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ICP Source를 이용한 저온 증착 a-SiNx:H 특성 평가
강성칠,이동혁,소현욱,장진녕,홍문표,권광호,Kang, Sung-Chil,Lee, Dong-Hyeok,So, Hyun-Wook,Jang, Jin-Nyoung,Hong, Mun-Pyo,Kwon, Kwang-Ho 한국전기전자재료학회 2011 전기전자재료학회논문지 Vol.24 No.7
The silicon nitride films were prepared by chemical vapor deposition using inductively coupled plasma. During the deposition, the substrate was heated at $150^{\circ}C$ and power 1,000 W. To evolution low temperature manufacture, we have studied the role of source gases, $SiH_4$, $NH_3$, $N_2$, and $H_2$, to produce Si-N and N-H bond in a-SiNx:H film growth. $SiH_4$, $NH_3$, and $N_2$ flow rate fixed at 100, 10, and 10 sccm, $H_2$ flow rate varied from 0 to 10 sccm by small scale. To get the electrical characteristics, we makes MIM structure, and analysis surface bonding state. Experimental data show that Si-N and N-H bond is increased and hence electrical characteristics is showed 3 MV/cm breakdown-voltage, and leakage-current $10^{-7}\;A/cm^2$.
SF<sub>6</sub>/Ar 유도결합플라즈마를 이용한 ZnO 박막의 식각 특성에 관한 연구
강성칠,이윤찬,이진수,권광호,Kang, Sung-Chil,Lee, Yoon-Chan,Lee, Jin-Su,Kwon, Kwang-Ho 한국전기전자재료학회 2011 전기전자재료학회논문지 Vol.24 No.12
The etching characteristics of ZnO and etch selectivities of ZnO to $SiO_2$ in $SF_6$/Ar plasma were investigated using Inductively-coupled-plasma (ICP). The maximum etch rates of ZnO were 6.5 nm/min at $SF_6$(50%)/Ar(50%), Source power (700 W), Bias power (250 W), Working pressure(8 mTorr). The etch rate of ZnO showed a non-monotonic behavior with increasing from 0% to 50% Ar fraction in $SF_6$/ Ar plasma. The plasma diagnostic were characterized using Optical Emission Spectroscopy (OES) analysis measurements.
강성칠 ( Seong Chil Kang ),한봉호 ( Bong Ho Han ),최진우 ( Jin Woo Choi ),장재훈 ( Jae Hoon Jang ),김홍순 ( Hong Soon Kim ) 한국환경생태학회 2015 한국환경생태학회지 Vol.29 No.3
본 연구는 수도권매립지에서 매립이 완료된 제 1매립장 사면에 식재된 수목과 토양환경 간의 상관관계를 규명하고자 수행하였다. 제 1매립장 사면에 식재된 주요 수목 26종을 대상으로 69개의 식생 조사구조사구(7~20m×5~20m) 를 설치하여 2007년부터 2009년에 걸쳐 조사하였으며, 토양분석은 2007년부터 2008년까지의 수목 생육불량률 기준으로 수목 생육불량 지표종을 선정하고 지표종의 생육정도에 따라 7개의 조사구를 선정하여 토양을 채취하고 분석하였다. 수도권매립지 환경 적응양호 종은 총 10종으로 침엽수는 곰솔(묘목), 향나무로 2종이었으며, 활엽수는 갈참나무, 능수버들, 밤나무(묘목), 살구나무, 상수리나무, 이팝나무, 튤립나무(묘목), 팽나무로 8종이었다. 적응불량인 수종은 총 8종으로 침엽수 2종, 활엽수 6종이었다. 판단보류는 총 8종으로 침엽수 1종, 활엽수 7종이었다. 수목 생육불량 지표종은 불량률이 25% 이상인 종을 중심으로, 개오동나무, 회화나무, 자귀나무, 단풍나무를 선정하여 식재지의 토양환경을 분석하였다. 토양분석결과, 토양산도는 염기성토양이었으며, 토양 삼상은 고상률 60% 이상이거나 55% 이하이지만 기상이 10% 이하인 지역이 대부분이었고, 유기물 함량은 0.14~2.52%이었다. This study investigated the correlation between the trees planted on the slope of the first landfill where the landfill was completed and the soil environment. 69 plots (7~20 m × 5~20 m) were planted with 26 kinds of major trees in the first landfill slopes for vegetation survey. The survey was conducted from 2007 to 2009. Soil analysis from 2007 to 2008 was made on the basis of the injured index and the indicator species were selected. Depending on the rate of growth of the indicator species, seven survey locations were selected for soil sample analysis. 10 tree species appeared to adapt to the landfill environment. Among them, the coniferous trees were Pinus thunbergii (Seedling) and Juniperus chinensis and the deciduous trees were Quercus aliena, Salix preudo-lasiogyne, Castanea crenata (Seedling), Prunus armeniaca var. ansu, Quercus acutissima, Chionanthus retusus, Liriodendron tulipifera (Seedling) and Celtis sinensis. 