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CMP 패드 두께 프로파일 측정 장치 및 방법에 관한 연구
이태경,김도연,강필식,Lee, Tae-kyung,Kim, Do-Yeon,Kang, Pil-sik 한국산업융합학회 2020 한국산업융합학회 논문집 Vol.23 No.6
The chemical mechanical planarization (CMP) is a process of physically and chemically polishing the semiconductor substrate. The planarization quality of a substrate can be evaluated by the within wafer non-uniformity (WIWNU). In order to improve WIWNU, it is important to manage the pad profile. In this study, a device capable of non-contact measurement of the pad thickness profile was developed. From the measured pad profile, the profile of the pad surface and the groove was extracted using the envelope function, and the pad thickness profile was derived using the difference between each profile. Thickness profiles of various CMP pads were measured using the developed PMS and envelope function. In the case of IC series pads, regardless of the pad wear amount, the envelopes closely follow the pad surface and grooves, making it easy to calculate the pad thickness profile. In the case of the H80 series pad, the pad thickness profile was easy to derive because the pad with a small wear amount did not reveal deep pores on the pad surface. However, the pad with a large wear amount make errors in the lower envelope profile, because there are pores deeper than the grooves. By removing these deep pores through filtering, the pad flatness could be clearly confirmed. Through the developed PMS and the pad thickness profile calculation method using the envelope function, the pad life, the amount of wear and the pad flatness can be easily derived and used for various pad analysis.
흥분제(Psychostimulants)에 대한 신경생물학 측면의 고찰 -Methamphetamine 남용을 중심으로
이태경,존 E 그랜트,김석원,오동열,Lee Tae Kyung,Jon E. Grant,Kim, Suck Won,Oh Dong Yul 대한임상독성학회 2003 대한임상독성학회지 Vol.1 No.1
Methamphetamine (MA) is a major drug of abuse in Korea. Currently preliminary evidence suggests that MA dependence may cause long-term neural damage in human. Repeated exposure to psychostimulants such as methamphetamine results in behavioral sensitization, a paradigm thought to be relevant to drug craving and addiction in human. Sensitization alters neural circuitry involved in normal processes of incentrive, motivation, and reward. However the precise mechanism of this behavioral sensitization has not yet been fully elucidated. Repeated use of high dose MA causes neurotoxicity which is characterized by a long-lasting depletion of striatal dopamine (DA) and tyrosin hydroxylase activity of DA, DA-transporter binding sites in the striatum. The loss of DA transporters correlates with memory problems and lack of motor coordination. DA fuels motivation and pleasure, but it' s also crucial for learning and movement. This selective review provides a summary of studies that assess the neurobiological mechanisms of MA.
Syntax directed Compiler for Subset of PASCAL
이태경(Lee Tae Kyung) 한국정보과학회 1977 정보과학회논문지 Vol.4 No.2
The PM language is a Compiler writing language which syntax-directly translates a high level language into a intermediate language of matrix form. The PM assembler translates the PM language into recursive subroutines which test input strings or output intermediate terms or call another subroutines. A large subset of PASCAL compiler was written in the PM language.
거점국립대학교의 장애학생을 위한 편의시설 현황조사 연구
이태경(Lee Tae-Kyung),임신영(Lim Shin-Young),이상홍(Lee Sang-Hong) 대한건축학회 2009 대한건축학회논문집 Vol.25 No.9
The study focused on finding the problems of the educational facilities for the disabled and handicapped person in five main national universities, Korea. The study is divided into ten areas; interior parts, intermediation parts(include pedestrian part), sanitary facilities, guidance and the rest facilities, lecture rooms, library, auditorium, restaurant, gymnasium, dormitory and bedroom. The finding revealed that firstly, the pedestrian mobility such as boardwalk provided with raised edges, small size of parking areas for wheelchair users, and vertically moving access are not appropriately provided. Secondly, most auditoriums have problems to access on main entrance or evacuation pathway by wheelchair users or handicapped person. Thirdly, the shower room facilities of the dormitory are not properly supported and an emergency alarm lamp facility for the hearingimpaired in the dormitory. The conclusion is that the indicated educational facilities for the disabled, handicapped person are built for most handicapped person except blind or deaf person and the result of evaluation for convenient facilities, most universities can not be over 70%. Thus, educational facilities must be considered and planned for all type of disabled, handicapped person from the viewpoint of Universal Design.