ALD 설비의 NH₃(Ammonia)누출 시나리오에 대한 내부유동 및 제어 속도 해석

이성삼(Seoung-Sam Lee),안형환(Hyeong-hwan An) 한국가스학회 2022 한국가스학회지 Vol.26 No.5

반도체 생산 설비 중 ALD는 열이나 플라즈마로 분해한 Gas를 Wafer에 증착시켜 원자층을 형성시키는 설비로 주로 인화성 물질인 NH₃와 SIH4이 사용된다. 이중 NH₃는 연소·폭발 범위가 상한(UFL) 33.6%, 하한(LEL) 15%로 폭발 범위가 비교적 좁지만 많은 양이 갑자기 한곳에 모이면 폭발할 수 있고, 피부에 닿거나 흡입하면 치명적이다. NH₃는 ALD Gas inlet의 배관과 전기·기계 기구를 통해 Chamber로 공급되는데 많은 누출 가능점이 존재하여 누출시 화재·폭발 또는 중독 사고로 이어질 수 있어 NH₃ 누출 시나리오에 대한 내부 유동과 제어 속도를 이해하고 고환기가 가능한 배기장치를 설계하는 것이 필요하여 본 연구자는 NH₃의 누출시나리오를 CFD에 적용하여 내부유동과 제어 속도를 수치 분석하여 설계 시 반영할 수 있도록 하였다. Atomic Layer Deposition (ALD) is a facility that deposits an atomic layer on a wafer by causing a chemical reaction after decomposition using heat or plasma by inputting two or more gases during the semiconductor process. The main gas used at this time is NH₃ (Ammonia). NH₃ has a relatively narrow explosive range with an upper limit (UFL) of 33.6% and a lower limit (LEL) of 15%, but it can explode if a large amount suddenly gathers in one place. It is Velocity and fatal if inhaled or in contact with the skin . NH₃ (Ammonia) of ALD (Atomic Layer Deposition) facility is supplied to the chamber through the gas inlet and discharged after the reaction.

생체전기임피던스법을 이용한 체성분 분석에 의한 신체외형도(Somatotype Drawing)의 타당성 연구

이성은(Lee, Seoung Eun),정영미(Jung, Young Mi),정길수(Chung, Kil Soo) 한국보건간호학회 2004 韓國保健看護學會誌 Vol.18 No.2

표준화 환자를 활용한 모성간호학 실습 학습방법 효과 분석

이성은(Lee, Seoung Eun) 한국간호교육학회 2011 한국간호교육학회지 Vol.17 No.1

Purpose: The purpose of this study was to investigate the learning effect of a standardized patient managed instruction program for a clinical maternity nursing course. Methods: The SP managed instruction was made for clinical cases in intrapartum and postpartum nursing care. The SP managed instruction was evaluated by using a quasi-experimental, nonequivalent control group post-test design with separate classes of students attending clinical maternity nursing classes at a nursing school in Incheon. Control groups were taught by traditional lecture/model method and experimental groups were taught by SP managed instruction. Data was collected from September 2009 to February 2010. Results: 1. There was no significant difference between the experimental group and control group in identifying relevant data (z=-1.418, p=.156) and necessary nursing skills performance (z=-.643, p=.520) for intrapartum nursing care. In addition, there was no significant difference between the two groups in identifying relevant data (z=-.264, p=.782) and necessary nursing skill (z=-.342, p=.732) for postpartum nursing care. 2. In clinical nursing skill performances the total score was statistically significantly higher in the experimental group than the control group (intrapartum care z=-4.181, p=.000, postpartum care z=-4.279, p=.000). 3. There was a statistically significant difference between the two groups (intrapartum care z=-3.731, p=.000, postpartum care z=-4.066, p=.000). Conclusion: In conclusion , the SP methodis effective in teaching clinical maternity nursing for student nurses and it is necessary to develop SP instruction courses for many areas in the clinical nursing education field.

저심도 이산화탄소 인공주입 및 누출 시험 부지내 지하수 및 가스 모니터링 네트워크 설계 및 구축

이성순(Seong-Sun Lee),김홍현(Hong-Hyun Kim),김현정(Hyun Jung Kim),김태욱(Taewook Kim),하승욱(Seoung-Wook Ha),이강근(Kang-Kun Lee) 대한지질학회 2016 대한지질학회 학술대회 Vol.2016 No.10

태양전지 제조용 PCVD설비의 환기 성능 분석(폭발 방지 측면)

