Bonded SOI 웨이퍼 제조를 위한 기초연구

정해도,문도민,강성건,류근걸 釜山大學校生産技術硏究所 1997 生産技術硏究所論文集 Vol.52 No.-

SOI(Silicon On Insulator)기술은 MOS(Metal-Oxide Semiconductor), CMOS(Complementary MOS)등의 전자집적회로 제조시 소자의 고속화, 고집적화, 저전력화, 발열 특성의 향상 등의 효과를 기대할 수 있다. 간략하게 Bonded SOI웨이퍼의 제조를 설명하면 SiO₂를 성장시킨 웨이퍼와 경면 가공한 다른 웨이퍼를 접합하여 열처리 등 후공정을 행한 후 한쪽 웨이퍼를 원하는 두께만큼 박막으로 가공한다. 본 연구에서는 기본적인 Bonded SOI 웨이퍼의 제조 공정 기술을 획득하고, 이를 통해 두께 3㎛ 이하, 표면거칠기 5Å이하의 상부 실리콘 박막을 가공하였다. SOI(Silicon On Insulator) technology is many advantages in the fabrication of MOS(Metal-Oxide Semiconductor) and CMOS(Complementary MOS) structures. These include high speed, lower dynamic power consumption, greater packing density, increased radiation tolearence et al. In the smiplest form of bonded SOI wafer manufacturing, creating, a bonded SOI structure involves oxidizing at least one of the mirror polished silicon surfaces, cleaning the oxidized surface and the surface of the layer to which it will be bonded, bringing the two cleanded surfaces together in close physical proximity, allowing the subsequent room temperature bonding to proceed to completion, and then following this room temperature joining with some form of heat treatment step, and device wafer is thinned to the target thickness. In this paper, The process of Bonded SOI wafer manufacturing is described briefly, and we made an attempt to manufacture the Bonded SOI safer that Si layer thickness is below 3㎛ and average roughness is below 5Å.

Device Wafer의 종점 전후에 있어서 광역평탄화 특성에 관한 연구

정해도,김호윤 釜山大學校生産技術硏究所 1996 生産技術硏究所論文集 Vol.51 No.-

화학적 기계적 폴리싱(CMP)은 반도체 제조에서 다층구조의 평탄화에 널리 이용되고 있다. 그러나, 패턴의 형상·물질 차이, 여러 가지 가공 변수와 아직 확립되지 않은 실제 가공 모델링 등으로 인하여 완전한 평탄화를 얻기는 쉽지 않다. 본 논문에서는 에치 백 방법 대신 메탈(텅스텐) 폴리싱에 따르는 절연산화막의 평탄화를 실현하였다. CMP 가공동안의 패턴 형상 평가는 AFM을 사용하였다. AFM 평가는 다른 일반적인 평탄도 측정에 비해서 미소 측정에 상당히 효과적이었다. 더불어 평탄화 특성 분석과 CMP 모델링 확립에 크게 기여할 것이다. Chemical mechanical polishing (CMP) has become widely accepted for the planarization of multi-interconnect structures in semiconductor manufacturing. However, perfect planarization is not so easily achieved because it depends on the pattern sensitivity, the large number of controllable process parameters, and the absence of a reliable process model, etc. In this paper, we realized-the planarization of deposited oxide layers followed by metal (W) polishing as a replacement for tungsten etch-back process for via formation. Atomic force microscope (AFM) is used for the evaluation of pattern topography during CMP. As a result, AFM evaluation is very attractive compared to conventional methods for the measurement of planarity. Moreover, it will contribute to analyze planarization characteristics and establish CMP model.

