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대기압 플라즈마를 이용한 결정질 태양전지 표면 식각 공정
황상혁,권희태,김우재,최진우,신기원,양창실,권기청,Hwang, Sang Hyuk,Kwon, Hee Tae,Kim, Woo Jae,Choi, Jin Woo,Shin, Gi-Won,Yang, Chang-Sil,Kwon, Gi-Chung 한국재료학회 2017 한국재료학회지 Vol.27 No.4
Reactive Ion Etching (RIE) and wet etching are employed in existing texturing processes to fabricate solar cells. Laser etching is used for particular purposes such as selective etching for grooves. However, such processes require a higher level of cost and longer processing time and those factors affect the unit cost of each process of fabricating solar cells. As a way to reduce the unit cost of this process of making solar cells, an atmospheric plasma source will be employed in this study for the texturing of crystalline silicon wafers. In this study, we produced the atmospheric plasma source and examined its basic properties. Then, using the prepared atmospheric plasma source, we performed the texturing process of crystalline silicon wafers. The results obtained from texturing processes employing the atmospheric plasma source and employing RIE were examined and compared with each other. The average reflectance of the specimens obtained from the atmospheric plasma texturing process was 7.88 %, while that of specimens obtained from the texturing process employing RIE was 8.04 %. Surface morphologies of textured wafers were examined and measured through Scanning Electron Microscopy (SEM) and similar shapes of reactive ion etched wafers were found. The Power Conversion Efficiencies (PCE) of the solar cells manufactured through each process were 16.97 % (atmospheric plasma texturing) and 16.29 % (RIE texturing).
운전자의 불안전한 행위와 성격유형과의 상호관계에 관한 연구
박경수,황상혁,이재인,Park, Kyung-Soo,Hwang, Sang-Hyuck,Lee, Jane 대한인간공학회 2006 大韓人間工學會誌 Vol.25 No.4
The goal of this study is to find out correlation between Driver's Unsafe acts(errors and violations) and Personality types. The experiment was performed on 180 subjects, men and women between 20's and 60's having experience in driving for 6 months at least. Personality types of the subjects were classified by MBTI(Myers-Briggs Type Indicator) GS type and Driver's unsafe acts were measured by KDBQ(Korean Driver Behavior Questionnaire) based on Reason's DBQ(Driver Behavior Questionnaire). The result of experiment showed several facts about the relation. The first is that the drivers of P (Perceiving) type commit more violations and slips than drivers of J(Judging) type. The second is that in the comparison among attitude indexes(EP, EJ, IP, IJ) the drivers of EP(Extroversions - Perceiving) commit more violations than other type drivers. Finally, only men of P(Perceiving) type commits more violations than men of J(Judging). Based on these facts, it is possible to use Personality types as a device to prevent unsafe acts in various fields for driver selection and accident prevention training classified by Personality types etc.
펄스변조의 듀티비 변경에 따른 DBD 대기압 플라즈마 특성 연구
박종인,황상혁,조태훈,윤명수,곽형신,진기남,전부일,최은하,권기청,Park, Jong-in,Hwang, Sang-hyuk,Jo, Tae Hoon,Yun, Myoung Soo,Kwak, Hyoung sin,Jin, Gi nam,Jeon, Buil,Choi, Eun Ha,Kwon, Gi-Chung 한국재료학회 2015 한국재료학회지 Vol.25 No.11
Atmospheric pressure plasma is used in the biological and medical fields. Miniaturization and safety are important in the application of apply atmospheric plasma to bio devices. In this study, we made a small, pocket-sized inverter for the discharge of atmospheric plasma. We used pulse power to control the neutral gas temperature at which the, when plasma was discharged. We used direct current of 5 V of bias(voltage). The output voltage is about 1 to 2 kilo volts the frequency is about 80 kilo hertz. We analyzsed the characteristics of the atmospheric plasma using OES(Optical emission spectroscopy) and the Current-Voltage characteristic of pulse power. By calculating of the current voltage characteristics, we were able to determine that, when the duty ratio increased, the power that actually effects the plasma discharge also increased. To apply atmospheric plasma to human organisms, the temperature is the most important factor, we were able to control the temperature by modulating the pulse power duty ratio. This means we can use atmospheric plasma on the human body or in other areas of the medical field.
IGZO 박막 증착 공정에서 플라즈마 방출광 모니터링 및 플라즈마 균일도 제어
최진우,황상혁,김우재,신기원,권희태,조태훈,우원균,차성덕,안병철,박완우,도재철,권기청 한국반도체디스플레이기술학회 2016 반도체디스플레이기술학회지 Vol.15 No.4
In recent years, various researches have been conducted to improve process yields in accordance with miniaturization of semiconductor. APC(Advanced Process Control) is considered one of the methods to increase in process yields. APC is a process control technology that maintains optimal process conditions and improves the reliability of results by controlling and formulating the relationship among the various process parameters and results. We built up an optical diagnostic system with a three-channel spectrometer. The system detects signals those represent the changes of specific emission peaks intensity versus each reference and converts it into MFC control signals to get back the changes to the reference state. Controlling the MFC continues until the specific peak intensity changes into the normal state. Through this device, we tested a APC automatically responding to process changes during the plasma process. We could control gas flow while sputtering process on going and improve uniformity of plasma intensity with this system. Finally, we have got results those enhance the plasma intensity non-uniformity to 7.7% from 15.5%. Also, found unexpected oxygen flow what is estimated to be come out from IGZO target.