적외선 배경신호 처리를 통한 OES 기반 PECVD공정 모니터링 정확도 개선

이진영,서석준,김대웅,허민,이재옥,강우석 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.1

Optical emission spectroscopy is used to identify chemical species and monitor the changes of process results during the plasma process. However, plasma process monitoring or fault detection by using emission signal variation monitoring is vulnerable to background signal fluctuations. IR heaters are used in semiconductor manufacturing chambers where high temperature uniformity and fast response are required. During the process, the IR lamp output fluctuates to maintain a stable process temperature. This IR signal fluctuation reacts as a background signal fluctuation to the spectrometer. In this research, we evaluate the effect of infrared background signal fluctuation on plasma process monitoring and improve the plasma process monitoring accuracy by using simple infrared background signal subtraction method. The effect of infrared background signal fluctuation on plasma process monitoring was evaluated on SiO2 PECVD process. Comparing the SiO2 film thickness and the measured emission line intensity from the by-product molecules, the effect of infrared background signal on plasma process monitoring and the necessity of background signal subtraction method were confirmed.

A Development of Hybrid Temperature Recorder Monitoring System

Keelati Oonchom,Benjaporn Arnuttinanon,Olarn Wongwirat 제어로봇시스템학회 2010 제어로봇시스템학회 국제학술대회 논문집 Vol.2010 No.10

Currently, the HDDs (Hard Disk Drives) from a production line have to pass an operation test in a burn-in chamber. To ensure quality, after an operation period, the burn-in chamber has to be calibrated. The calibration process requires an engineer to manually monitor a temperature at the hybrid temperature recorder connected to the burn-in chamber throughout the entire process. It is a time consuming operation and inefficient process due to a large number of burn-in chambers used in the production line, when comparing with a limited number of engineers. This paper expresses a development of hybrid temperature recorder monitoring system used to improve such the calibration process. There are two main systems involved, i.e., a temperature recording system and a monitoring system. However, the monitoring system is mainly focused in this paper. Also, an object-oriented analysis and design methodology (OOADM) is applied in the development process. The monitoring system interconnects the hybrid temperature recorder through a wireless network to receive the temperatures captured from sensors inside the burn-in chamber. Then, the temperature data is processed and displayed at the central server of system in the engineering office. This could allow the engineer to centrally monitor all hybrid temperature recorders used in the calibration process of burn-in chamber in real-time. The monitoring system can display the alarm signal when the errors occur during the calibration process and sent it to the engineer for alerting as well. Furthermore, the temperature data can be stored in a database at the central server for future reference.

Development of Real-time Grinding Process Monitoring and Analysis System

Saurabh Kumar,Hong-Seok Park,Dumitru Nedelcu 한국정밀공학회 2021 International Journal of Precision Engineering and Vol.22 No.8

The success of the manufacturing process which involves grinding as one of the stages depends solely on the accuracy of the grinding process. Being the last stage of the manufacturing path, it is mostly done to provide the desired surface finish to the product. This makes the stage very crucial. To prevent the ruining of all the previous stages and eff orts, the real-time monitoring of the grinding stage becomes necessary which will make a room for better production planning and avoidance of failure occurrence. Conventionally the quality is dependent on the machine behavior as well as the operator’s skill. To make the process in par with the latest industry 4.0, real-time process monitoring of the grinding process with the use of a vibration sensor is considered. The developed system in the paper focusses on the monitoring of the process behavior and log the occurred changes. The hardware architecture and software modules are introduced in detail and the application of the developed system is demonstrated with the grinding of an automotive part. The developed system is convenient to use and very helpful in improving the overall productivity of the brake disc production facility by reducing the quality failures and hence saving the resources.

비획득 정보 처리를 위한 대체 기반 실시간 비즈니스 프로세스 모니터링 방법론 개발

강복영,김동수,강석호 한국엔터프라이즈아키텍처학회 2010 정보기술아키텍처연구 Vol.7 No.2

Process monitoring provides a real-time access to critical process attributes generated during process executions. A widely used approach for process monitoring is a rule-based monitoring. It detects specific conditions about attributes causing corresponding results, which is defined in If (condition) Then (status) rule. However, when the rule-based approach is applied to a real-time process monitoring that attributes are recorded sequentially along with execution order of tasks, it shows some limitations like no indicator or late warnings. To improve these limitations,we propose a novel approach for real-time process monitoring by adopting imputation for treating unobserved attributes. Imputation aims at replacing missing or non-sampled attributes with any specific unit with similar characteristics. During the real-time monitoring, there exist unobserved attributes according to the real-time progress of ongoing processes, which can be considered as inevitable missing with monitoring period. In this situation, imputation methods can be used to assume probable progress after the period. Therefore, probable outcomes given the current progress of ongoing process can be predicted in real-time during entire monitoring periods.

