http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
고밀도 평판형 유도결합 BCl<sub>3</sub>/SF<sub>6</sub> 플라즈마를 이용한 GaAs/AlGaAs와 InGaP 반도체의 선택적 식각에 관한 연구
유승열,류현우,임완태,이제원,조관식,전민현,송한정,이봉주,고종수,고정상,Yoo Seungryul,Ryu Hyunwoo,Lim Wantae,Lee Jewon,Cho Guan Sik,Jeon Minhyon,Song Hanjung,Lee BongJu,Ko Jong Soo,Go Jeung Sang,Pearton S. J. 한국재료학회 2005 한국재료학회지 Vol.15 No.3
We investigated selective dry etching of GaAs over AlGaAs and InGaP in high density planar inductively coupled $BCl_3/SF_6$ plasmas. The process parameters were ICP source power (0-500 W), RE chuck power (0-30W) and gas composition $(60-100\%\;BCl_3\;in\;BCl_3/SF_6)$. The process results were characterized in terms of etch rate, selectivities of GaAs over AlGaAs and InGaP, surface morphology, surface roughness and residues after etching. $BCl_3/SF_6$ selective etching of GaAs showed quite good results in this study. Selectivities of GaAs $(GaAs:AlGaAs\~36:1,\;GaAs:InGaP\~45:1)$ were superior at $18BCl_3/2SF_6$, 20 W RF chuck power, 300 W ICP source power and 7.5 mTorr. Addition of $(5-15\%)SF_6\;to\;BCl_3$ produced relatively high selectivities of GaAs over AlGaAs and InGaP during etching due to decrease of etch rates of AlGaAs and InGaP (boiling points of etch products: $AlF_3\~1300^{\circ}C,\;InF_3>1200^{\circ}C$ at atmosphere) at the condition. SEM and AFM data showed slightly sloped sidewall and somewhat rough surface$(RMS\~9nm)$. XPS study on the surface of processed GaAs proved a very clean surface after dry etching. It shows that planar inductively coupled $BCl_3/SF_6$ plasmas could be a good candidate for selective dry etching of GaAs over AlGaAs and InGaP.
자기부상형 플라이휠 에너지 저장 장치의 자기베어링 시스템 설계
유승열(S. Yoo),모상수(S. Mo),최상규(S. Choi),이정필(J. Lee),한영희(Y. Han),노명규(M.D. Noh) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.5
Flywheel energy storage systems (FESS) have advantages over other types of energy storage methods due to their infinite charge/discharge cycles and environmental friendliness. The system has two radial bearings and one hybridthrust bearing. Thrust hybrid-type bearing use permanent magnet to relieve gravity load. The radial bearings were designed to provide sufficient force slew rate considering the unbalance disturbance at the operating speeds. In this paper, we will derive dynamic model of hybrid-type bearing using permanent magnet for thrust bearing and present simulation and stability of the model.