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Thermal Activation in Ion-shower-doped Poly-Si
홍원의,노재상 한국물리학회 2011 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.58 No.2
The activation behavior of implanted atoms was investigated in P^+/B^+ ion-shower-doped poly-Si upon thermal annealing. Phosphorous or boron was implanted by ion shower doping at acceleration voltages from 2 kV to 15 kV by using a source gas mixture of PH_3/H^2 or B_2H^6/H_2. Isochronal annealing was conducted using a tube furnace at temperatures ranging from 400 ℃ to 600 ℃ for 30 min. With some exceptions the sheet resistance decreased as the acceleration voltage increased upon annealing. Reverse annealing, in which the loss of charge carriers continues, was observed to start at around 400 ℃ in the case of B-doping.
동적 구문처리기 소프트웨어 적용을 통한 대화력전 수행체계 연동의 유연성 향상 방안
홍원의,Hong, Won-Eui 한국군사과학기술학회 2008 한국군사과학기술학회지 Vol.11 No.1
The counter-fire operation system performs its mission exchanging information with other related systems such as command & control systems and military information systems. In the process of exchanging information, the counter-fire operation system uses a type of data message which contains exchange data information in the format of KMTF. The requirement of data exchange of count-fire operation will continue to evolve. But the EDX(External Data eXchange) configuration item of the current counter-fire operation system can not effectively cope with the variation of data exchange requirements due to its fixed software structure. In the paper, a solution for improving flexibility of external data exchange in counter-fire operation system is proposed.