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      • 실리콘 웨이퍼 공정용 알루미나 정전척의 제작과 특성에 관한 연구

        천희곤,조동율,이영섭,박용균,최성호,정광진,Serguei Spoutai 울산대학교 기계부품 및 소재 특성평가연구센터 1999 연구보고서 Vol.1999 No.-

        정전척의 유전체 물질로 열전도도와 유전특성 그리고 기계적 특성이 우수한 알루미나에 TiO₂첨가하여 유전체의 비저항을 변화시켜서 정전척(electrostatic chuck)에서 발생하는 정전력인 쿨롱힘(coulomb force)과 존슨-라벡힘(Johnsen-Fahbeck firce_의 영향을 규명하려 하였다. 그리고 비저항, 인가전압, 온도, 습도가 정전력에 어떠한 영향을 주는지 고찰하였으며, 인가전압에 따른 응답 특성에 관하여 고찰하였다. Alumina electrostatic chucks for silicon wafer process with wide range of electrical resistivity were fabricated by controlling the amount of TiO₂ addition (0 wt%, 1.3 wt%, 2 wt%, 2.8 wt%). The dependence of electrostatic force on applied voltage, temperature and humidity was investigated. In addition, response characteristics on applied voltage and relationship between electrical resistivity and electrostatic force characteristics such as Coulomb force and Johnsen-Rahbeck force were discussed

      • UV/Cl₂(g)에 의한 Si-wafer 표면금속 오염물의 건식세정에 관한 연구

        손동수,정광진,최성호,천희곤,조동율 울산대학교 1998 공학연구논문집 Vol.29 No.2

        본 연구에서는 실리콘 웨이퍼 표면에 존재하는 미량의 Zn, Fe, Ti 금속 오염물들이 UV-excited chlorine radical을 이용한 건식세정 방법으로 제거되는 반응과정을 연구 하였다. 실리콘 웨이퍼 상에 진공증착법으로 원형패턴이 있는 Zn, Fe, Ti 박막을 증착시켜 상온 및 200℃에서 UV/CI₂세정하였을 때, 염소 래디컬(CI*)이 Fe, Zn, Ti와 반응하여 제거되는 것을 반응 전후 광학현미경과 SEM을 통해 표면 형상 변화를 관찰하였고, in-line으로 연결된 XPS를 통해서 반응 후 웨이퍼 표면에 남아있는 화합물의 화학적 결합상태를 관찰하였으며, UV/CI₂세정 후 실리콘 기판이 손상받는 정도를 알기 위해 AFM으로 표면 거칠기를 측정하였다. 광학현미경과 SEM의 분석에 의하면 Zn와 Fe는 쉽게 제거되는 반면 염화물을 형성하기 보다는 휘발성이 적은 산화물을 형성하는 경향이 강한 Ti은 약간만 제거되는 것을 확인하였다. XPS 분석을 통해서 이들 금속 오염물들이 chlorine radical과 반응하여 웨이퍼 표면에 금속 염화물을 형성하고 있는 것을 확인하였고, UV/CI₂세정처리를 하였을 때 실리콘 웨이퍼의 표면 거칠기가 약간 증가하는 것을 알 수 있었다. 지금까지의 결과를 통해 볼 때, 습식세정과 UV/CI₂건식세정을 병행하면 플라즈마 및 레이저를 사용하는 다른 건식세정 방법에 비하여 보다 저온에서 실리콘 기판의 큰 손상 없이 비교적 용이하게 금속 오염물을 제거할 수 있음을 알수 있었다. The reaction mechanisms of dry cleaning of Zn, Fe and Ti trace contaminants on the Si wafer using UV/CI₂ have been studied by SEM, AFM and XPS analyses. The patterned Zn, Fe and Ti films were deposited on the Si wafer surface by thermal evaporation and changes in the surface morphology after dry cleaning using CI₂and UV/CI₂at 200℃ were studied by optical microscopy and SEM. In addition changes in surface roughness of Si wafer by the cleaning was observed by AFM. The chemical bonding states of the Zn, Fe and Ti deposited silicon surface were observed with in-line XPS analysis. Zn and Fe were easily cleaned in the form of volatile zinc-chloride and iron-chloride as verified by the surface morphology changes. Ti which forms involatile oxides was not easily removed at room temperature but was slightly removed by UV/CI₂at elevated temperature of 200℃. It was also found that the surface roughness of the Si wafer increased after CI₂and UV/CI₂cleaning. Therefore, the metallic contaminants on the Si wafer can be easily removed at lower temperature by continuous processes of wet cleaning followed by UV/CI₂dry cleaning.

