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마이크로 가스센서의 저전력 구동을 위한 마이크로 플랫폼의 제작과 특성
장웅진 ( Woong Jin Jang ),박광범 ( Kwang Bum Park ),김인호 ( In Ho Kim ),박순섭 ( Soon Sup Park ),박효덕 ( Hyo Derk Park ),이인규 ( In Kyu Lee ),박준식 ( Joon Shik Park ) 한국센서학회 2011 센서학회지 Vol.20 No.5
A Micro platform for micro gas sensor consisted of micro heater, insulator, and sensing electrode on 2 μm thick SiNx membrane. Three types of micro platforms were designed and fabricated with membrane sizes. Total size of micro platform was 2.6 mm by 2.6 mm. Measured power consumptions were 28 mW, 28 mW, and 32.5 mW for Type 1, Type 2, and Type 3. At this moment, temperatures of membranes on the platforms were 295℃, 297℃, and 296℃, respectively. Fabricated micro platform considered appropriate to apply for low power consumption micro gas sensor. Micro gas sensors were prepared by the sequence that SnO2 nanopowder pastes were dropped on membrane of Type 1 platforms, dried in oven, heat-treated with micro heaters in platforms. One of the micro gas sensors was tested for gas response to 1157 ppm, 578 ppm, and 231 ppm of methane and 1.68 ppm, 0.84 ppm, and 0.42 ppm of NO2.