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In-Situ Monitoring of Multiple Oxide/Nitride Dielectric Stack PECVD Deposition Process
장동범,홍상진 한국전기전자재료학회 2018 Transactions on Electrical and Electronic Material Vol.19 No.1
An in situ monitoring the plasma-enhanced chemical vapor deposition (PECVD) of dielectric materials is proposed in thispaper. The in situ monitoring of plasma process has become a crucial tool for reducing wafer scrap due to processing, andthe use of non-invasive monitoring methods is a key requirement in the semiconductor industry. In addition to optical emissionspectroscopy, we propose an electrical measurement technique using newly designed RF signal monitoring sensors thatacquire the magnitude and phase of current and voltage from both RF generators and PECVD susceptor. As a test vehicle,the use of multiple oxide/nitride layer deposition process during 3D-NAND fl ash device fabrication was adopted as a testapproach. We assume that the chamber impedance changes during deposition cycles owing to the thickness of fi lms depositedon the wafer and chamber wall, and that it can be observed from a diff erence in the RF magnitude or phase of the generatorand susceptor antennas. Our preliminary fi nding shows that the voltage phase is correlated over repeated deposition cycles,and is related to the condition of the chamber and the deposited fi lm thickness. The voltage is loosely correlated with themeasured RF voltage factor during repeated deposition cycles, showing that our hypothesis that the chamber impedancechanges during deposition is valid. This fi nding enables subsequent investigation of the impact of the thickness of depositedfi lms in cyclic PECVD processes during three-dimensional NAND memory fabrication.
환경유래 젖소유방염 저감을 위한 우분뇨 탈수 시스템의 탈수 및 유방염 원인체 제균 효과 규명
김동혁,임정주,이진주,김대근,장홍희,이승주,이윤범,장동일,이후장,민원기,김상훈,오권영,김석,Kim, Dong Hyeok,Lim, Jung Ju,Lee, Jin Ju,Kim, Dae Geun,Chang, Hong Hee,Lee, Seung Joo,Lee, Yun Beom,Chang, Dong Il,Lee, Hu Jang,Min, Won-Gi,Kim, Sang 대한수의학회 2009 大韓獸醫學會誌 Vol.49 No.3
Bovine mastitis is an important disease causing serious economic loss in dairy production and food poison in public health. Escherichia coli and Staphylococcus aureus are the major causative agents of bovine mastitis. These bacteria were found in milk and environmental condition such as feces, water, soil and so on. Bovine mastitis causative micro-organisms can survive in 1-2 weeks in feces and bed complexes. Low level of percentage of water content (PWC) of feces and bed complexes can reduce the spreading of bovine mastitis incidence from environmental contamination. In this study, we developed the fecal dehydrating system and determined the elimination rates of bovine mastitis causative agent from feces and bed complexes. To develop the fecal dehydrating system, the screw pressurized dehydrating system was used and the maximum rate of dehydrating was reached to 52% PWC using 90% PWC (wet base) of fecal and bed complexes. The elimination rates of the dehydrating system for E. coli and S. aureus were reached at 41.19 $\pm$ 7.84% to 62.55 $\pm$ 8.71% in various percentages of PWC of feces and bed complexes (80, 85 and 90%). These results suggested that the application of fecal dehydrating system would reduce the exposure of dairy cattle to bovine mastitis causing agents contaminated feces and bed complexes, and can be used for environmental bovine mastitis control avoiding misuse or abuse of chemical disinfectants and antibiotics in dairy farm.