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유도결합 Cl₂ 및 HBr / Cl₂ 플라즈마를 이용한 STI용 실리콘 Shallow trench 식각공정에 관한 연구
이주훈(Ju-Hoon Lee),이영준(Young-Jun Lee),김현수(Hyeon-Soo Kim),이주욱(Ju-Wook Lee),이정용(Jung-Yong Lee),염근영(Geun-Young Yeom) 한국진공학회(ASCT) 1997 Applied Science and Convergence Technology Vol.6 No.3
고밀도 유도결합 Cl₂ 및 HBr/Cl₂ 플라즈마를 이용하여 차세대 반도체 집적회로에 사용가능한 STI(Shallow Trench Isolation) 구조에서 trench 식각시 trench etch profile 및 격자손상에 영향을 미치는 공정변수의 효과에 대하여 연구하였다. 식각결과 Cl₂만을 사용한 경우에는 trench 식각공정 동안 화학적 측면식각의 증가로 인하여 등방성 식각이 얻어지고 이는 유도입력 전력이 증가하고 바이어스 전압이 감소함에 따라 이의 경향이 증가하였다. 측면식각의 정도는 Cl₂에 N₂ 및 O₂의 첨가에 따라 감소하여 HBr을 사용한 경우에 있어서는 Br 라디칼이 Cl 라디칼에 비하여 자발적인 실리콘 식각의 민감도가 감소하여 positive angle의 식각형상이 얻어졌으며 HBr내에 Cl₂의 증가에 따라 이방성 식각이 얻어졌다. 물리적인 격자손상을 투과전자현미경으로 관찰한 결과 Cl₂/N₂ 및 HBr을 함유한 식각가스를 사용한 경우에 trench 표면에서 결함이 관찰되었다. Silicon shallow trenches applied to the STI (Shallow Trench Isolation) of integrated circuits were etched using inductively coupled Cl₂ and HBr/Cl₂ plasmas and the effects of process parameters on the etch profiles of silicon trenches and the physical damages on the trench sidewall and bottom were investigated. The increase of inductive power and bias voltage in Cl₂ and HBr/Cl₂ plasmas increased polysilicon etch rates in general, but reduced the etch selectivities over nitride. In case of Cl₂ plasma, low inductive power and high bias voltage showed an anisotropic trench etch profile, and also the addition of oxygen or nitrogen to chlorine increased the etch anisotropy. The use of pure HBr showed a positively angled etch profile and the addition of Cl₂ to HBr improved the etch profile more anisotropically. HRTEM study showed physical defects formed on the silicon trench surfaces etched in Cl₂/N₂ or HBr/Cl₂ plasmas.
단상 인버터로 구성된 3상 구형파 인버터의 고조파 저감기법에 관한 연구
이주훈(Ju-Hoon Lee),조승연(Seung-Youn Cho),홍순찬(Soon-Chao Hong),이인환(In-Hwan Lee),황용하(Yong-Ha Hwang),박채운(Chae-Woon Park),한성수(Sung-Soo Han) 전력전자학회 2000 전력전자학술대회 논문집 Vol.2000 No.11
This paper deal with the harmonic reduction technique in three-phase square-wave inverter system formed by single-phase inverter. To reduce the harmonics, six single-phase inverters are used for forming multi-phase inverter and zig-zag connected output transformer for eliminating the harmonic 6(2k-l)±1 orders. And an ac filter is furnished at output side. Computer simulations show that the THD of the output voltage can be reduced immensely.
α도통모드에 의한 직류전력회생용 인버터 출력전압의 크기 제어
서영민(Young-Min Seo),이주훈(Ju-Hoon Lee),김경원(Kyung-Won Kim),윤인식(In-Sic Yoon),유종걸(Jong-Gul Yoo),윤덕용(Duck-Yong Yoon),홍순찬(Soon-Chan Hong) 전력전자학회 2000 전력전자학술대회 논문집 Vol.2000 No.11
This paper deals with the voltage amplitude control In Inverter systems which can regenerate the excessive DC power from DC bus line to AC supply In substations for traction systems To maintain the magnitude of output fundamental voltage constant in spite of the variation of input DC voltage, inverters are operated in symmetrical α- conduction mode with the range of 120˚< α < 180˚. To match the output voltage of the inverter systems with AC supply voltage, harmonic reduction techniques are also Investigated Computer simulations are carried out to verify the validity of the proposed system.
고속전철 전기시스템의 효율적인 개발을 위한 통합시스템 시험
류홍제(Hong-Je Ryoo),이주훈(Joo-Hoon Lee),조창희(Chang-Hee Cho),김용주(Yong-Ju Kim) 전력전자학회 2005 전력전자학술대회 논문집 Vol.- No.-
In this paper, an effective way to develop electrical system for Korean High-Speed Train(KHST) was introduced. High speed train is complicated electrical system that consists of many kinds of control devices, power supplies and communication systems. Due to reason of cost, safety and time for development, it is not so easy to test system performance after construct the high speed train in the test track. For the effective test and verification of system performance, from each electric system test to integration test for all interconnected electrical system are performed to reduce time and cost for development of high speed train.