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유전체 박막을 이용한 다이아프램형 광섬유 Fabry - Perot 간섭계압력센서의 특성
김명규,유양욱,권대혁,이정희,김진섭,박재희,채용웅,손병기 ( M . G . Kim,Y . W . Yoo,D . H . Kwon,J . H . Lee,J . S . Kim,J . H . Park,Y . Y . Chai,B . K . Sohn ) 한국센서학회 1998 센서학회지 Vol.7 No.3
The strain characteristics of a fiber optic Fabry-Perot pressure sensor with high sensitivity using a Si₃N₄/SiO₂/Si₃N₄ (N/O/N) diaphragm is experimentally investigated. A 600 nm thick N/o/N diaphragm was fabricated by silicon anisotropic etching technology in 44 wt KOH solution. An interferometric fiber optic pressure sensor has been manufactured by using a fiber optic Fabry-Perot intereferometer and a N/O/N diaphragm. The 2 cm length fiber optic Fabry-Perot interferometers in the continuous length of single mode fiber were produced with two pieces of single mode fiber coated with TiO₂ dielectric film utilizing the fusion splicing technique. The one end of the fiber optic Fabry-Perot interferometer was bonded to a N/O/N diaphragm, and the other end was connected to an optical setup through a 3 dB coupler. For the N/O/N diaphragm sized 2 x 2 ㎟ and 8 x 8 ㎟, the pressure sensitivity was measured 0.11 rad/kPa and 1.57 rad/kPa, respectively, and both of the nonlinearities were less than 0.2%FS.
權大赫,金泳進 慶一大學校 1999 論文集 Vol.16 No.5
The effect of solution flow on sensor response is one of significant factors in characteriing the FET-type dissolved oxygen sensor performance since turbulent flow will disturb the steady-state pH-profiles in a solution near the working electrode. To investigate the dependnce of the flow on the sensor output, a simple stirring vessel was used. In a static solujtion, output of sensor reached a steady-state within about. When the solution in the measuring vessel was midly stirred, output magnitude of sensor decreased with fluctuation, copared with that of sensor operated in the static solution. It is suggested that the convection of the solution considerably affects a sontour of the pH profile in the local area in close proximity to the pH-sensing gate. Abrupt decays of the output magnitude can be seen even in a slow flow rates, and the a gradual decline in high flow rates.
SOL-GEL법을 이용한 Ta₂O_(5) 감지 게이트 pH-ISFET의 제조와 그 동작특성
장기석,이정철,조병욱,권대혁,김창수,손병기 경북대학교 센서기술연구소 1995 센서技術學術大會論文集 Vol.6 No.1
Low drift pH-ISFET is presented in this paper. Ta_(2)O_(5), known as a good pH sensing membrane, was formed by sol-gel method on Si_(3)N_(4)/SiO_(2) gate of pH-ISFET. It has been reported that the drift of the pH-ISFET is caused by the surface deterioration or hydration of sensing membrane. Hydration is resulted from diffusion of ions into the sensing membrane. It is reported that Ta205 film does not show surface deterioration but hydration while Si_(3)N_(4) film is not hydrated but its surface is deteriorated. Therefore, ultra thin(about 100Å) Ta_(2)O_(5) sensing membrane was formed by sol-gel method on the Si3N4to shorten the hydration time. The fabricated Ta205 pH-ISFET showed good sensitivity(58~59 mV/pH) in a wide pH range(pH3~11) as well as very low drift (0.06 pH/day)