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$LiNbO_3$에 의한 1$\times$2 방향성결합형 광 변조기 제작 및 특성 연구
강기성,소대화,Gang, Gi-Seong,So, Dae-Hwa 한국재료학회 1996 한국재료학회지 Vol.6 No.5
1x2 방향성결합형 광 변조기를 LiNbO3 기판상에 양자교환에 의한 자기정렬 방식으로 제작하였다. 양자교환후 광 도파로의 안정을 위해 열처리를 하였다. 본 연구에서는 광 도파로를 제작한 후 열처리 시간에 의한 도파로의 굴절을 변화의 관계에 대하여 연구하였으며 전계효과가 우수한 자기정렬방식을 선택하였다. 제작된 1x2 방향성결합형 광 변조기는 변조전압 8.0V에서 크로스토오크가 -29.5dB의 매우 우수한 특성을 나타내었다.
강기성 한국전기전자재료학회 1996 電氣電子材料學會誌 Vol.9 No.6
Coupling optical modulator which on the $LiTaO_3$ substrate is fabricated by using proton exchange method and self-aligned method. Proton exchange of proton diffusion method was applied to pattern a waveguide on $LiTaO_3$ substrate. The annealing at >$400^{\circ}C$ was carded out to control waveguide width and depth. The depths of the two annealed optical waveguides, which were measured by using .alpha.-step, were 1.435 K.angs. and 1.380 K.angs. Using .alpha.-step facility, we examined that the width of waveguides is increased from 5.mu.m to 6.45 .mu.m and 6.3.mu.m due to the annealing effects. The process of proton exchange was done at 150.deg. C for 120 min, >$200^{\circ}C$ for 60 min and annealing process was done at >$400^{\circ}C$ for 90 min, >$400^{\circ}C$ for 60 min. The high speed coupling optical modulator has very good figures of merits; the measured high frequency power were achieved.
강기성,소대화 한국전기전자재료학회 1995 電氣電子材料學會誌 Vol.8 No.4
A directional coupler which on the X-cut $LiNbO_3$ substrate is fabricated by using proton exchange method and self-aligned method. After proton exchange process, the waveguide is formed by annealing process. The relation ship between refractive index change of waveguide and maximum output was studied along with the annealing time. A self-aligned method was used to simplify the fabrication process of the waveguide and to maximize the efficiency of electric field. The on-off state of modulator has been observered with the switching of the directional coupler by the electric field effect and also the switching voltage of the directional coupler has been measured with 8.0 [V].