at high temperature. In this work, $Al_2O_3$-CuO/ZnO (ACZ) and $Al_2O_3$-CuO/CeO (ACC) composite materials were synthesized with aluminum isopropoxide, copper (II) nitrate hemi (pentahydrate), and cerium (III) nitrate hexahydrate or zinc (II) nitrate hexahydrate. Moreover, the Span 80 as the template block copolymer was added to the ACZ/ACC composition to make nano size particles and to keep increasing the surface area. The ACZ/ACC synthesized powders were characterized by Thermogravimetry-Differential Thermal analysis (TG/DTA), X-ray Diffractometer (XRD), Field-Emmision Scanning Electron Microscope (FE-SEM), Bruner-Emmett-Teller (BET) surface analysis and thermal electrical conductivity (ZEM-2:M8/L). An enhancement of surface area with the addition to Span 80 surfactant was observed in the ACZ powders from 105 $m^2$/g to 142 $m^2$/g, and the ACC powders from 103 $m^2$/g to 140 $m^2$/g, respectively.
이상점성 처리된 Mg-3, 6wt%Ni합긍의 수소화 특성평가
이성곤,하원,홍태환,김영직,Lee, Sung-Gon,Ha, Won,Hong, Tae-Whan,Kim, Young-Jig 한국재료학회 2002 한국재료학회지 Vol.12 No.12
Magnesium-3, 6wt% Nickel alloys were fabricated by Rotation-Cylinder Method(RCM) in ambient atmosphere. The alloys were divided into two different heat-treating conditions, as-cast and thixotropic treated. Thixotropic heat treatment enhances the separation of primary hydride former of Mg and the catalytic phase of $Mg_2$Ni. Hydrogenation properties of the each alloy were evaluated and compared by PCI(Pressure-Composition Isotherm) measurement. The maximum hydrogen capacity and the reversible capacity of as -cast Mg-6wt% Ni alloy were 5.2wt% and 3.8wt% at 623k, respectively.
KCl을 사용한 LiNi<sub>0.6</sub>Co<sub>0.2</sub>Mn<sub>0.2</sub>O<sub>2</sub>계 양극활물질의 잔류리튬 저감 및 전기화학특성 개선
유기원,신미라,신태명,홍태환,김홍경,Yoo, Gi-Won,Shin, Mi-Ra,Shin, Tae-Myung,Hong, Tae-Whan,Kim, Hong-kyeong 한국전기화학회 2017 한국전기화학회지 Vol.20 No.1
$LiNi_{0.6}Co_{0.2}Mn_{0.2}O_2$의 전구체 물질에 KCl을 첨가함으로써, 리튬카보네이트($Li_2CO_3$)와 리튬수산화물(LiOH)의 양을 감소시켰을 때 전기화학특성에 어떤 영향을 주는지에 대한 연구를 진행하였다. KCl을 1 질량 %로 전구체에 첨가하여 $800^{\circ}C$에서 열처리 한 샘플의 경우, 첨가하지 않은 재료와 대비하여 잔류하는 리튬카보네이트($Li_2CO_3$)는 8,464 ppm에서 1,639 ppm으로 리튬수산화물(LiOH)은 8,088 ppm에서 6,287 ppm으로 크게 감소하였다. XRD 분석결과 KCl의 첨가는 모상구조에 영향을 주지 않았으며, 층상구조 결정성이 약간 개선되는 효과가 확인되었다. 또한, 전하전달 저항($R_{ct}$)은 $255{\Omega}$에서 KCl 첨가 시 $99{\Omega}$으로 감소하였다. 초기 방전 용량은 171.04 mAh/g에서 182.73 mAh/g으로 증가하였으며 싸이클 특성도 개선되었다. 특히, AFM 분석을 통하여 표면적이 50% 감소하는 것을 확인하였는데, 이는 잔류리튬의 산화반응으로 인한 열 때문일 것으로 해석되고, 전해질과의 부반응을 억제할 수 있는 장점이 있었다. 잔류리튬 제거를 위해 KCl을 첨가한 연구는, 아직까지 발표된 바가 없으며, $LiNi_{0.6}Co_{0.2}Mn_{0.2}O_2$계 양극활물질의 전기화학특성을 개선하는데 매우 효과적임을 본 연구를 통해 확인할 수 있었다. Using a precursor of $LiNi_{0.6}Co_{0.2}Mn_{0.2}O_2$ as a starting material, a surface-modified cathode material was obtained by coating with KCl, where the added KCl reduces residual Li compounds such as $Li_2CO_3$ and LiOH, on the surface. The resulting electrochemical properties were investigated. The amounts of $Li_2CO_3$ and LiOH decreased from 8,464 ppm to 1,639 ppm and from 8,088 ppm to 6,287 ppm, respectively, with 1 wt% KCl added $LiNi_{0.6}Co_{0.2}Mn_{0.2}O_2$ that had been calcined at $800^{\circ}C$. X-ray diffraction results revealed that 1 wt% of KCl added $LiNi_{0.6}Co_{0.2}Mn_{0.2}O_2$ did not affect the parent structure but enhanced the development of hexagonal crystallites. Additionally, the charge transfer resistance ($R_{ct}$) decreased dramatically from $225{\Omega}$ to $99{\Omega}$, and the discharge capacity increased to 182.73mAh/g. Using atomic force microscopy, we observed that the surface area decreased by half because of the exothermic heat released by the Li residues. The reduced surface area protects the cathode material from reacting with the electrolyte and hinders the development of a solid electrolyte interphase (SEI) film on the surface of the oxide particles. Finally, we found that the introduction of KCl into $LiNi_{0.6}Co_{0.2}Mn_{0.2}O_2$ is a very effective method of enhancing the electrochemical properties of this active material by reducing the residual Li. To the best of our knowledge, this report is the first to demonstrate this phenomenon.