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An Etch-Stop Technique Using Cr2O3 Thin Film and Its Application to Silica PLC Platform Fabrication
신장욱,한영탁,성희경,김제하,Dong-JungKim,Sang-HoPark,Soo-JinPark 한국전자통신연구원 2002 ETRI Journal Vol.24 No.5
Using Cr2O3 thin film, we developed a novel etch-stop technique for the protection of silicon su rface morphology during deep ion coupled plasma etching of silica layers. With this technique we were able to etch a silica trench with a depth of over 20 μm without any damage to the exposed silicon terrace surface. This technique should be well applicable to fabricating silica planar lighwave circuit platforms for opto-electronic hybrid integration.
${\gamma}$-$Fe_2O_3$ 세라믹 가스감지소자;비표면이 가스감응성에 미치는 영향
신장욱,박순자 한국세라믹학회 1986 한국세라믹학회지 Vol.23 No.5
This paper is concerned with a gas sensor composed of semi-conducting ${\gamma}$-$Fe_2O_3$ ceramics made by oxidizing $Fe_2O_3$ sintered body. Acicular $\alpha$-FeOOH powder prepared by precipitation of $FeSO_4$.$7H_2O$ solution was transformed to $FeSO_4$ sintered at 700$^{\circ}$-850$^{\circ}$C for 1 hr. and then oxidized to ${\gamma}$-$Fe_2O_3$ The gas sensitive properties of ${\gamma}$-$Fe_2O_3$ ceramic bodies based on the lectrical resistance change was measured in 0.5-2 vol% $H_2$ and $C_2$ $H_2$ gas at 35$0^{\circ}C$ The specific surface area of sintered specimen largely dependent on the sintering temperature and grain shape directly affected the gas sensitive pro-perties of ${\gamma}$-$Fe_2O_3$gas sensor. Specimens having larger specific surface area showed better sensitivity which means the electrical resistance change due to oxidation and reduction process occurs on ly at the surface of grains microscopically in the ${\gamma}$-$Fe_2O_3$ceramics. Micropores made in $Fe_2O_3$ powder during dehydration of $\alpha$-FeOOH can not prompt the gas sensitive properties of sintered ${\gamma}$-$Fe_2O_3$ because they are sintered or closed in the grains during sintering process and dose not affect the specific surface area of sintered body.
신장욱,심재기,정명영,최태구,Shin, J.U.,Sim, J.K.,Jeong, M.Y.,Choy, T.G. 한국전자통신연구원 1993 전자통신동향분석 Vol.8 No.3
광 커플러는 광섬유로부터 광신호를 분기하거나 결합하는 광통신망의 가장 기초적인 부품으로 광통신망에서 다양한 기능을 수행하고 있다[1]. 따라서 광 커플러는 광통신망의 구성에 있어서 가장 중요한 부품의 하나이며, 특히 광가입자망의 구현에 따라 그 수요가 크게 증가될 전망이다. 현재 가장 일반적인 광 커플러는 Evanescent 광 결합원리를 이용하는 광섬유형 근접 커플러이며, 그 이외에도 각종 평면도파로를 이용한 도파로형 커플러가 제품의 소형화 및 양산성이 우수하여 많은 연구개발이 진행되고 있다. 본고에서는 현재까지의 각종 광 커플러의 기술 및 시장 현황을 통신용 단일모드 광 커플러를 중심으로 고찰하고 앞으로의 광 커플러 개발 방향을 제시하고자 한다.
External Cavity Lasers Composed of Higher Order Gratings and SLDs Integrated on PLC Platform
신장욱,성희경,오광룡,오수환,Yoon-Jung Park,Sang-Ho Park,한영탁 한국전자통신연구원 2007 ETRI Journal Vol.29 No.4
Very compact 4-channel 200-GHz-spacing external cavity lasers (ECLs) were fabricated by hybrid integration of reflection gratings and superluminescent laser diodes on a planar lightwave circuit chip. The fifth-order gratings as reflection gratings were formed using a conventional contact-mask photo-lithography process to achieve lowcost fabrication. The lasing wavelength of the fabricated ECLs matched the ITU grid with an accuracy of ±0.1 nm, and optical powers were more than 0.4 mW at the injection current of 80 mA for all channels. The ECLs showed single mode operations with more than 30 dB side lobe suppression.
Polymer 1x2 Thermo-Optic Digital Optical Switch Based on the Total-Internal-Reflection Effect
한영탁,신장욱,Sang-Ho Park,한상필,백용순,Chul-Hee Lee,Young-Ouk Noh,박효훈 한국전자통신연구원 2011 ETRI Journal Vol.33 No.2
This letter presents a polymer 1x2 thermo-optic total- internal-reflection digital optical switch (TIR-DOS) with an index contrast of 1.5%-∆ operating at low power consumption. The structure of our 1x2 TIR-DOS was created by adding a reflection port to that of a conventional multimode filtering variable optical attenuator. To improve the total-internal- reflection efficiency, a heater offset was applied to the crossing region of multimode waveguides of the TIR-DOS. The fabricated 1x2 TIR-DOS shows a low electrical power consumption of 18 mW for an on-off ratio of 35 dB.