      • KCI등재

        Effect of wind time on the dispersal capacity of Trichogramma dendrolimi Matsumura (Hymenoptera Trichogrammatidae)

        Jin-cheng Zhou,Qian-jin Dong,Tong-shu Zhang,Li-jia Duan,Su-fang Ning,Quanquan Liu,Yuan-yuan Li,Chun-xue Li,Hui Dong 한국응용곤충학회 2019 Journal of Asia-Pacific Entomology Vol.22 No.3

        The efficacy of Trichogramma against pests basically depends on the dispersal capacity of the wasps. A releaserecapture method was used in this study to evaluate the effect of relative wind speed (RWS) during the nighttime and the daytime on the dispersal capacity of postrelease population of Trichogramma dendrolimi Matsumura. Two repeated measurements were carried out, using sentinel cards with the host eggs and yellow sticky card traps on the third and the sixth day after wasp release. The results showed that: (1) both the number of recaptured wasps and parasitized eggs increased with the RWS in the daytime during the first three days. The number of parasitized eggs also increased with the RWS in the daytime over the latter three days. The distances that encompassed 98% recaptured T. dendrolimi adults (X 98 ) at the first three days was quadratically increased by the RWS of the daytime. (2) The number of wasps recaptured decreased with the distance from the releasing point during the first three days, but it was not influenced by the distance from the releasing point during the latter three days. (3) The average dispersal radius of the wasps during the first three days was shorter than during the latter three days. The present results will be helpful to improve release techniques based on the wind effects at different times.

      • KCI등재후보

        실리콘 웨이퍼 공정용 알루미나 정전척의 제작과 특성에 관한 연구

        천희곤,조동율,정광진,박용균,이영섭 한국센서학회 1999 센서학회지 Vol.8 No.6

        Alumina electrostatic chucks for silicon wafer process with wide range of electrical resistivity were fabricated by controlling the amount of TiO₂ addition(0, 1.3, 2.0, 2.8 wt%). The dependence of electrostatic force on applied voltage, temperature and humidity was investigated. In addition, response characteristics on applied voltage and relationship between electrical resistivity and electrostatic force characteristics such as Coulomb force and Johnsen-Rahbeck force were discussed.

      • KCI등재

        편파가변 위성 방송 수신용 능동 위상 배열 안테나 개발

        최진영(Jin-Young Choi),이호선(Ho-Seon Lee),공동욱(Tong-Ook Kong),전종훈(Jong-Hoon Chun) 한국전자파학회 2018 한국전자파학회논문지 Vol.29 No.5

        본 논문에서는 이동체의 움직임 및 그에 따른 편파 도래각 변화에 대응 가능한 위성 수신용 능동 위상 배열 안테나를 개발하도록 한다. 이를 위하여 이중편파를 10.7~14.5 GHz의 Ku 대역에서 동시에 구현 가능한 비발디 안테나와 효과적으로 위상 및 이득을 제어할 수 있는 MFC(Multi-Function Core) 칩을 자체 개발하였으며, 이를 이용하여 수신 모듈과 제어모듈로 이루어진 능동 위상 배열 안테나를 제작하였다. 제작 결과, 60° 각도까지의 깨끗한 빔 조향 특성과 높은 격리도의 편파 가변 특성을 확인하였다. We herein present a study on the active phased array antenna for receiving satellite broadcasting that can electrically align its polarization to that of target transmitters in its moving condition or in the Skew angle arrangement of the broadcasting satellite receiver. Hence, we have developed an active phased array structure composed of the self-developed Vivaldi antenna and multifunction core (MFC) chip, receiving RF front end module, and control units. In particular, the new Vivaldi antenna designed in the Ku-band of 10.7–14.5 GHz to receive one desired polarization mode such as the horizontal or vertical by means of an MFC chip and other control units that can control the amplitude and phase of each antenna element. The test results verified that cross-polarization property is 20 dB or higher and the primary beam can be scanned clearly at approximately ±60°.

      • 효율적인 Grid 자원관리를 위한 8 기관 모델

        김동근(Tong-Keun Kim),이춘길(Chun-Gil Lee),박용진(Yong-Jin Park) 한국정보과학회 2003 한국정보과학회 학술발표논문집 Vol.30 No.2Ⅰ

        그리드 자원 관리는 지리적 분산과 이 기종 컴퓨팅 자원의 활용 그리고 인터넷 웹 환경에 주안점을 두고 설계되어야 한다. 이를 위해서 기존 부분기능 위주의 모델을 포괄하면서도 전체적인 상호협력 동작에 기반한 3개 기본요소와 8기관의 그리드 자원 관리 모델을 제시한다. 이를 통해 전체적인 관점에서 그리드 자원관리를 평가할 수 있는 G값을 살펴보고, G값을 기준으로 하여 최적의 그리드 자원관리 방안을 모델링 한다.