이야기 꾸미기와 작문 활동이 단순언어장애 아동의 이야기 회상하기와 쓰기에 미치는 영향

박정해,권도하 대구대학교 특수교육재활과학연구소 2006 再活科學硏究 Vol.24 No.1

This study was performed to identify the influence of the story making and writing on the recalling and writingcapabilities of the children with specific language impairment (SLI). The subjects were 4 SLI children who were 7 or 8 years old. The story making and writing activity program was made of 8 stages. They were asked to write 3 to 5 scenes. In story recalling and story writing, the use of story grammar subordinate elements was analyzed and in writing spelling was analyzed together. The results are as follows. First, the use of story grammar subordinate elements was improved in story recalling. There was significant enhancement in background, initiative event and attempt, while there was not much enhancement in internal response and internal planning. Second, the use of story grammar subordinate elements was improved in story writing. The enhancement level in writing was similar to that in recalling. Third, the spelling test score was enhanced in all children. 본 연구는 이야기 꾸미기와 작문 활동이 단순언어장애아동의 이야기 회상하기와 쓰기에 미치는 영향을 알아보기 위해 실시하였다. 연구 대상은 7~8세의 단순언어장애아동 4명을 선정하였다. 이야기 꾸미기와 작문 활동의 프로그램은 8단계로 이루어져 있으며 3장면에서 5장면까지 이야기를 꾸민 후 작문을 하도록 하였다. 분석 방법은 이야기 문법 하위 구성요소들의 출현 빈도를 사용하여 분석하였고, 쓰기에서는 철자 쓰기도 함께 분석 하였다. 결과는 다음과 같다. 첫째, 이야기 회상하기에서 이야기 문법 하위 구성요소들의 사용 빈도가 증가하였다. 배경, 시작 사건, 시도에서 많은 향상을 보였지만 내적 반응과 내적 계획에서는 낮은 향상을 보였다. 둘째, 이야기 쓰기에서 이야기 문법 하위 구성요소들의 사용 빈도가 증가하였다. 그 향상 정도는 이야기 회상하기와 유사하였다. 셋째, 철자 쓰기에서는 대상 아동 모두 철자 쓰기 점수가 향상되었다.

資本自由化와 韓國證券市場의 課題

李正道,孫炳海,申敏植 慶北大學校 經濟經營硏究所 1986 經濟經營硏究 Vol.2 No.-

Korea now stands on the verge of capital liberalization in line with its open door economic policy. On January 14, 1981, the korean government announced a long-term plan concerning the liberalization of the capital market with emphasis on an open securities market. The liberalization of the securities market will be phased-in as follows; (1) allowing the establishment of international investment trusts to invest in listed korean securities and permitting the opening of branch offices of foreign securities firms in korea by 1984, (2) permitting foreign investors to directly invest in korean securities on a limited basis, around 1985, (3) permitting foreigners to invest in koran securities without any limitations and allowing the issuance of domestic securities in oversea markets by the late 1980s (4) permitting korean securities to be listed on foreign stock exchanges and allowing capital outflow by the early 1990s. In 1981, two open-end on-shore investment trusts; namely, "Korea Trust" and "Korea International Trust", were privately placed in the european market. In 1984, following these two international trusts of $50 million total, the $60 million Korea Fund, third round of three more international issues of korea-managed trusts(KGT, SIT and ST) totalling $90 million were completed. All six of these indirect vehicles have brought into korea $200 million of foreign capital. In the second stage, korean leading companies have launched oversea offerings of convertible bonds to further proceed with the market's liberalization. Sam Sung Electronics, Co., Dae Woo Heavy Ind. Co., and Yu Kong Ltd. Co., issued convertible bonds of $80 million total. The next step in the internationalization process following convertible issues or depositary receipts is limited direct access by foreign investors to the korean stock market. This is expected to occur sometime between 1987 and 1988. Our government contemplates that the last step in the market's liberalization; that is, the outflow of korean capital into foreign securities investments will take place after 1990 with the assumption that economic targets have been met, and more importantly, that the country has a current account surplus in its balance of payments. In connection with this, it is important for us to be better prepared for the upcoming internationalization of the korean capital market. First of all, the government must take measures to foster the functions of the korean capital market in both the primary and secondary markets. Secondly, the korean securities companies must be able to provide a wide range of financial services to its domestic and oversea clients.

癩患者 手指에 생긴 續發性畸形治療를 爲한 物理療法 效果에 關한 硏究

李惠映,金貞淑,金道一 大韓癩學會 1981 癩學 會誌 Vol.14 No.1

Pd이 도핑된 SnO₂박막의 가스감지특성

임종도,김진해,박종아,김권태,김정규,마대영,박기철 경상대학교 생산기술연구소 2001 工學硏究院論文集 Vol.1 No.-

The Pd(palladium) doped SnO2(Tin Oxide) thin films sensitive to NH3 gas were prepared on alumina substrate by rf magnetron sputtering method. The gas sensing characteristics of Pd doped SnO2 thin films were studied as a function of film thickness and heat-treatment temperature. The dependence of the sensitivity, the selectivity and the time response of the thin films on heat-treatment temperature, film thickness and gas species were investigated. The thin films of Pd doped SnO2 which were the Pd content of 5 wt%, the film thickness of 5000 ? and the heat-treatment temperature of 600 ℃ showed the highest sensitivity of 68 % for 100 ppm NH3 gas concentration under an operating temperature of 400 ℃. The sensitivity towards NOx gas was not observed in the same condition.

