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x-cut $LiNbO_3$ 광도파로 제작 및 Ti 두께에 따른 Near-field 특성 변 화
김성구,윤형도,윤대원,한상필,김창민,박계춘,이진,유용택,Kim, Seong-Ku,Yoon, Hyung-Do,Yoon, Dae-Won,Han, Sang-Pill,Kim, Chang-Min,Park, Gye-Chun,Lee, Jin,Yoo, Yong-Taek 한국전기전자재료학회 1998 전기전자재료학회논문지 Vol.11 No.2
The optical near-field patterns, propagation loss and mode sizes of x-cut $Ti:LiNbO_3$ optical waveguide which was fabricated by Ti-diffusion varying with Ti strip thickness in wet oxygen atmosphere were discussed at optical wavelength 1550nm. As Ti thickness increased from $760{\AA}$, the insertion loss of waveguide was decreased. But at Ti thickness $1500{\AA}$, mode sizes are widely broadened. The Ti thickness of below $1100{\AA}$ and above $1500{\AA}$ showed negative effects to propagation loss and fiber coupling. The best Ti thickness for fabricating low propagation loss and good fiber coupling was inferred to be between $1100{\AA}-1500{\AA}$ in our conditions. And for Ti thickness $1150{\AA}$, its propagation loss, horizontal/vertical mode sizes were showed 1.61 dB/cm, $11.9/8.9{\mu}m$ for TM, 0.22 dB/cm, $12.0/9.1{\mu}m$ for TE respectively.