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p-n접합을 이용한 ISFET의 encapsulation
權大赫 慶一大學校 1992 論文集 Vol.8 No.1
The p-n junction isolation method for the electrical isolation of ISFET chip from the liquid environments has been presented instead of the conventional encapsulant castings carried out by the manual labors which requires much time and experiences. This junction-isolated ISFET showed similar operational characteristics compared with those of the encapsulant-coated ISFET.
Sol - Gel 법으로 형성한 Ta2O5 게이트 ISFET 의 pH 드리프트 특성
권대혁,조병욱,김창수,손병기 ( Dae Hyuk Kwon,Byung Woog Cho,Chang Soo Kim,Byung Ki Sohn ) 한국센서학회 1996 센서학회지 Vol.5 No.2
The diffusion of hydrogen ions into a sensing membrane causes the output voltage of pH-ISFEI to van- with time, which might be considered to be drift in this sensor. We tried to deposit ultra-thin film for minimizing the drift that has been considered to be main obstacle for putting pH-ISFET to practical use. In this paper, tantalum pentoxide, known as a good pH sensing membrane, was formed to about 70Å thick by sol-gel method on Si₂N₄/SiO₂-gate of pH-ISFET. The fabricated Ta₂O_5-gate pH-ISFET showed good sensitivity(about 59mV/ pH) and good lineality in the range of pH 3-11, and had relatively small average pH drift of about 0.06 pH/day.
광섬유 Fabry-Perot 간섭형 압력센서의 제조 및 동작특성
權大赫 慶一大學校 1999 論文集 Vol.16 No.2
The strain characteristics of a fiber optic Fabry-perot pressure sensor with linearity using a silicon diaphragm is experimentally investigated. A 50 ㎛ thick silicon diaphragm was fabricated by anisotropic etching technology in 44 wt% KOH solution. An interferometric fiber optic pressure sensor has been manufactured by using a fiber optic Fabry-Perot interferometer and a silicon diaphragm. The 2 ㎝ length fiber optic Fabry-Perot interferometers in the continuous length of single mode fiber were produced with two pieces of single mode fiber coated with TiO₂dielectric film utilizing the fusion splicing technique. The one end of the fiber optic Fabry-Perot interferometer was bonded to a silicon diaphragm, and the other end was connected to an optical setup through a 3 dB coupler. For the silicon diaphragm sized 5×5 ㎜², the pressure sensitivity was measured about 0.0066 radian/mmHg and 0.053 radian/mmHg at 15 ㎛ and 50 ㎛thickness diaphragm, respectively.