한국의 4M DRAM 공동연구개발 사례연구(상(上))

주대영,Joo, Dae-Young 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.1

4M D램 공동연구 개발사업(1986.10~89.03)은 당시 미 일의 강력한 기술보호주의를 극복하기 위한 자구책으로 시작되었다. 국내 반도체업계는 선진국의 높은 기술장벽 및 기술보호주의를 극복하고, 강력한 경쟁력확보 및 기술축적을 위해 정부에 건의하였다. 이에 정부는 적극적인 자금지원을 통해 4M D램 개발 및 주변기술 개발을 목표로 초고집적반도체기술공동개발사업을 수행하게 되었다. 본 공동R&D사업은 ETRI의 주관으로 당시 금성반도체, 삼성전자, 현대전자산업 등의 반도체 업체와 학계가 참여하였고, 1986년 10월부터 1989년 3월까지 3단계에 걸쳐 수행되었다. 공동연구의 목적은 설계, 공정, 조립, 검사 등 4M D램 제조와 관련되는 기본기술개발과 함께 $0.8{\mu}m$ 선폭의 4M D램을 개발하는 것이며, 이를 위해 단계별 목표를 설정하고 관민연의 혼연일치로 추진되었다. 1차년에는 중요 핵심기술개발, 2차년에는 $0.8{\mu}m$ 4M D램 Working-die개발, 3차년에는 수율 20%의 $0.8{\mu}m$ 4M D램 양산시 제품을 목표대로 완료하였다. 각 연구단계별로 주요 핵심기술에 대한 연구평가가 실시되었으며, 관련기술에 대한 중복투자 방지를 위해 2차년도부터 분담연구가 수행되었고, 상호 기술공유를 위한 기술교류회가 활발히 이루어졌다. 또한 R&D수행을 통해 4M D램 Working-die를 2차년도 중반에 개발완료하였으며, 3차년도에는 4M D램의 20% 수율확보와 공정기술의 최적화 및 DB 구축을 수행했다. 공동R&D 방식에서도 기업간 경쟁체제 도입에 입각하여 동기유발 형태로 진행되었다. 정부는 자금적 지원으로 기업간의 경쟁 심리를 자극하는 전략을 추진했다. 선두기업인 삼성에게는 선행적 개발 지위에 비례하여 더 많은 지원을 부여하는 대신에, 삼성의 기술성과를 다른 기업에게로 확산시킴으로써 반도체 3사 전체의 기술능력을 향상시키는 전략을 추진했다. 본 사업이 성공적으로 수행되어 반도체 제품의 세계시장 점유율제고, 국제수지 개선, 반도체 핵심기술 조기확보뿐만 아니라 16M D램급 이상 차세대 반도체기술 개발의 교도보가 되었다.

플라즈마 디스플레이의 기술과 현황

강정원,김영섭 한국반도체디스플레이기술학회 2004 반도체디스플레이기술학회지 Vol.3 No.4

21세기에 접어들면서 Digital시험방송의 시작과 다양한 Contents의 유입으로 평판디스플레이 (Flat Panel Display)에 관한 관심과 수요가 증가하고 있다. 이 중 PDP는 90년대 후반부터 양산 및 개발을 시작하여 현재는 40 inch에서 60 inch 화면 크기의 제품을 시장에서 구입할 수 있으며, 03년도에는 80 inch 크기의 Proto-type Model을 공개한 바 있다. PDP는 40 inch 이상의 대면적 구현이 용이하다는 점, CRT와 동등 수준의 화상 구현이 가능하다는 점, 제조공법이 간단하고 제조원가가 저렴하다는 점 등을 특징으로 시장을 확대하고 있으나, 좀 더 대중적인 디스플레이가 되기 위해서는 고휘도 및 고효율화, 화질개선 그리고 저가격화 등과 같은 과제를 해결하여야 한다. 본 논문에서는 PDP의 개발역사 및 시장현황, 구조 및 구동 방법 그리고 해결과제 및 전망에 대해서 포괄적으로 살펴보기로 한다.

CAN 프로토콜을 이용한 다중 플랜트의 제어

최군호,Choi, Goon-Ho 한국반도체디스플레이기술학회 2009 반도체디스플레이기술학회지 Vol.8 No.2

This paper presents an idea of implementation of many semiconductor equipments. The idea is a new design methodology of the Networked Control Systems (NCSs) using CAN (Controller Area Network) will be discussed. The Distributed Control Systems (DCSs) is very useful to control multiple systems that have a distance to communicate. The CAN protocol is very strong to noise, also provides the user with many powerful functionality. Only one communication line (BUS) is used, so that a control and a maintenance of those systems are very easy. This paper is concerned with the speed control of multiple DC motors using CAN Protocol. Experimental systems are made to validate effectiveness of the systems. The results of the experiment show that the NCSs using CAN has excellency in real time control.

