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대기압 저온 플라즈마 처리에 의한 폴리이미드의 친수화 효과
조중희,강방권,김경수,최병규,김세훈,최원열,Cho, J.H.,Kang, B.K.,Kim, K.S.,Choi, B.K.,Kim, S.H.,Choi, W.Y. 한국전기전자재료학회 2005 전기전자재료학회논문지 Vol.18 No.2
Atmospheric low-temperature plasma was produced using dielectric barrier discharge (DBD) plate-type plasma reactor and high frequency of 13.56 Hz. The surfaces of polyimide films for insulating and packaging materials were treated by the atmospheric low-temperature plasma. The contact angle of 67$^{\circ}$ was observed before the plasma treatment. The contact angle was decreased with deceasing the velocity of plasma treatment. In case of oxygen content of 0.2 %, electrode gap of 2 mm, the velocity of plasma treatment of 20 mm/sec, and input power of 400 W, the minimum contact angle of 13$^{\circ}$ was observed. The chemical characteristics of polyimide film after the plama treatment were investigated using X-ray photoelectron spectroscopy (XPS), and new carboxyl group bond was observed. The surfaces of polyimide films were changed into hydrophilic by the atmospheric low-temperature plasma. The polyimide films having hydrophilic surface will be very useful as a packaging and insulating materials in electronic devices.
대면적 상압 글로우 플라즈마의 발생 및 특성 진단 연구
강신현,최원호,강방권,문세연,엄세훈,이용관 한국물리학회 2004 새물리 Vol.48 No.2
A 13.56 MHz radio-frequency source was used to generate an atmospheric glow plasma with a length of 200 mm and a width of 50 mm for the surface treatment of large-area materials. Optical diagnostics of the plasma indicated that the gas temperature and the vibrational temperature were 540 - 610 K and 2400 - 3300 K, respectively, for an input power range of 200 - 450 W. Also, measurement of the emission spectrum intensity showed that the plasma was generated and sustained continuously in time. The lectrical current and voltage characteristic curve was almost identical to that of a low-pressure glow discharge. The spatial uniformities of the emission spectrum intensity, the rotational temperature, and the vibrational temperature were measured to be more than 93 % in the lengthwise direction. Finally, We confirmed that the plasma parameters could be controlled to some extent by the gas ow rate and the input power.
이재현(Jaehyun Lee),황상연(Sangyeon Hwang),강방권(Bangkwon Kang),변도영(Doyoung Byun) 대한기계학회 2012 대한기계학회 춘추학술대회 Vol.2012 No.11
We present a novel method to selectively pattern nano-particles or biological materials on a substrate where locally hydrophilic regions could be formed on a super-hydrophobic surface. For the hydrophilic and super-hydrophobic heterogeneous surfaces, at first, the super-hydrophobic surface was prepared by using the atmospheric plasma treatment and selectively the layer could be removed forming any hydrophilic areas (e.g. dot arrays, grooved lines) on the substrate. The local hydrophilic region could be fabricated based on the chemical reaction between the super-hydrophobic surface and the Ethanol (or Butyl carbitol). We investigated the optimal condition of the selective formation of the hydrophilic region. We also could pattern tiny regions with the ethanol by using the electrohydrodynamic jet printing technology which allows us to print micro- to nano-scale geometry.