임신 제 일삼분기와 제 이삼분기 초음파의 태아기형 진단의 유용성에 대한 고찰

최승도,최규연,이정재,정성윤,이임순,이권해 순천향의학연구소 2003 Journal of Soonchunhyang Medical Science Vol.9 No.2

Objective: Ultrasonographic screening between 9 and 13 weeks for fetal structural abnormalities using transvaginal sonography in unselected population. Visualization of detailed fetal anatomy in the first trimester has improved as a result of technological progress in ultrasound machines and the introduction of transvaginal sonography(TVS). Our study aims to evaluate the accuracy of TVS as a screening tool for detecting fetal malformations in a nonselected population of pregnant women. For this purpose we compared the results obtained by using second trimesster TA scanning with those obtained using TVS at 9-14 weeks' gestation. Methods: From March 2001 to February 2003, 620 unselected consecutive pregnant women were recruited at their initial visit at Soonchunhyang university hospital, department of obstetrics and gynecology and offered a TVS scan at the average gestational age of 9-13 weeks in addition to the TA screening usually performed between 22-26 weeks. To fulfill the technical requirements of a screening test, ultrasonographic examinations were performed by skillful operators with different degrees of experienced using adequate instruments Aloka SSD 5500 (Aloka Co. Ltd., Tokyo, Japan) provided with either a 3.5-5MHz TA probe or a 5-7.5MHZ TV probe) in a fixed scanning time of maximum 30 min, generally considered sufficient for a complete fetal anatomic survey. Results: During the study period we found in our unselected population an overall prevalence of target abnormalities of 2.2%(24 malformed fetuses out of 600 screened). In the fetuses examined by TVS, 16 abnormalities were detected whereas 8 were not; of these, 6 were detected at transabdominal rescreening at 22-26 weeks and the remaining 2 were observed after birth. A nuchal region abnormality was the most frequent type of malformation detected in the early scan, including six cases of nuchal edema, two cases of cystic hygroma associated with hygroma associated with hydrops, three cases of hydronephrosis, one case of fetal neck teratoma, one case of cleft lip. Conclusion: This study has demonstrated the potential of screening a low risk population for fetal abnormalities at 9-13 weeks of gestation using transvaginal sonography and rescreened via transabdominal sonography at 22-26 weeks. Larger studies are required to establish the clinical value of the first trimester scan.

수중기지국 기반 수중통신망 구축 및 성능 시험

김도훈(Kim Do Hoon),채광영(Chae Kwang Young),고만재(Go Man Jae),정해지(Jeong Hae Ji),유호동(Liu Hao Dong),조용호(Cho Young Ho) 한국통신학회 2021 한국통신학회 학술대회논문집 Vol.2021 No.2

본 논문에서는 수중음향통신을 활용하여 CTD센서와 DO센서를 통해 수중환경데이터를 측정하고, 측정된 값을 육상에서 확인할 수 있도록 하는 실험을 진행하였다. 본 실험은 남해 실해역에서 20년 12월 12일부터 20일까지 진행되었으며, 구조물은 해수면에 해상부이 1대, 해저면에 수중기지국 2대, 센서노드 10대를 설치하였다. 모든 구조물에는 송신을 위한 트랜스듀서와 수신을 위한 하이드로폰이 장착된다. 해상부이는 해저면에 설치된 수중기지국과 센서노드에서 수중환경데이터를 수신한 후 육상 서버와 통신하여 패킷을 전송한다. 데이터는 1시간 단위로 전송되도록 설정하였으며 실험결과, 패킷 성공률은 약91.20%인 것을 확인하였다.

Caffeic Acid의 ONOO^(-) 제거활성

이지영,성도유,노재경,김유정,제정환,김민선,최재수,정해영,이경희 대한암예방학회 2003 Journal of cancer prevention Vol.8 No.3

Tris(tetraethylammonium) bistrimetaphosphate의 空間群 P1￣와 C2/c의 結晶學的 資料間의 相互變換

徐日煥,李珍昊,林星秀,朴晶蘭,秋錦洪,郭相姬,都暎圭,李海정 충남대학교 기초과학연구소 1994 忠南科學硏究誌 Vol.21 No.1

Tris(tetraethylammonium) bistrimetaphosphate, VP_6N_3O_18C_24H_60 의 結晶構造가 두가지 空間群 P1￣와 C2/c 로 밝혀졌다. 本 論文에서는 이 두가지 空間群의 結晶學的 資料間에 相互變換 關係가 成立함을 보였다. The structure of Tris(tetraethylammonium) bistrimetaphosphate, VP_6N_3O_18C_24H_60, has been elucidate with two space groups P1￣ and C2/c. In this paper, it has been shown that the crystallographic data of the two space groups are mutually transformed.