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Cu ECMP 공정에서 전해액이 연마거동에 미치는 영향
권태영,김인권,김태곤,조병권,박진구,Kwon, Tae-Young,Kim, In-Kwon,Kim, Tae-Gon,Cho, Byung-Gwun,Park, Jin-Goo 한국재료학회 2008 한국재료학회지 Vol.18 No.6
The purpose of this study is to characterize various electrolytes on electrochemical mechanical planarization (ECMP). The ECMP system was modified from conventional CMP system to measure the potentiodynamic curve and removal rate of Cu. The potentiodynamic curves were measured in static and dynamic states in investigated electrolytes using a potentiostat for the evaluation of the polishing behavior on ECMP. KOH (alkaline) and $NaNO_3$ (salt) were selected as electrolytes which have high conductivity. In static and dynamic states, the corrosion potential decreased and the corrosion current increased as a function of the electrolyte concentration. But, the electrochemical reaction was prevented by mechanical polishing effect in the dynamic state. The static etch and removal rate were measured as functions of concentration and applied voltage. When $NaNO_3$ was used, the dissolution was much faster than that of KOH. It was concluded that the removal rate was strongly depended on electrochemical dissolution. The removal rate increased up to 350 nm/min in $NaNO_3$ based electrolyte.
권태영,안승락,송철,박종균,김영섭,황재삼,권오유,Kwon, Tae-Young,An, Seung-Lak,Song, Cheol,Park, Jong-Kyun,Kim, Young-Sub,Hwang, Jae-Sam,Kwon, O-Yu 한국생명과학회 1998 생명과학회지 Vol.8 No.1
진딧물이 하나의 ribosomal RNA 유전자(rDNA)단위는 총 길이가 13,061bp이며 총 G/C비율은 59%이다. 그것을 구성하고 있는 각 영역의 길이와 G/C비율은 다음과 같다. 5’ETS는 G/C비율이 69%이고 843bp이다 . 18S rRNA 는 2,469bp이며 G/C비율은 59%이다. ITS I길이는 229bp이며 70%의 G/C비율이다. 5.8S rRNA는 160bp이며 63%의 G/C비율이다. ITS II는 325bp이며 70%dml G/C비율이다. 28S rRNA는 4, 147bp이고 60%의 G/C비율이다. IGS는 4,888bp로 55%의 G/C비율이다. The length and G/C concent of regions of an aphid rDNA unit that spans 13,061bo with 59% G/C content. flolowing belowing below are the those results, 5’ETS is 843bp in length with 69% G/C content, 18S is 2,469bp in length with 59% G/C content, ITS I is 229bp in length with 70% G/C content, 5.8S is 160bp in length with 63% G/C content, ITS II is 325bp in length with 70% G/C content, 28S is 4, 147bp in length with 60% G/C content, IGS is 4,888bp in length with 55% G/C content.