Application of Digital Twin to Monitor and Optimize Utility Process

Ho Dong Lee,Kunpeng Guo,Lorena F.S. Souza,Jong Min Lee 제어로봇시스템학회 2021 제어로봇시스템학회 국제학술대회 논문집 Vol.2021 No.10

Digital transformation utilizing the digital twin of a process can provide enormous benefit. It is possible to effectively monitor the process operation and control the process erroneous behavior by using the high-fidelity digital twin. In addition, the better operational strategy can be identified through process optimization from the digital twin. To perform such activities about the huge scale of process, we established a digital platform that allows the operational personnel to efficiently monitor the operation condition with the useful information such as economics and representative indexes that can be obtained from the digital twin. A chemical plant utility system that has a goal to supply the process utilities such as steam and power stably was used as the target process. As exclusive features of the project for the utility system the platform suggests the multi-level optimization results in terms of the process specifications as well as the trends of the key performance indicators of the process. It also provides a tool, what-if analysis, to simulate the hypothetical situation in preparation for the possible change of the external factors. Using the digital process twin technology, we were able to suggest the capability to save the cost and present the high-level information that cannot be utilized from the process data alone.

Business Process Monitoring under Extended-GMA Environment with Complex Event Handling

김민수(Kim, Min-Su),옥영석(Ock, Young-Seok) 한국산학기술학회 2010 한국산학기술학회논문지 Vol.11 No.6

비즈니스 프로세스의 자동화된 처리와 이에 대한 모니터링 요구는 기업마다 특화된 형태를 지니는 것이 일 반적이다. 비즈니스 프로세스는 일반적인 데이터베이스 트랜잭션과는 달리 수행에 장시간이 소요되며, 비즈니스 상황 에 따라 매우 복잡한 처리 로직을 가진다. 이러한 처리 로직들은 사업 정책이나 환경이 변함에 따라 자주 변경되기 때문에 기업은 특정 비즈니스 프로세스의 모니터링 과정에서 해당 프로세스 인스턴스의 전체적 의미를 종합적으로 파악하고자 한다. 본 연구에서는 비즈니스 프로세스의 종합적인 모니터링을 위해 GMA(Grid Monitoring Architecture) 를 사용하였다. GMA는 이종 시스템 환경 하에서 모니터링 정보를 효과적으로 관리하고 감독하기 위하여 제시된 확 장성이 높은 아키텍처이다. 다양한 처리 로직을 지원할 수 있도록 GMA 모델에 복합 이벤트의 처리 기능을 부가함 으로써, 비즈니스 프로세스에 대한 자동화된 실행과 상위수준의 모니터링이 가능한 시스템을 구축할 수 있었다. The requirements for automated handing of business process and its monitoring usually have a proprietary form for each enterprise. Unlike the conventional database transaction, business process takes long time for its completion and incorporates very complex handling logics along with business situations. Since those handling logics are frequently changing in accordance with the business policies or environment, enterprises want to integrally capture the whole business semantics while monitoring those process instances. In this paper, we adopted GMA(Grid Monitoring Architecture) for the integrated monitoring of business processes. The GMA(Grid Monitoring Architecture) is a very scalable architecture to effectively monitor and manage monitoring information under the heterogeneous environment. By introducing complex event handling features into GMA to support various processing logics, we could implement a system that enables automated execution and high-level monitoring of business processes.

Real-time business process monitoring using formal concept analysis

Kang, Bokyoung,Jung, Jae-Yoon,Cho, Nam Wook,Kang, Suk-Ho Emerald Group Publishing Limited 2011 INDUSTRIAL MANAGEMENT & DATA SYSTEMS - Vol.111 No.5

<B>Purpose</B> - The purpose of this paper is to help industrial managers monitor and analyze critical performance indicators in real time during the execution of business processes by proposing a visualization technique using an extended formal concept analysis (FCA). The proposed approach monitors the current progress of ongoing processes and periodically predicts their probable routes and performances. <B>Design/methodology/approach</B> - FCA is utilized to analyze relations among patterns of events in historical process logs, and this method of data analysis visualizes the relations in a concept lattice. To apply FCA to real-time business process monitoring, the authors extended the conventional concept lattice into a reachability lattice, which enables managers to recognize reachable patterns of events in specific instances of business processes. <B>Findings</B> - By using a reachability lattice, expected values of a target key performance indicator are predicted and traced along with probable outcomes. Analysis is conducted periodically as the monitoring time elapses over the course of business processes. <B>Practical implications</B> - The proposed approach focuses on the visualization of probable event occurrences on the basis of historical data. Such visualization can be utilized by industrial managers to evaluate the status of any given instance during business processes and to easily predict possible subsequent states for purposes of effective and efficient decision making. The proposed method was developed in a prototype system for proof of concept and has been illustrated using a simplified real-world example of a business process in a telecommunications company. <B>Originality/value</B> - The main contribution of this paper lies in the development of a real-time monitoring approach of ongoing processes. The authors have provided a new data structure, namely a reachability lattice, which visualizes real-time progress of ongoing business processes. As a result, current and probable next states can be predicted graphically using periodically conducted analysis during the processes.

