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전자빔 열 표면처리에 따른 TIO 박막의 투명전극 특성 개선 효과
이연학 ( Yeon-hak Lee ),박민성 ( Min-sung Park ),김대일 ( Daeil Kim ) 한국열처리공학회 2023 熱處理工學會誌 Vol.36 No.4
Transparent and conducting titanium (Ti) doped indium oxide (TIO) thin films were deposited on the poly-imide (PI) substrate with radio frequency magnetron sputtering and then electron irradiation was conducted on the TIO film’s surface to investigate the effect electron irradiation on the crystallization and opto-electrical properties of the films. All x-ray diffraction (XRD) pattern showed two diffraction peaks of the In<sub>2</sub>O<sub>3</sub> (431) and (444) planes with regardless of the electron beam irradiation energy. In the AFM analysis, the surface roughness of as deposited films was 3.29 nm, while the films electron irradiated at 700 eV, show a lower RMS roughness of 2.62 nm. In this study, the FOM of as deposited TIO films is 6.82 × 10<sup>-3</sup> Ω<sup>-1</sup>, while the films electron irradiated at 500 eV show the higher FOM value of 1.0 × 10<sup>-2</sup> Ω<sup>-1</sup>. Thus, it is concluded that the post-deposition electron beam irradiation at 500 eV is the one of effective methods of crystallization and enhancement of opto-electrical performance of TIO thin film deposited on the PI substrate. (Received May 8, 2023; Revised May 22, 2023; Accepted May 29, 2023)
김성수 ( Sung-soo Kim ),이연학 ( Yeon-hak Lee ),김정민 ( Jeong-min Kim ),노응기 ( Woong-kee Loh ) 한국정보처리학회 2015 한국정보처리학회 학술대회논문집 Vol.22 No.1
IoT (Internet of Things)가 차세대 기술로 각광을 받으면서 많은 IT 전문인들이 대표주자인 웨어러블 디바이스(wearable device)의 활용도에 많은 관심을 기울이고 있다. 하지만 현재까지 헬스케어 (healthcare)와 피트니스(fitness) 서비스 중심으로 구성되는 등 다양성을 갖지 못하고 있다. 본 논문에 서는 스마트 워치를 이용하여 장보기에 다양한 편리성을 제공하는 라이프스타일 관련 웨어러블 어플리케이션을 제안한다. 바코드 스캐닝 기능을 통하여 구매한 제품에 대한 정보를 자동으로 검출하여 가계부를 작성한다. 또한 고객에게 현재까지의 구매 내역에 기반하여 최적의 추천상품 목록을 구성하는 서비스도 제공한다.
Ag 중간층이 SnO₂ 박막의 광학적, 전기적 특성에 미치는 영향
장진규(Jin-Kyu Jang),김현진(Hyun-Jin Kim),최재욱(Jae-Wook Choi),이연학(Yeon-Hak Lee),허성보(Sung-Bo Heo),김유성(Yu-Sung Kim),공영민(Young-Min Kong),김대일(Daeil Kim) 한국표면공학회 2021 한국표면공학회지 Vol.54 No.3
SnO₂ single layer and SnO₂/Ag/SnO₂ (SAS) tri-layered films were deposited on the glass substrate by RF and DC magnetron sputtering at room temperature and then the effect of Ag interlayer on the opto-electrical performance of the films were considered. As deposited SnO₂ films show a visible transmittance of 85.5 % and a sheet resistance of 1.2⨉10⁴ Ω/□, the SAS films with a 15 nm thick Ag interlayer show a lower resistance of 18.8 Ω/□ and a visible transmittance of 70.6 %, respectively. The figure of merit based on the optical transmittance and sheet resistance revealed that the Ag interlayer in the SnO₂ films enhances the opto-electrical performance without substrate heating or annealing process.
전자빔 표면 조사에 따른 SnO₂/Ag/SnO₂ 박막의 특성 연구
장진규(Jin-Kyu Jang),김현진(Hyun-Jin Kim),최재욱(Jae-Wook Choi),이연학(Yeon-Hak Lee),공영민(Young-Min Kong),허성보(Sung-Bo Heo),김유성(Yu-Sung Kim),김대일(Daeil Kim) 한국표면공학회 2021 한국표면공학회지 Vol.54 No.6
SnO₂ 30/Ag 15/SnO₂ 30 ㎚(SAS) tri-layer films were deposited on the glass substrates with RF and DC magnetron sputtering and then electron beam is irradiated on the surface to investigate the effect of electron bombardment on the opto-electrical performance of the films. electron beam irradiated tri-layer films at 1000 eV show a higher figure of merit of 2.72×10<SUP>-3</SUP> Ω<SUP>-1</SUP> than the as deposited films due to a high visible light transmittance of 72.1% and a low sheet resistance of 14.0 Ω/□, respectively. From the observed results, it is concluded that the post-deposition electron irradiated SnO₂ 30/Ag 15/SnO₂ 30 ㎚ tri-layer films can be used as a substitute for conventional transparent conducting oxide films in various opto-electrical applications.