http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Shin Hyunsu,Park Seran,Park Heungsoo,Ko Dae-Hong 한국물리학회 2021 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.78 No.4
As the size of a transistor decreases, the parasitic resistances of the transistor become dominant for contact resistance. In-situ phosphorus-doped epitaxial silicon with high doping concentrations has been used to reduce contact resistivity. In this study, we measured the contact resistivity of in-situ phosphorus-doped silicon using a circular transmission line model (CTLM). The distribution of the contact resistivity for films with high phosphorus concentrations was found to be about 400 times larger than that for films with low phosphorus concentrations. To explain the large distribution of the measured contact resistivity, the potential distribution and current flow in phosphorus-doped silicon films with various phosphorus concentrations were simulated using the CTLM and a transmission line model (TLM). In silicon films with high phosphorus doping concentrations, the greater effects of metal resistance and the vertical current reduced the accuracy of the extracted contact resistivity. A multiline transmission line model (ML–TLM) was proposed to improve the accuracy of the extracted contact resistivity at a given phosphorous concentration. The use of the ML–TLM increased the ratio of the contact resistance to the total resistance; thus, the effect of metal resistance was significantly reduced, and the accuracy of contact resistivity was improved.
NF<sub>3</sub> / H<sub>2</sub>O 원거리 플라즈마 건식 세정에 의한 SiGe 표면 특성 변화
박세란,오훈정,김규동,고대홍,Park, Seran,Oh, Hoon-Jung,Kim, Kyu-Dong,Ko, Dae-Hong 한국반도체디스플레이기술학회 2020 반도체디스플레이기술학회지 Vol.19 No.2
We investigated the Si<sub>1-x</sub>Ge<sub>x</sub> surface properties when dry cleaning the films using NF<sub>3</sub> / H<sub>2</sub>O remote plasma. After the dry cleaning process, it was found that about 80-250 nm wide bumps were formed on the SiGe surface regardless of Ge concentration in the rage of x = 0.1 ~ 0.3. In addition, effects of the dry cleaning processing parameters such as pressure, substrate temperature, and H<sub>2</sub>O flow rates were examined. It was found that the surface bump is significantly dependent on the flow rate of H<sub>2</sub>O. Based on these observations, we would like to provide additional guidelines for implementing the dry cleaning process to SiGe materials.
치매노인의 지속적인 치유 및 안전한 케어를 위한 치매안심마을 단지 종합계획안
노연주(Noh, Yeonju),박세란(Park, Seran),이윤희(Lee, Yunhee) 한국주거학회 2019 한국주거학회 학술대회논문집 Vol.31 No.2
Recently, there have been a number of social problems in which an aging society is progressing rapidly. Therefore, the purpose of this study is to create a space that is effective in alleviating dementia symptoms and is free to act and live as residents. We would like to present a plan for the dementia safety village complex for the continuous healing and safe care of the elderly. This dementia village established an independent community and carried out an architectural plan to support and require systematic and effective management programs so that the elderly with dementia could feel the value of their lives. In order to plan a dementia village, the focus should be on the users by studying dementia and analyzing the living space and lifestyle of the elderly with dementia. Ultimately, it will be able to contribute to solving social problems caused by aging.
Yoon Hye Lee,Jiyong Park,Seran Min,Oklim Kang,Hyuktae Kwon,Seung Won Oh 대한가정의학회 2020 Korean Journal of Family Medicine Vol.41 No.4
Background: Although both obesity, measured by body mass index, and visceral obesity are known to be major risk factors of metabolic syndrome and its components, there have been debates on the relative contribution of general obesity and visceral obesity to the development of metabolic syndrome. Methods: We performed a large longitudinal cohort study of 3,093 subjects (age range, 18–65 years) who were metabolically healthy and had a normal weight who received health screenings over a 3-year follow-up period. Cox proportional hazards models were used to estimate the adjusted hazard ratios (HRs) and 95% confidence intervals (CI) for incident metabolic syndrome and its components per sex-specific 1-standard deviation (SD) increase in visceral adipose tissue (VAT) and body mass index. Results: Both obesity and visceral obesity increased the risk of incident metabolic syndrome, but when HR was compared per sex-specific 1-SD, visceral obesity appeared to confer more risk than simple obesity. The HR for 1-SD of body mass index was 1.19 (95% CI, 1.07–1.32; P=0.001) in men and 1.29 (95% CI, 1.10–1.52; P=0.002) in women, while the HR for 1-SD of VAT was 1.29 (95% CI, 1.15–1.44; P<0.001) in men and 1.50 (95% CI, 1.28–1.75; P<0.001) in women. Conclusion: Visceral obesity and obesity were longitudinally associated with an increased risk of incident metabolic syndrome among metabolically healthy adults, and visceral fat accumulation appears to be better predictor of metabolic syndrome.