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최규태 ( Choi Kyu-tae ),안진희 ( Ahn Jin-hee ),박현민 ( Park Hyun-min ),김상효 ( Kim Sang-hyo ) 한국구조물진단유지관리공학회 2009 한국구조물진단유지관리공학회 학술발표대회 논문집 Vol.13 No.1
The use of corrugated steel plates is increasing due to advantages as the bucking strength and accordion effects. However, this advantages can decrease the stiffness of structural system and economical efficiency for manufacturing the corrugated panel. Therefore, partially corrugated steel web is proposed to overcome this problem In the study, FEM analysis are carried out to evaluate the elastic shear bucking strength of partially corrugated steel web.
냉각식 액체질량유량계측기에 관한 실험적 연구 및 수치해석의 정확도 검증
최규태(Kyu Tae Choi),전석환(Suk-Hwan Jun),김택영(Taig Young Kim) 대한기계학회 2023 大韓機械學會論文集B Vol.47 No.6
고집적도 차세대-반도체 생산설비의 핵심부품인 냉각식 액체질량유량계측기(cooling type liquid mass flow meter)의 시작품을 제작하여 실험을 수행하였으며, 수치해석과 비교를 통하여 이론의 정확도를 분석하였다. 정밀저울로 계측한 누적 액체질량의 시간에 따른 변화로부터 일관되고 신뢰성이 높은 액체질량유량을 산출하였으며, 센서관을 통한 압력손실의 선형적 변화에 근거하여 이론모델에 도입한 관 유동포물선 속도분포의 타당성을 확인하였다. 수치해석 결과는 실험계측치와 전반적으로 잘 일치하였으나 TEC 냉각부에서는 오차가 상대적으로 크고, 이는 질량유량계측의 기본이 되는 온도차비의 수치해석적예측에 증폭된 오차로 나타난다. 이러한 오차에도 불구하고, 질량유량에 따라 변하는 온도차비의 변화경향은 실험과 동일하므로, 설계변수에 대한 최적화와 다양한 유체에 대한 변환인자 도출에 수치해석을 효과적으로 적용할 수 있다. A prototype of the cooling type liquid mass flow meter (CLMFM), which is a key component in high-density next-generation semiconductor production facilities, was fabricated and tested, and the accuracy of the mathematical theory was verified using numerical analysis. A consistent and highly reliable mass flow rate was obtained using a precision balance based on the slop of the cumulative liquid mass with time. Additionally, the appropriateness of the parabolic velocity profile for sensor tube flow in the theoretical model was verified based on the linearity of the pressure drop with the mass flow rate. Consequently, the numerical results generally match well with the experimental measurements except in the TEC cooling zone where a relatively large error is obtained. This error amplifies that of the temperature difference ratio, which is the basis of the measurement data for the liquid mass flow rate. Despite this defect, the propensity of the varying temperature difference ratio with the mass flow rate is the same as that from the experiment; therefore, numerical analysis can be effectively applied to optimize the design variables and derive conversion factors for various fluids.
최규태 ( Choi Kyu-tae ),정상욱 ( Jung Sang-wook ),안진희 ( Ahn Jin-hee ),김상효 ( Kim Sang-hyo ) 한국구조물진단유지관리공학회 2008 한국구조물진단유지관리공학회 학술발표대회 논문집 Vol.12 No.2
Recently, the application of corrugated plates is increasing due to structural advantages as the bucking strength and accordion effects. However, this structural advantages can decrease the stiffness of structural system and economical efficiency for manufacturing the corrugated panel. Therefore, in the study, the numerical analysisses are carried out to evaluate the bucking strength and prestressing effect of partially corrugated steel web.
최규태(Kyu Tae Choi),류연동(Yeon Dong Ryu),전석환(Suk-Hwan Jun),김유환(Yu-Hwan Kim),한진호(Jin Ho Han),김택영(Taig Young Kim) 대한기계학회 2022 大韓機械學會論文集B Vol.46 No.3
일정한 벽 온도 조건하의 관 유동 대류열전달에 대한 단순이론으로부터 TEC를 사용한 냉각식 액체질량유량 계측이론을 추론하여 제시하였으며, 수치해석을 통하여 상 · 하류 온도 계측위치 간 거리, 관외경, TEC와 관 외피 사이 접촉열저항, 주위온도 등 설계인자의 영향을 평가하고, 지수함수 형태의 수학모델을 정립하였다. 수학모델에 근거하여 최소 및 최대 유량계측 분해능에 한계가 존재함을 확인하였으며, 이러한 한계 영역을 확장하기 위한 설계지침을 제시하였다. 최소 질량유량과 최대 질량유량 계측범위 확장을 위한 설계는 서로 상반되는 경향을 갖는다. 수학모델에 직접 나타나지 않았으나, 주위온도는 입 · 출구 온도차 비의 선형적 변화를 유도하며, 계측 정확도를 위하여 이에 대한 보정이 수행되어야 한다. 본 연구의 이론은 반도체 생산공정의 액상전구체 정밀공급제어기 최적설계에 적용될 수 있다. The theory on the cooling type liquid mass flow meter using a thermoelectric cooler (TEC) was deduced from the simple theory of tube flow convective heat transfer under a constant wall temperature condition. The effects of design parameters such as the distance between up and downstream thermistors, tube outer diameter, contact thermal resistance between the TEC and the tube outer surface, and surrounding temperature were evaluated via numerical calculations, and consequently, a mathematical model in the form of an exponential function was established. Based on this model, a limit in the resolution of the minimum and maximum flow rate measurements was confirmed, and design guidelines for extending these limits were presented. Designs to widen the range of mass flow rates in maximum and minimum tend to be opposite to each other. The theory of this study is important in the optimal design of the liquid precursor supplying system in the semiconductor production process.
최규태(Choi, Kyu-Tae),안진희(Ahn, Jin-Hee),박현민(Park, Hyun-Min),김상효(Kim, Sang-Hyo) 한국구조물진단유지관리학회 2009 한국구조물진단학회 학술발표회논문집 Vol.2009 No.1
The use of corrugated steel plates is increasing due to advantages as the bucking strength and accordion effects. However, this advantages can decrease the stiffness of structural system and economical efficiency for manufacturing the corrugated panel. Therefore, partially corrugated steel web is proposed to overcome this problem. In the study, FEM analysis are carried out to evaluate the elastic shear bucking strength of partially corrugated steel web .