Application Methods of Process Monitoring to the Nuclides Management Process to Enhance Safeguardability

Young-Eun Jung,Bong-Young Kim,Seong-Kyu Ahn 한국방사성폐기물학회 2023 한국방사성폐기물학회 학술논문요약집 Vol.21 No.1

As the use of nuclear energy has been expanded, issues in a spent nuclear fuel management are raised. Several methods have been proposed and developed to manage spent fuels safely and efficiently. One method is to reduce environmental burden in disposal of spent fuels by decreasing volume of high-level waste. A nuclides management process (NMP) is one example. Through this novel process, it is able to separate highly mobile nuclides (ex. iodine, krypton), high thermal emission nuclides (ex. strontium, barium), and optionally, uranium from spent fuels. Since the NMP is a back-end fuel cycle technology, a reliable safeguards system should be employed in the facility. As international atomic energy agency (IAEA) recommends safeguards-by-design (SBD), it is desirable to investigate an appropriate safeguards approach at a step of technology development. Process monitoring (PM) is a complemental safeguards technology for traditional safeguards technologies which based on mass balance. PM traces nuclear materials indirectly but consecutively by using process parameters such as temperature, pressure, and flow of fluid. These parameters are obtainable by installing appropriate sensors. In a respect of SBD, PM is a promising approach to achieve the safeguards goal, the timely detection of diversion of a nuclear material. However, it is necessary to classify useful process parameters from all available signals which provided from PM in order to properly utilize PM. In this study, we investigated application methods of the PM approach to NMP. NMP consists of several unit processes in series. Firstly, we inspected a principle and a feature of each unit process. Based on the results, we evaluated applicability of the PM approach to each unit process according to effectiveness in enhancing safeguardability. Several unit processes were expected that their safeguards are able to be enhanced by using certain process parameters from PM.

Process Evaluation Model based on Goal-Scenario for Business Activity Monitoring

Baek, Su-Jin,Song, Young-Jae The Korea Institute of Information and Commucation 2011 Journal of information and communication convergen Vol.9 No.4

The scope of the problems that could be solved by monitoring and the improvement of the recognition time is directly correlated to the performance of the management function of the business process. However, the current monitoring process of business activities decides whether to apply warnings or not by assuming a fixed environment and showing expressions based on the design rules. Also, warnings are applied by carrying out the measuring process when the event attribute values are inserted at every point. Therefore, there is a limit for distinguishing the range of occurrence and the level of severity in regard to the new external problems occurring in a complicated environment. Such problems cannot be ed. Also, since it is difficult to expand the range of problems which can be possibly evaluated, it is impossible to evaluate any unexpected situation which could occur in the execution period. In this paper, a process-evaluating model based on the goal scenario is suggested to provide constant services through the current monitoring process in regard to the service demands of the new scenario which occurs outside. The new demands based on the outside situation are analyzed according to the goal scenario for the process activities. Also, by using the meta-heuristic algorithm, a similar process model is found and identified by combining similarity and interrelationship. The process can be stopped in advance or adjusted to the wanted direction.

Big Data Processing Strategies for Low-cost Monitoring of Airborne Particulate Matter in Mine Sites

Eui Young Seo,Sunghyun Bae,Gwan In Bak,Sang-hun Lee 계명대학교 자연과학연구소 2021 Quantitative Bio-Science Vol.40 No.2

Monitoring particulate matter (PM) in mine sites is challenging owing to the intermittent PM emission and dispersion over widespread areas at these locations. In these circumstances, multiple monitoring stations, including PM sensors, should be installed to monitor PM distributions throughout the site. However, this may result in high operation costs. Monitoring based on low-cost PM sensors is advantageous with respect to cost, though its poor data quality is problematic. Yet, big data processing techniques can be utilized to remedy this drawback. This study proposed a strategic solution to enhance the data reliability of low-cost PM monitoring through big data processing. The significance of an effective calibration was emphasized to overcome the poor quality of low-cost PM sensor data. In particular, this study focused on the usefulness of blind calibration for adjustment of background PM levels and the traditional linear regression-based calibration through direct comparison between low-cost and reference sensor data. The applicability of an ANN (Artificial Neural Network) algorithm was also considered for automatic decision making and implementation of the whole calibration, as well as for global optimization in nonlinear regression coefficients with a high complexity.