8 species of trees did not adapt well to the landfill environment. Among them, two kinds were coniferous, the other six kinds were deciduous. In addition, judgment on the other 8 species of trees as to whether they adapted well or not was postponed. The species for which judgment was postponed included one coniferous tree and seven deciduous trees. Indicator species of injured index was the species that have more than 25 % of the defect. The soil was collected from where Catalpa ovata , Sophora japonica, Albizzia julibrissin and Acer palmatum were planted for analysis. According to the soil analysis, the soil pH showed that the soil was alkaline. Regarding the three phases of the soil, most sample soil showed 60 % for the solid phase or 55 % for the solid phase but with less than 10 % of gas phase. The organic matter content was found to be 0.14 to 2.52 %.
강성칠,한봉호,최진우,장재훈,김홍순 한국환경생태학회 2015 한국환경생태학회지 Vol.29 No.3
본 연구는 수도권매립지에서 매립이 완료된 제 1매립장 사면에 식재된 수목과 토양환경 간의 상관관계를 규명하고자 수행하였다. 제 1매립장 사면에 식재된 주요 수목 26종을 대상으로 69개의 식생 조사구조사구(7~20m×5~20m) 를 설치하여 2007년부터 2009년에 걸쳐 조사하였으며, 토양분석은 2007년부터 2008년까지의 수목 생육불량률 기준으로 수목 생육불량 지표종을 선정하고 지표종의 생육정도에 따라 7개의 조사구를 선정하여 토양을 채취하고 분석하였다. 수도권매립지 환경 적응양호 종은 총 10종으로 침엽수는 곰솔(묘목), 향나무로 2종이었으며, 활엽수는 갈참나무, 능수버들, 밤나무(묘목), 살구나무, 상수리나무, 이팝나무, 튤립나무(묘목), 팽나무로 8종이었다. 적응불량인 수종은 총 8종으로 침엽수 2종, 활엽수 6종이었다. 판단보류는 총 8종으로 침엽수 1종, 활엽수 7종이었다. 수목 생육불량 지표종은 불량률이 25% 이상인 종을 중심으로, 개오동나무, 회화나무, 자귀나무, 단풍나무를 선정하여 식재지의 토양환경을 분석하였다. 토양분석결과, 토양산도는 염기성토양이었으며, 토양 삼상은 고상률 60% 이상이거나 55% 이하이지만 기상이 10% 이하인 지역이 대부분이었고, 유기물 함량은 0.14~2.52%이었다. This study investigated the correlation between the trees planted on the slope of the first landfill where the landfill was completed and the soil environment. 69 plots (7~20 m × 5~20 m) were planted with 26 kinds of major trees in the first landfill slopes for vegetation survey. The survey was conducted from 2007 to 2009. Soil analysis from 2007 to 2008 was made on the basis of the injured index and the indicator species were selected. Depending on the rate of growth of the indicator species, seven survey locations were selected for soil sample analysis. 10 tree species appeared to adapt to the landfill environment. Among them, the coniferous trees were Pinus thunbergii (Seedling) and Juniperus chinensis and the deciduous trees were Quercus aliena, Salix preudo-lasiogyne, Castanea crenata (Seedling), Prunus armeniaca var. ansu, Quercus acutissima, Chionanthus retusus, Liriodendron tulipifera (Seedling) and Celtis sinensis. 8 species of trees did not adapt well to the landfill environment. Among them, two kinds were coniferous, the other six kinds were deciduous. In addition, judgment on the other 8 species of trees as to whether they adapted well or not was postponed. The species for which judgment was postponed included one coniferous tree and seven deciduous trees. Indicator species of injured index was the species that have more than 25 % of the defect. The soil was collected from where Catalpa ovata , Sophora japonica, Albizzia julibrissin and Acer palmatum were planted for analysis. According to the soil analysis, the soil pH showed that the soil was alkaline. Regarding the three phases of the soil, most sample soil showed 60 % for the solid phase or 55 % for the solid phase but with less than 10 % of gas phase. The organic matter content was found to be 0.14 to 2.52 %.
