한국의 4M DRAM 공동연구개발 사례연구(상(上))

주대영,Joo, Dae-Young 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.1

4M D램 공동연구 개발사업(1986.10~89.03)은 당시 미 일의 강력한 기술보호주의를 극복하기 위한 자구책으로 시작되었다. 국내 반도체업계는 선진국의 높은 기술장벽 및 기술보호주의를 극복하고, 강력한 경쟁력확보 및 기술축적을 위해 정부에 건의하였다. 이에 정부는 적극적인 자금지원을 통해 4M D램 개발 및 주변기술 개발을 목표로 초고집적반도체기술공동개발사업을 수행하게 되었다. 본 공동R&D사업은 ETRI의 주관으로 당시 금성반도체, 삼성전자, 현대전자산업 등의 반도체 업체와 학계가 참여하였고, 1986년 10월부터 1989년 3월까지 3단계에 걸쳐 수행되었다. 공동연구의 목적은 설계, 공정, 조립, 검사 등 4M D램 제조와 관련되는 기본기술개발과 함께 $0.8{\mu}m$ 선폭의 4M D램을 개발하는 것이며, 이를 위해 단계별 목표를 설정하고 관민연의 혼연일치로 추진되었다. 1차년에는 중요 핵심기술개발, 2차년에는 $0.8{\mu}m$ 4M D램 Working-die개발, 3차년에는 수율 20%의 $0.8{\mu}m$ 4M D램 양산시 제품을 목표대로 완료하였다. 각 연구단계별로 주요 핵심기술에 대한 연구평가가 실시되었으며, 관련기술에 대한 중복투자 방지를 위해 2차년도부터 분담연구가 수행되었고, 상호 기술공유를 위한 기술교류회가 활발히 이루어졌다. 또한 R&D수행을 통해 4M D램 Working-die를 2차년도 중반에 개발완료하였으며, 3차년도에는 4M D램의 20% 수율확보와 공정기술의 최적화 및 DB 구축을 수행했다. 공동R&D 방식에서도 기업간 경쟁체제 도입에 입각하여 동기유발 형태로 진행되었다. 정부는 자금적 지원으로 기업간의 경쟁 심리를 자극하는 전략을 추진했다. 선두기업인 삼성에게는 선행적 개발 지위에 비례하여 더 많은 지원을 부여하는 대신에, 삼성의 기술성과를 다른 기업에게로 확산시킴으로써 반도체 3사 전체의 기술능력을 향상시키는 전략을 추진했다. 본 사업이 성공적으로 수행되어 반도체 제품의 세계시장 점유율제고, 국제수지 개선, 반도체 핵심기술 조기확보뿐만 아니라 16M D램급 이상 차세대 반도체기술 개발의 교도보가 되었다.

플라즈마 디스플레이의 기술과 현황

강정원,김영섭 한국반도체디스플레이기술학회 2004 반도체디스플레이기술학회지 Vol.3 No.4

21세기에 접어들면서 Digital시험방송의 시작과 다양한 Contents의 유입으로 평판디스플레이 (Flat Panel Display)에 관한 관심과 수요가 증가하고 있다. 이 중 PDP는 90년대 후반부터 양산 및 개발을 시작하여 현재는 40 inch에서 60 inch 화면 크기의 제품을 시장에서 구입할 수 있으며, 03년도에는 80 inch 크기의 Proto-type Model을 공개한 바 있다. PDP는 40 inch 이상의 대면적 구현이 용이하다는 점, CRT와 동등 수준의 화상 구현이 가능하다는 점, 제조공법이 간단하고 제조원가가 저렴하다는 점 등을 특징으로 시장을 확대하고 있으나, 좀 더 대중적인 디스플레이가 되기 위해서는 고휘도 및 고효율화, 화질개선 그리고 저가격화 등과 같은 과제를 해결하여야 한다. 본 논문에서는 PDP의 개발역사 및 시장현황, 구조 및 구동 방법 그리고 해결과제 및 전망에 대해서 포괄적으로 살펴보기로 한다.

농업 로봇 용 수평 자세 모니터링 시스템 개발

김성득,김청월,권익현,이영태 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.2

In this paper, we have development of horizontal attitude monitoring system for agricultural robots. A two-axis gyro sensor and a two-axis accelerometer sensor are used to measure the horizontal attitude angle. The roll angle and pitch angle were measured through the fusion of the gyro sensor signal and the acceleration sensor signal for the horizontal attitude monitoring of the robot. This attitude monitoring system includes GPS and Bluetooth communication module for remote monitoring. The roll angle and pitch angle can be measured by the error of less than 1 degree and the linearity and the reproducibility of the output signal are excellent.

3차원 플래시 메모리의 전하 손실 원인 규명을 위한 Activation Energy 분석

양희훈,성재영,이휘연,정준교,이가원 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.2

The reliability of 3D NAND flash memory cell is affected by the charge migration which can be divided into the vertical migration and the lateral migration. To clarify the difference of two migrations, the activation energy of the charge loss is extracted and compared in a conventional square device pattern and a new test pattern where the perimeter of the gate is exaggerated but the area is same. The charge loss is larger in the suggested test pattern and the activation energy is extracted to be 0.058 eV while the activation energy is 0.28 eV in the square pattern.

