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무수축 기판 상에 UV 레이저 가공에 의한 Taper 현상
안익준,여동훈,신효순,심광보,Ahn, Ik-Jun,Yeo, Dong-Hun,Shin, Hyo-Soon,Shim, Kwang Bo 한국결정성장학회 2015 韓國結晶成長學會誌 Vol.25 No.6
프로브카드의 소형화, 고기능화. 고집화에 따라 고강도 무수축 기판에 레이저 가공 공정을 이용한 미세 홀 천공에 대한 관심이 높아지고 있다. 그린 상태에서 레이저 펀처로 미세 홀을 천공 시 테이퍼 현상이 중요한 공정 문제가 되고 있다. Entrance hole과 exit hole의 크기 차이는 홀 크기가 작을수록 커지고, 홀 크기가 커질수록 작아지는 경향을 나타내었다. 테이퍼 현상을 개선하기 위해 second hole 가공 공정을 적용하였다. 기판의 두께가 $380{\mu}m$인 기판 상에 $80{\mu}m$ 홀 천공시 최적의 second hole 크기를 찾기 위해 $70{\sim}79{\mu}m$ 홀을 천공하였을 경우 $76{\mu}m$와 $77{\mu}m$에서 테이퍼는 11.9 %로 가장 낮게 나타났다. 천공된 무수축 기판을 소결한 후에는 테이퍼가 7 %로 개선되었다. First hole 크기와 비교하였을 때 second hole 크기는 first hole 크기의 약 95~97 % 일 때 테이퍼가 가장 적었다. With the miniaturization with both high functionality and high integrity of the probe cards, the highly precise laser punching on the zero-shrinkage high strength substrate has attracted more attention recently. Taper occurrence during laser-punching on green sheets appears as a problem in process. The size (diameter) difference between the entrance hole and the exit hole in tapered holes appeared to be inversely proportional to the hole size itself. To suppress taper occurrence, two-stage punching was adopted as the size of second hole was varied from $70{\mu}m$ to $79{\mu}m$ when punching $80{\mu}m$ via holes on the substrate with thickness of $380{\mu}m$. The minimal taper ratio of 11.9 % appeared with second hole size between 70 to $79{\mu}m$ before sintering. Taper ratio reduced to 7 % after zero-shrinkage sintering. The size difference between first hole and second hole appeared minimal when the size of second hole was 95~97 % to that of first hole.
카본을 첨가한 LTCC 그린 시트에서 UV 레이저를 이용한 미세 홀 터짐 현상 제어
김시연,안익준,여동훈,신효순,윤호규,Kim, Shi Yeon,Ahn, Ik-Joon,Yeo, Dong-Hun,Shin, Hyo-Soon,Yoon, Ho Gyu 한국전기전자재료학회 2016 전기전자재료학회논문지 Vol.29 No.12
Hole explosion behaviors were observed during drilling fine holes with laser beam on the LTCC green bar of $320{\mu}m$ thick after lamination of green sheets prepared by tape casting of thick film process. The incidence of these hole explosions was inversely proportional to hole sizes. The incidence of hole explosion was 20 % number of hole with the size of $60{\mu}m$ exploded for the UV radiation, while the explosion did not appear for hole sizes over $100{\mu}m$. To prevent hole explosion behavior during laser-drilling of fine holes, carbon black powder was added as an additive in the LTCC composition, which has superior thermal durability. As a consequence, hole explosion rate was suppressed to 0.8 % for the hole size of $50{\mu}m$ green sheet with the carbon black amount of 10 weight % and the laser power of 3 watt. Added carbon is thought to reduce the heat-affected region during laser drilling.