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플라즈마 에쳐용 실리콘 전극과 링의 수명에 미치는 결함의 영향
음정현,채정민,피재환,이성민,최균,김상진,홍태식,황충호,안학준,Eum, Jung-Hyun,Chae, Jung-Min,Pee, Jae-Hwan,Lee, Sung-Min,Choi, Kyoon,Kim, Sang-Jin,Hong, Tae-Sik,Hwang, Choong-Ho,Ahn, Hak-Joon 한국결정성장학회 2010 한국결정성장학회지 Vol.20 No.2
플라즈마 에쳐 내에 사용되는 실리콘 전극과 링 부품은 사용 중에 강한 플라즈마와 접촉하면서 주기적인 가열과 냉각 과정을 거친다. 이 때 부품의 표면에서는 열 응력으로 인하여 PSB라고 하는 띠 형상의 결함이 생성되며 이로 인하여 그 수명을 다하게 된다. 원료인 실리콘 잉곳의 관점에서 그 수명에 미치는 인자를 살펴보았다. 잉곳의 등급, 즉 S/F와 S/A에 따라 불순물과 결함의 농도를 GDMS와 ${\mu}$-PCD로 평가하여 잉곳의 어떤 요소들에 의하여 수명이 결정되는가를 분석하였다. 그 결과, {001} 면상에서 관찰되는 <110> 방향의 면 결함들이 PSB와 연결될 가능성이 있음을 제안하였다. Silicon electrode and ring in a plasma etcher those are in contact with harsh plasma suffer from periodic heating and cooling during their lifetime. This causes the silicon components failure due to thermal stress remaining the persistent slip bands (PSBs) on their surfaces. The factors that determine the lifetime of silicon electrode and ring were discussed with respect to silicon ingot. The impurity level and the average defect concentration measured with glow discharge mass spectrometer (GDMS) and microwave photo-conductance decay (${\mu}$-PCD) were compared with the grade of silicon ingots those are divided to slip-free and slip-allowed ingot. Some silp-allowed samples showed planar defects along <110> direction on {001} surface. The role of these defects was suggested from the viewpoint of the lifetime of silicon components.
채정민,서윤환 효성여자대학교 법정연구소 1997 법정연구 Vol.4 No.-
This article is to analyse the ground of political obligation in Thomas Hobbes. Political obligation is concerned with the relationship between people and the political community of itsmembers. The problem of the political obligation appeared in the era which was religiouscoflict and civil war in the 17th century In this circumstnace of the modem society, theimportant problem was in reconciling the needs of individuals with those of the political community. Political obligation concerns the moral bonds between individuals and politisal community.The justification of political obligation accounts of the morality of freedom and authority. So,political obligation is said to be defined by the moral obligation to obey the law. Hobbes divided the concept into the natural obligation and prudential one. But the conceptisn't incosistent in his thought. By analyzing its moral justification it can be evident. He asserted the natural 1aw and the Prudencial Principle based on the selfish psychology asthe ground of political obligation. The subjects is obliged to the soverign by the renounce ofthe natural right. According to Hobbes, the state of nature is that of the disorder and fear.They want to establish the common power in order to resolve the self. Such an authorization is based on the consent of the original contractor. The political obligation theoryof Hobbes by the arguments of the social contract was based on the consent logic. However, it is natural to say the moral obligation to obey the authority to secure the justice and well-being. So, I think he empathized on the utility of self-preservation.