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초음파 분무 열분해법에 의한 TiO2 및 BaTiO3 분말의 제조
김덕준,김환,Kim, D.J.,Kim, H. 한국세라믹학회 1989 한국세라믹학회지 Vol.26 No.5
Fine TiO2 and BaTiO3 powders having spherical particles were synthesized by ultrasonic spray pyrolysis of alcoholic solution of metal alkoxide in an electric furnace heated at 400-90$0^{\circ}C$. Microstructure and composition of particles synthesized were observed by TEM and XRD respectively. Spectific surface area of powders synthesized was examined through BET specific surface area measurement. TEM observation revealed that the particle size did not change irrespective of pyrolysis temperature but decreased according to the increase of concentration and spherical particle was consisted of primary particles of about 0.02${\mu}{\textrm}{m}$. As for BaTiO3 powder, the ratio of Ti/Ba was 0.987 by EDX analysis.