      • SCIESCOPUSKCI등재

        Poncirin Inhibits Osteoclast Differentiation and Bone Loss through Down-Regulation of NFATc1 In Vitro and In Vivo

        ( Kwang-hoon Chun ),( Hyun Chul Jin ),( Ki Sung Kang ),( Tong-shin Chang ),( Gwi Seo Hwang ) 한국응용약물학회 2020 Biomolecules & Therapeutics(구 응용약물학회지) Vol.28 No.4

        Activation of osteoclast and inactivation of osteoblast result in loss of bone mass with bone resorption, leading to the pathological progression of osteoporosis. The receptor activator of NF-κB ligand (RANKL) is a member of the TNF superfamily, and is a key mediator of osteoclast differentiation. A flavanone glycoside isolated from the fruit of Poncirus trifoliata, poncirin has anti-allergic, hypocholesterolemic, anti-inflammatory and anti-platelet activities. The present study investigates the effect of poncirin on osteoclast differentiation of RANKL-stimulated RAW264.7 cells. We observed reduced formation of RANKL-stimulated TRAP-positive multinucleated cells (a morphological feature of osteoclasts) after poncirin exposure. Real-time qPCR analysis showed suppression of the RANKL-mediated induction of key osteoclastogenic molecules such as NFATc1, TRAP, c-Fos, MMP9 and cathepsin K after poncirin treatment. Poncirin also inhibited the RANKL-mediated activation of NF-κB and, notably, JNK, without changes in ERK and p38 expression in RAW264.7 cells. Furthermore, we assessed the in vivo efficacy of poncirin in the lipopolysaccharide (LPS)-induced bone erosion model. Evaluating the micro-CT of femurs revealed that bone erosion in poncirin treated mice was markedly attenuated. Our results indicate that poncirin exerts anti-osteoclastic effects in vitro and in vivo by suppressing osteoclast differentiation. We believe that poncirin is a promising candidate for inflammatory bone loss therapeutics.

      • KCI등재

        Comparison of Conventional Ultrasonography and Arthrosonography in the Assessment of Cuff Integrity after Rotator Cuff Repair

        이광원,양대석,Tong Jin Chun,배경환,조원식,박현정 대한정형외과학회 2014 Clinics in Orthopedic Surgery Vol.6 No.3

        Background: This study was designed to perform conventional ultrasonography, magnetic resonance arthrography (MRA) and arthrosonography exams after rotator cuff repair to compare the results of conventional ultrasonography and arthrosonography with those of MRA as the gold standard. Methods: We prospectively studied 42 consecutive patients (14 males, 28 females; average age, 59.4 years) who received arthroscopic rotator cuff repair due to full-thickness tears of the supraspinatus tendon from 2008 to 2010. The integrity assessment of the repaired rotator cuff was performed 6 months postoperatively using conventional ultrasonography, MRA, and arthrosonography. Results: The diagnostic accuracy of the conventional ultrasonography compared to MRA was 78.6% and the McNemar test results were 0.016 in full-thickness tear and 0.077 in partial-thickness tear. The diagnostic accuracy of arthrosonography compared to MRA was 92.9% and the McNemar test results were 0.998 in full-thickness tear and 0.875 in partial-thickness tear. Conclusions: It was found that the integrity assessment of the repaired rotator cuff by ultrasonography must be guarded against and that arthrosonography is an effective alternative method in the postoperative integrity assessment. Also, an arthrosonography seems to be a suitable modality to replace the conventional ultrasonography

      • SCIESCOPUSKCI등재

        Genetic Diversity of Hard Ticks (Acari: Ixodidae) in the South and East Regions of Kazakhstan and Northwestern China

        Yicheng Yang,Jin Tong,Hongyin Ruan,Meihua Yang,Chunli Sang,Gang Liu,Wurelihazi Hazihan,Bin Xu,Sandor Hornok,Kadyken Rizabek,Kulmanova Gulzhan,Zhiqiang Liu,Yuanzhi Wang 대한기생충학열대의학회 2021 The Korean Journal of Parasitology Vol.59 No.1

        To date, there is no report on the genetic diversity of ticks in these regions. A total of 370 representative ticks from the south and east regions of Kazakhstan (SERK) and Xinjiang Uygur Autonomous Region (XUAR) were selected for molecular comparison. A fragment of the mitochondrial cytochrome c oxidase subunit I (cox1) gene, ranging from 631 bp to 889 bp, was used to analyze genetic diversity among these ticks. Phylogenetic analyses indicated 7 tick species including Hyalomma asiaticum, Hyalomma detritum, Hyalomma anatolicum, Dermacentor marginatus, Rhipicephalus sanguineus, Rhipicephalus turanicus and Haemaphysalis erinacei from the SERK clustered together with conspecific ticks from the XUAR. The network diagram of haplotypes showed that i) Hy. asiaticum from Almaty and Kyzylorda Oblasts together with that from Yuli County of XUAR constituted haplogroup H-2, and the lineage from Chimkent City of South Kazakhstan was newly evolved; and ii) the R. turanicus ticks sampled in Israel, Almaty, South Kazakhstan, Usu City, Ulugqat and Baicheng Counties of XUAR were derivated from an old lineage in Alataw City of XUAR. These findings indicate that: i) Hy. asiaticum, R. turanicus and Ha. erinacei shared genetic similarities between the SERK and XUAR; and ii) Hy. marginatum and D. reticulatus show differences in their evolution.

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