이성삼(Seoung-Sam Lee),안형환(Hyeong-hwan An) 한국가스학회 2022 한국가스학회지 Vol.26 No.5

태양광 전지 제조 설비인 PCVD(Plasma Chemical Vapor Deposition)는 NH₃, SIH₄, O₂를 Chamber에 주입하여 생성된 Plasma를 Wafer에 증착시키는 설비이다. PCVD설비에서 Gas 이동과 주입이 Gas Cabinet에서 이루어지며, 내부에는 MFC, Regulator, Valve, Pipe 등이 복잡하게 연결되어 많은 누출 점이 존재한다. 폭발 상한값(UEL) 33.6%, 폭발 하한값(LEL) 15%의 NH₃ 누출 시 폭발을 예방하기 위해서는 NH₃ 농도가 폭발 범위에서 벗어날 수 있는 희석능력이 있어야 한다. 본 연구는 기존 PCVD의 Gas Cabinet에 대한 NH3 Gas 누출 시 희석능력을 3D와 수치로 확인할 수 있는 CFD 분석 기법을 활용하여 분석하였다. 그 결과 중희석에 해당되며 설비 개선을 통해 고환기가 가능하다는 결론을 얻었다. PCVD (Plasma Chemical Vapor Deposition), a solar cell manufacturing facility, is a facility that deposits plasma generated in a chamber (NH₃, SIH₄, O₂ on a wafer. In the PCVD facility, gas movement and injection is performed in the gas cabinet, and there are many leak points inside because MFC, regulator, valve, pipe, etc. are intricately connected. In order to prevent explosion in case of leakage of NH₃ with an upper explosive limit (UEL) of 33.6% and a lower explosive limit (LEL) of 15%, the dilution capacity must be capable of allowing the concentration of NH₃ to be out of the explosive range. This study was analyzed using the CFD analysis technique, which can confirm the dilution ability in 3D and numerical values when NH₃ gas leaks from the existing PCVD gas cabinet. As a result, it was concluded that it corresponds to medium dilution and that testicular ventilation is possible through facility improvement.

일 대학 간호학생의 임상실습 만족도, 실습경험 분석 및 개선방향 제시

이성은(Lee, Seoung Eun) 한국간호교육학회 2001 한국간호교육학회지 Vol.7 No.2

여중생 하복 블라우스와 스커트 착용만족도

이성자(Lee Seoung-Ja),권수애(Kweon Soo-Ae) 충북대학교 생활과학연구소 2003 생활과학연구논총 Vol.7 No.2

  This study was conducted to provide guidelines that will improve the middle school girl"s uniforms. It examined the satisfaction level upon wearing summer school uniforms. Questionnaires were used to collect the data and 505 girl"s in senior year took part in the study.   The results are as follows : Examining the external appearance, it has been pointed out that there is much room for improvement in comfort and design. The average satisfaction level was founded in the following when wearing blouses: the dynamism, the maintenance of external appearance/ease care. On the contrary, the high satisfaction level was founded in the following: maintainability of shape, sanitation/comfort, design/external appearance. In particular, the study revealed the low level of satisfaction in design/external appearance and sanitation/comfort of both blouses and skirts. The satisfaction level upon wearing summer school uniforms was found to be significantly different depending on types of school, design, materials, experiences of changes in school uniforms and the satisfaction level in the body shape. In keeping with the dynamism and aesthetics of middle school girl"s, the skirts such as culottes(divided-skirts) or wrap-skirts should be developed and manufactured for school uniforms. In addition, in order to reduce boredom, the design of summer and winter school uniforms needs to be diverse. Considering the sanitation/comfort and easy care, the flexible materials (and the mixed use of knit and textiles) need to be developed.

장애아 어머니의 정신건강상태, 부담감과 삶의 질

정길수 ( Kil Soo Chung ),이성은 ( Seoung Eun Lee ),조경미 ( Kyung Mee Cho ),정영미 ( Young Mi Jung ) 한국정신간호학회 2004 정신간호학회지 Vol.13 No.3

N/A Purpose: The purpose of this study was to investigate mental health status, burden and quality of life(QOL) of mothers with handicapped children. Method: Data were collected using a structured questionnaire from September to November, 2002. The subjects consisted of 65 mothers who live in D and I city. The instrument was utilized SCL-90-R, subjective and objective burden scale and QOL scale. The collected data were analyzed by SPSS program including descriptive statistics, Pearson Correlation Coefficient. Results: In the level of SCL-90-R, the mean score was 1.0642 of `depression` and 1.009 of `obsessive-compulsive`. It is that the mothers with handicapped children have mild mental health symptoms. The mean score of burden was 2.95 and it of QOL was 3.14. Burden was positive correlation with mental health status, its 9 subfactors and additional items, and negative correlation with QOL and its 6 subfactors. Also mental health status was negative correlation with QOL. Conclusion: It is necessary to develop supportive psychotherapy program for decreasing potential or actual psychologic problem in mothers with handicapped children. This study suggests that it will be done longitudinal study on emotional problem and adaptation process of parents by growth and development of handicapped children, and research on supportive program development and its effects.