소수성 마이크로 패턴을 갖는 Stripe 코팅용 슬롯 다이 헤드 구조 최적화

유수호,이진영,박종운 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.2

In the presence of μ-tip for narrow stripe coating, there appears lateral capillary flow along the hydrophilic head lip because the μ-tip has some resistance to flow. It was known to be suppressed by increasing the contact angle of the head lip. In this paper, we have demonstrated by computational fluid dynamics(CFD) simulations that it can also be suppressed by the formation of micro-patterns on the shim and meniscus guide embedded into the slot-die head. To optimize the micro-patterned structure, we have performed simulations by varying the groove width, depth, and clearance. In the absence of micro-patterns, it is shown by experiment and simulation that the solution spreads to a distance of 1,300 μm from the μ-tip. In the presence of micro-patterns with the groove width and clearance of 50 μm, the distance the solution spreads is reduced to 260 μm. However, no further suppression in the capillary flow is observed with micro-patterns with the groove width of 40 μm or less. It is also observed that the capillary flow is not affected by the groove depth if it is larger than 10 μm. We have shown that the distance the solution spreads can be reduced further to 204 μm by coating a hydrophobic material (contact angle of 104º) on the surface of micro-patterns having the groove width and clearance of 50 μm.

Deformable Registration for MRI Medical Image

Li Binglu,김영섭,이용환 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.2

Due to the development of medical imaging technology, different imaging technologies provide a large amount of effective information. However, different imaging method caused the limitations of information integrity by using single type of image. Combining different image together so that doctor can obtain the information from medical image comprehensively. Image registration algorithm based on mutual information has become one of the hotspots in the field of image registration with its high registration accuracy and wide applicability. Because the information theory-based registration technology is not dependent on the gray value difference of the image, and it is very suitable for multimodal medical image registration. However, the method based on mutual information has a robustness problem. The essential reason is that the mutual information itself is not have enough information between the pixel pairs, so that the mutual information is unstable during the registration process. A large number of local extreme values are generated, which finally cause mismatch. In order to overcome the shortages of mutual information registration method, this paper proposes a registration method combined with image spatial structure information and mutual information.

HSI 색상 모델에서 색상 분할을 이용한 저항 색상 밴드 인식

정민철 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.2

This paper proposes a new method for the recognition of resistor color band using a color segmentation in a HSI color model. The proposed method firstly segments a resistor in a chromatic color as a ROI from a background. Secondly, the color bands of the resistor are segmented by vertical projection profile using both the intensity and the saturation differentiation and finally, it recognizes the colors of the segmented color bands using hue, saturation and intensity values. The final results are the value of the resistor and the names of the recognized color. The proposed method is implemented using C language in Raspberry Pi system with a camera module for a real-time image processing. Experiments were conducted by using various resistor images. The results show that the proposed method is successful for the recognition of resistor color band.

공정 조건에 따른 비정질 탄소막 표면 물성분석

김광표,최정은,홍상진 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.2

Amorphous carbon layer (ACL) is actively used as an etch mask. Recent advances in patterning ACL requires the next level of durability of hard mask in high aspect ratio etch in near future semiconductor manufacturing, and it is worthwhile to know the surface property of ACL thin film to enhance the property of etch hard mask. In this research, ACL are deposited by 6 inch plasma enhanced chemical vapor deposition system with C3H6 and N2 gas mixture. Surface properties of deposited ACL are investigated depending on gas flow, pressure, RF power. Fourier transform infrared is used for the analysis of surface chemistry, and X-ray photoemission spectra is used for the structural analysis with the consideration of the contents of sp2 and sp3 through fitting of C1s. Also mechanical properties of deposited ACL are measured in order to evaluate hardness.

대면적 스퍼터링 박막 제작을 위한 캐소드 설계 및 제작

김유진,김상모,김경환 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.2

In this study, we prepared sputtering cathode for large sputtering thin film in the facing targets sputtering(FTS) system. Before fabrication of cathode equipment, we investigated optimal magnetic flux in the sputtering cathode by using magnetic field stimulation(Comsol). According to the result of magnetic field stimulation, we manufactured the cathode. After we mounted laboratory-designed cathode on FTS system, the discharge properties were observed in vacuum condition. In addition, ITO films were deposited on glass substrate and their electrical and optical properties were investigated by various measurements (four-point probe, UV-VIS spectrometer, field emission scanning electron microscopy(FE-SEM), Hall-effect measurement).

머신러닝을 이용한 세금 계정과목 분류

최동빈,조인수,박용범 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.2

Data mining techniques can also be used to increase the efficiency of production in the tax sector, which requires professional skills. As tax-related computerization was carried out, large amounts of data were accumulated, creating a good environment for data mining. In this paper, we have developed a system that can help tax accountant who have existing professional abilities by using data mining techniques on accumulated tax related data. The data mining technique used is random forest and improved by using f1-score. Using the implemented system, data accumulated over two years was learned, showing high accuracy at prediction.

단선억제 및 가공정도 향상을 위한 Draw Tower의 구조 안정화 설계

남규동,노승훈,윤현진,김영조,길사근,이대웅 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.2

Wire breakage in drawing, which is the most critical process in glass fiber manufacturing, is caused by numerous factors such as height, drawing speed, and air flow. The vibrations of the draw tower, however, is the most dominant factor to create the wire breakage. In this study, the structure of a draw tower has been analyzed through experiments and computer simulations to figure out the main reasons of the vibrations. And the design alterations were applied to the machine to identify the effects of those alterations. The result shows that design alterations of the draw tower structure can suppress the 87% of the vibrations, and further can prevent the wire breakage.