강성칠 ( Kang Seongchil ),한봉호 ( Han Bongho ),박석철 ( Park Seokcheol ),최진우 ( Choi Jinwoo ) 한국환경복원기술학회(구 한국환경복원녹화기술학회) 2016 한국환경복원기술학회지 Vol.19 No.4
This study was carried out to the structure of plant community, and ecological succession sere of forest ecosystem in Soguemgang Valley, Odaesan National Park. Fifteenth plots(size is 20m×20m) were set up and the results analyzed by DCA which is one of the ordination technique showed that the plant communities were divided into seven groups which area community I(Quercus variabilis-Pinus densiflora community), Ⅱ(Pinus densiflora community), Ⅲ(Pinus densiflora-Quercus variabilis community), Ⅳ(Pinus densiflora-Quercus serrata community), Ⅴ(Quercus serrata community), Ⅵ (Pinus densiflora-Deciduous broad-leaved plant community), Ⅶ(Cornus controversa-Carpinus laxiflora community). Shannon diversity index per 400㎡ was to 0.7777 to 1.1440 and the age of Pinus densiflora 86 years old, Quercus variabilis was ranged from 66 to 87 years old, Quercus serrata was ranged from 51 to 62 years old, Carpinus laxiflora was 94 years old. In 2013, the succession trend was predicted Pinus densiflora→Quercus variabilis, Quercus serrata →Cornus controversa, Carpinus laxiflora. The ecological sucession progress has declined power of the Pinus densiflora and the increased power of the deciduous broad-leaved and Quercus spp. in Soguemgang Valley, Odaesan National Park. Quercus serrata and Quercus variabilis communities that judged Pinus densiflora were progressing by direction of landform. The southern slopes vegetation were progressing for Quercus variabilis, the northern slopes vegetation were progressing for Quercus serrata. In flat Valley, mainly native species of Cornus controversa, Carpinus laxiflora are predicted ecological succession for deciduous broad-leaved tree community.
수도권매립지 반입 폐기물 성상분석: 생활폐기물에 혼합 반입되는 음식물쓰레기 중심으로
권기운 ( Gi Woon Kwon ),김대우 ( Dae Woo Kim ),정용길 ( Yong Gill Jeong ),강성칠 ( Seong Chil Kang ),김문정 ( Moon Jeong Kim ) 한국폐기물자원순환학회(구 한국폐기물학회) 2021 한국폐기물자원순환학회 춘계학술발표논문집 Vol.2021 No.-
세계보건기구는 홍콩독감, 신종플루 이후 코로나19 유행을 세 번째 팬데믹으로 선언했으며 2019년 말부터 현재까지 국내에도 코로나19의 대유행이 지속되고 있습니다. 작년 국내 배달음식업체의 매출을 증가 및 집에서 식사하는 문화는 점차 확산시켜오고 있으며 이는 신종플루때와 비슷한 양상을 보이고 있습니다. 과거 우리나라는 2005년부터 음식물쓰레기 직매립 금지 및 런던 협약으로 인한 음식물 쓰레기처리폐수(이하 음폐수라 함)의 해양투기금지를 하고 있습니다. 음식물쓰레기 및 음폐수의 육상처리가 대두됨에 따라 음식물쓰레기종량제(2013년)가 시행되었으며 수도권매립지에 혼합 반입되어 들어오는 음식물쓰레기는 10% 이하로 관리되고 있습니다. 수도권매립지 통계연감을 통해 생활폐기물 내 음식물쓰레기함량을 보면 직매립 이후 가장 많은 함량을 차지한 년도는 신종플루가 대유행하고 종식된 2009년(11.4%)과 2010년(12.6%)으로 확인되었습니다. 세 번째 펜데믹인 코로나19대유행으로 혼합 반입되어지는 음식물쓰레기의 함량이 증가할 것으로 예상됩니다. 따라서 생활폐기물의 물리적 성상을 모니터링하여 펜데믹과 생활폐기물 물리적조성과의 상관관계를 도출할 예정이다.