재가노인의 건강상태에 따른 낙상실태 및 낙상관련요인

정영미(Jung, Young-Mi),이성은(Lee, Seoung-Eun),정길수(Chung, Kil-Soo) 한국노년학회 2006 한국노년학 Vol.26 No.2

본 연구는 노인의 건강상태에 따른 낙상실태 및 낙상관련요인을 살펴보기 위한 연구이었다. 연구대상자는 수도권 지역에 거주하는 재가노인 258명이었으며, 연구기간은 2004년 11월부터 2005년 12월까지였다. 낙상횟수는 남자노인 평균 1.5회, 여자노인 1.9회를 경험하였으며, 낙상시 손상정도에서 남자노인은 작은 손상 4명(40.0%), 입원치료 4명(40.0%)이었으며, 여자노인은 작은 손상 39명(40.7), 병원치료가 24명(25.0%)순으로 나타났다. 낙상노인집단의 낙상경험을 조사한 결과 낙상을 경험한 노인 106명 젓 남자노인의 평균나이는 71.3세, 여자노인은 74.3세였으며, 만성질환에서 남자노인은 평균 1.7개, 여자노인은 2.4개를 가지고 있었다. 대상자의 질환력에 따른 낙상경험 유무를 살펴보면 관절염, 치매가 있는 집단에서 낙상경험자가 많았으며 통계적으로 유의한 차이를 나타냈다. 노인의 건강상태에 따라 낙상경험 유무를 살펴본 결과 유의한 차이를 보인 변수는 평형감각, 보행장애, 의자에서의 기동성, 만성질환 갯수, 건강기능식품이었다. 낙상노인집단과 비낙상노인집단의 낙상효능감 정도에서 낙상노인집단은 평균 84.5점, 비낙상노인집단은 평균 89.1점으로 비낙상노인집단의 낙상효능감 점수가 더 높았으며, 두 집단간에 통계적으로 유의한 차이를 보였다. 낙상경험에 영향을 미치는 변수를 알아보기 위해서 로지스틱 회귀분석을 실시한 결과 낙상경험에 영향을 미치는 변수는 평형감각, 보행장애, 건강기능식품인 것으로 나타났다. 본 연구결과를 토대로 재가노인뿐만 아니라 병원, 요양시설, 양로시설 등 다양한 곳에 거주하고 있는 노인의 낙상실태, 위험인자 조사 및 추후경과를 대규모로 조사할 필요가 있으며, 만성질환에 따른 노인의 낙상실태와 낙상예방프로그램을 통한 낙상위험감소에 대한 연구를 시행할 것을 제언한다. The purpose of this study was to investigate the prevalence and associated factors of falls according to health status in elderly living in the community. The subject was 258 elderly person over 65 who lived in Seoul and Kyunggi Province. Descriptive statistics, χ²-test, t-test and logistic regression was utilized for the data analysis. There were statistical differences in equilibrium sense, gait ability, mobility in the chair, number of disease, health food, arthritis and dementia according to those who fall and those who do not fall. 106(41.1%) of the elderly subjects experienced a fall. The FES (Fall Efficacy Scale) score of non-faller group was higher than faller group and there was a statistical difference in two groups. Significant factors influencing on fall experience were equilibrium sense, gait disability and health food. It is suggested to do a study on the difference of fall rate according to chronic disease as well as prevalence, risk factor and follow-up of falls in elderly living in various settings. And it is necessary to perform fall prevention program based on individual characteristics of elderly and effects on it.

실내식물과 소나무의 오존에 대한 광합성 능력, 항산화 효소의 활성, 해부학적 반응

이주영 ( Ju Young Lee ),제선미 ( Sun Mi Je ),이성한 ( Seoung Han Lee ),우수영 ( Su Young Woo ) 한국산림과학회 2013 한국산림과학회지 Vol.102 No.4

The purpose of this study was to identify the effects of ozone pollution on the one woody species and two indoor plants in controlled environment. Pinus densiflora, Spathiphyllum patinii and Epipremnum aureum seedlings were exposed in both control and ozone chambers to investigate photosynthetic rate, water use efficiency, antioxidative enzyme activities such as GR(Glutathione reductase) and APX(Ascorbate peroxidase) activity and leaf anatomical response. Ozone was fumigated 8 hours for a day with 30 ppb concentration for 50 days. Pinus densiflora seedlings showed no significant difference on photosynthetic rate, water use efficiency, antioxidant enzyme activity during ozone exposure. Ozone concentration (30 ppb in this study) is not high enough to generate ozone damage on Pinus densiflora species. In contrast, ozone generally altered photosynthetic rate, antioxidant enzyme (especially GR) activity and leaf anatomy in two indoor species (Spathiphyllum patinii and Epipremnum aureum) exposed in ozone chamber were significantly differ from those of control in every measurement. These data suggest that two indoor species(Spathiphyllum patinii and Epipremnum aureum) are more sensitive to ozone than Pinus densiflora.