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양호한 유기발광소자의 광학적 특성 개선을 위한 Anode 표면특성에 관한 연구
이우선(Woo-Sun Lee),최권우(Gwon-Woo Choi),고필주(Pil-Ju Ko),박주선(Ju-Sun Park),나한용(Han-Yong Na) 한국조명·전기설비학회 2008 한국조명·전기설비학회 학술대회논문집 Vol.2008 No.5월
ITO thin film is generally fabricated by various. methods such as spray, CVD, evaporation, electron gun deposition, direct current electroplating, high frequency sputtering, and reactive DC sputtering. However, some problems such as peaks, bumps, large particles, and pin-holes on the surface of ITO thin film were reported, which caused the destruction of color quality, the reduction of device life time, and short-circuit. Chemical mechanical polishing (CMF) process is one of the suitable solutions which could solve the problems