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조우성,이미경,곽철,박인수,황영기 한국공업화학회 2000 한국공업화학회 연구논문 초록집 Vol.2000 No.0
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이산화질소 감지용 다중벽 탄소나노튜브 가스센서의 제작 및 감응 특성
조우성,문승일,김영조,이윤희,주병권 한국전기전자재료학회 2004 전기전자재료학회논문지 Vol.17 No.3
Carbon nanotubes(CNTs) were synthesized by thermal chemical vapor deposition(CVD) method. To fabricate CNT gas sensor, catalyst metal layer was deposited on microstructure. The CNT gas detecting layer was grown by thermal CVD method on the catalyst metal layer. In order to investigate the gas sensing characteristics of the fabricated CNT gas sensor, it was exposed in NO$_2$ gas and sensitivity, response, and recovery time were measured. As the result, this sensor has better reproductibility and faster recovery time than another CNT gas sensors.