MgO-Al₂O₃-SiO₂계 유리의 열물성과 내플라즈마성 연구

윤지섭,최재호,정윤성,민경원,임원빈,김형준,Yoon, Ji Sob,Choi, Jae Ho,Jung, YoonSung,Min, Kyung Won,Im, Won Bin,Kim, Hyeong-Jun 한국반도체디스플레이기술학회 2021 반도체디스플레이기술학회지 Vol.20 No.2

In this study, we studied the alternative of plasma resistant ceramic parts that constitute plasma chambers in the semiconductor dry etching process. MgO-Al₂O₃-SiO₂(MAS) glass was made of 13 types of glass using the Design Of Experiments(DOE) and the effect on thermal properties such as glass transition temperature and crystallization temperature depending on the content of each composition and etching resistance to CF₄/O₂/Ar plasma gas. MAS glass showed excellent plasma resistance and surface roughness up to 20 times higher than quartz glass. As the content of Al₂O₃ and MgO increases, the plasma resistance is improved, and it has been confirmed that it has an inverse relationship with SiO₂.

Study on Mechanical Properties Modification of Styrene butadiene rubber composites filling with Graphene and Molybdenum Disulfide

리시앙수,손미현,김유수,정예린,조을룡 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.3

Styrene-butadiene rubber (SBR) composites, incorporated with graphene, molybdenum disulfide and their hybrid in different filling ratio, were fabricated by a two roll-mill. The dispersion states of all the samples’ matrix were employed by carbon black dispersion tester. The curing properties of the pre-vulcanized rubber composites were investigated, after molding by heating press machine, the tensile strength, storage modulus, friction coefficient, the swelling property had also been tested according to ASTM. The composite G1M10 (filling with 1 phr graphene and 10 phr molybdenum) showed the best mechanical properties and viscoelastic properties in this research with a better filler dispersion state and more compact matrix structure.

태양광발전시설 무인 유지보수 로봇 개발

이현규,이상순 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.3

This paper describes the results of a study on the unmanned maintenance robot that simultaneously performs the cleaning and inspection of the photovoltaic panels. The robot has a special adsorptive device, an infrared sensor, a vacuum level sensor and a camera. The robot uses two SSC (Sliding Suction Cup) adsorptive devices to move up and down the slope. First, the forces generated when the robot moves up the slope are mechanically analyzed, and the required design and control of the adsorption system are suggested. The robot was designed and manufactured to operate stably by using the presented results. Next, the normal force between the panel and the wheel was measured to confirm that the robot was manufactured and operated as intended, and the robot motion was tested on the inclined panel. It has been proven that robots are well designed and built to clean and inspect sloped panels.

Needle 코팅을 이용한 미세 PEDOT:PSS 스트라이프 제작

이진영,박종운 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.3

We have investigated the feasibility of fabricating fine stripes using needle coating for potential applications in solution-processed organic light-emitting diodes (OLEDs). To this end, we have employed an aqueous poly(3,4-ethylenedioxythiophene):poly(4-styrenesulfonate) (PEDOT:PSS) solution that has been widely used as a hole injection layer (HIL) of OLEDs and performed needle coatings by varying the process parameters such as the coating gap and coating speed. As expected, the stripe width is reduced with increasing coating speed. However, the central thickness of the stripe is rather increased as the coating speed increases, which is different from other coating processes such as slot-die and blade coatings. It is due to the fact that the meniscus formed between the needle tip and the substrate varies depending sensitively on the coating speed. It is also found that the stripe width and thickness are reduced with increasing coating gap. To demonstrate its applicability to OLEDs, we have fabricated a red OLED stripe and obtained light emission with the width of about 90 µm.

AISI 4340강의 방전가공에서 공정변수의 최적화

최만성 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.2

The method of electrical discharge machining (EDM), one of the processing methods based on non-traditional manufacturing procedures, is gaining increased popularity, since it does not require cutting tools and allows machining involving hard, brittle, thin and complex geometry. This present investigation details the determination of optimum process parameter to attain the better machining performance in EDM of AISI 4340 steel with graphite as a tool electrode. The experimental combinations are planned and analyzed by Taguchi’s design of experiments approach. To predict the optimal condition, the experiments are conducted by using Taguchi’s L27 orthogonal array. The influence of process variables such as discharge current, pulse on and pulse off time, voltage and spark speed were investigated to control the various desired performance measures such as surface roughness. Analysis of Variance (ANOVA) has to be performed to know the magnitude of each factor. Investigations indicate that the surface roughness is strongly depend on pulsed current.

ZTO 박막의 부성저항에 의한 전류전압특성

오데레사 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.2

The ZTO/p-Si thin film was produced and investigated for tunneling phenomena caused by the interface characteristics of the depletion layer. ZTO thin film was deposited and heat treated to produce barrier potentials by the depletion layer. The negative resistance characteristics were shown in the thin film of ZTO heat treated at 100°C, and the insulation properties were the best. Current decreased in the negative voltage direction by nonlinear show key characteristics, and current decreased in tunneling phenomenon by negative resistance in the positive voltage direction. Heat treated at 100°C, the ZTO thin film has increased barrier potential in the areas of the depletion layer and therefore the current has increased rapidly. The current has decreased again as we go beyond the depletion layer. Therefore, tunneling can be seen to make insulation better. In the ZTO thin film heat treated at 70°C without tunneling, leakage current occurred as current increased at positive voltage. Therefore, tunneling effects by negative resistance were found to enhance insulation properties electrically.