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Development of a Piezoelectric Pump for a Highly-precise Constant Flow Rate
함영복,서우석,오성진,박중호,윤소남,안국영 한국물리학회 2010 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.57 No.41
Recently, piezoelectric-driven small and micro-sized pumps have been developed for applications in microfluidics, bio-chemistry diagnostics, fuel cell systems, drug delivery, and high-power electronics cooling, etc. This paper describes a piezoelectric pump using a multilayered piezoelectric actuator for highly-precise constant flow rate. The design, fabrication, and basic characteristics of the developed piezoelectric pump are summarized. The proposed pump consists of a pump housing, a multilayered piezoelectric actuator, a valve sheet and a single check valve for an inlet port. The overall dimensions of the fabricated piezoelectric pump are 25 mm × 25 mm × 53 mm. Pumping characteristics were experimentally investigated. The fabricated pump achieved a no-load flow rate of 110 ml/min and a maximum output power of 130 mW at an applied voltage of 150 Vpp and a driving frequency of 700 Hz.
A Piezoelectric-driven Single-nozzle Dispenser for Liquid Droplet Jetting
함영복,서우석,오성진,박중호,윤소남 한국물리학회 2010 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.57 No.41
This paper presents a piezoelectric-driven single-nozzle dispenser head using a multilayered piezoelectric actuator for liquid droplet jetting in the fields of semi-conductor packaging and so on. The design, fabrication, and characteristics of the piezoelectric-driven single-nozzle dispenser head are summarized. The proposed single-nozzle dispenser head consists of three major parts: a multilayered piezoelectric actuator, a piston embedded diaphragm, and a micro nozzle with a pressurized dispensing chamber. The overall size of the fabricated single-nozzle dispenser head is 25 mm × 25 mm × 46 mm. The piston embedded diaphragm, which is made of stainless steel, has a diameter of 17 mm and a thickness of 100 µm. The micro-nozzle specifications are a 100 µm and a 200 µm diameter and a 500 µm depth, and the dispensing chamber height between the diaphragm and the nozzle cover is 300 µm. The dispensing experiments were performed with deionized water as the working fluid. The dispensing characteristics, such as the liquid droplet volume rate and the visualization of the droplet, were experimentally investigated as functions of the applied voltage and the driving frequency.