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금속 코팅된 탄소나노튜브의 전계 방출 특성 및 신뢰성 향상
우형수,박상식,김병환,Uh, H.S.,Park, S.,Kim, B. 한국진공학회 2011 Applied Science and Convergence Technology Vol.20 No.6
Metal coating with several nanometer thickness was applied on the carbon nanotubes (CNTs) in order to improve electron emission characteristics and emission reliability for the potential applications in the area of various electron sources and displays. CNTs were grown on the 2-nm thick Invar (52% Fe, 42% Ni, 6% Co alloy)-catalized Si substrate by using plasma-enhanced chemical vapor deposition at $450^{\circ}C$. In order to reduce the spatial density of densely packed CNTs, as-grown CNTs were partly etched back by $N_2$ plasma and subsequently coated with 5~150 nm thick Ti by a sputtering method. 5 nm thick Ti-coated CNTs produced four times higher emission current density at the electric field of 6 V/${\mu}m$ and much lower emission current fluctuation, compared with the as-grown CNTs. These improved emission properties are mainly due to not only the work function of Ti (4.3 eV) lower than that of pristine CNTs (5 eV), but also lower contact resistance and better adhesion between CNT emitters and substrate accomplished by Ti coating. 각종 전자 방출원 및 디스플레이 응용 분야에서 뛰어난 가능성을 보이고 있는 탄소나노튜브의 전계 방출 특성을 개선하고 전자방출의 신뢰성을 개선하기 위해 탄소나노튜브의 표면에 수 nm 두께의 금속 코팅을 적용하였다. 탄소나노튜브는 실리콘 기판위에 2 nm 두께의 Invar (52% Fe, 42% Ni, 6% Co alloy) 촉매를 사용하여 $450^{\circ}C$의 온도에서 플라즈마 화학기상 증착법으로 성장시켰다. 성장된 탄소나노튜브의 밀도 제어를 위해 성장 후 질소 플라즈마로 일부를 식각한 후 티타늄(Ti) 금속을 탄소나노튜브 표면에 5~150 nm 두께로 스퍼터링 증착하였다. 5 nm로 티타늄을 탄소나노튜브 표면에 코팅한 경우, 코팅 전에 비해 6 V/${\mu}m$의 전계에서 전류밀도가 4배 이상 증가되었으며, 전계 방출 전류의 요동(fluctuation) 또한 40% 이상 감소됨을 확인할 수 있었다. 이는 티타늄의 일함수가 4.3 eV로 탄소나노튜브의 5 eV에 비해 작을 뿐만 아니라, 탄소나노튜브의 약점으로 지적되는 기판과의 접착성과 접촉저항이 티타늄의 표면 코팅으로 인해 크게 개선된 결과로 판단된다.
이수진,김병환,우형수 한국표면공학회 2009 한국표면공학회 학술발표회 초록집 Vol.2009 No.10
증착된 silicon nitride (Sin) 박막의 수명 시간을 예측하는 신경망 모델을 개발하였다. SiN 박막은 플라즈마 화학기상 증착방식을 이용하여 증착되었다. 증착 공정은 통계적인 실험계획표를 이용하여 수행되었고, 신경망 모델의 예측 성능은 유전자 알고리즘을 이용하여 최적화하였다. 수명시간은 다른 박막특성 (굴절률, 증착률, 전하밀도)의 영항을 상당히 받았으며, 특히 굴절률과 전하밀도는 높은 증착률에서 증가시킬 때 수명시간을 최대화할 수 있었다
박상식,신범재,우형수 한국마이크로전자및패키징학회 2020 마이크로전자 및 패키징학회지 Vol.27 No.2
The technology and market size of image sensors continue to develop thanks to the release of image sensors that exceed 100 million pixels in 2019 and expansion of black box camera markets for vehicles in addition to existing mobile applications. We review the technology flow of image sensors that have been constantly evolving for 40 years since Hitachi launched a 200,000-pixel image sensor in 1979. Although CCD has made inroads into image sensor market for a while based on good picture quality, CMOS image sensor (CIS) with active pixels has made inroads into the market as semiconductor technology continues to develop, since the electrons generated by the incident light are converted to the electric signals in the pixel, and the power consumption is low. CIS image sensors with superior characteristics such as high resolution, high sensitivity, low power consumption, low noise and vivid color continue to be released as the new technologies are incorporated. At present, new types of structures such as Backside Illumination and Isolation Cell have been adopted, with better sensitivity and high S/N ratio. In the future, new photoconductive materials are expected to be adopted as a light absorption part in place of the pn junction.
Orientation Compensation for Initially Misaligned Caster Wheels
이두암,정동근,우광식,김낙교,목형수,한수희 제어·로봇·시스템학회 2013 International Journal of Control, Automation, and Vol.11 No.5
This study presents an effective orientation compensation scheme for four-wheel vehicles with misaligned caster wheels in order to correct unexpected driving errors due to an unbalanced load or power. By accumulating angular differentials from the desired heading until achieving steady state driving, we obtain the net rotation angle and then compensate for it by controlling the speed difference of the two driving wheels on left and right sides. It is shown through experiments with an electric-powered wheelchair that the proposed orientation compensation scheme prevents transient swerve due to misaligned caster wheels and thus enables the vehicle to follow its expected driving path.