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반도체·디스플레이 장비용 바닥 환경진동허용규제치의 실험적 평가방법 고찰
안채헌,최정희,박준순,박민수,An, Chae Hun,Choi, Jeong Hee,Park, Joon Soon,Park, Min Su 한국반도체디스플레이기술학회 2021 반도체디스플레이기술학회지 Vol.20 No.1
The semiconductor and display equipment demands an ultra-fine precision of several nm to several ㎛, and the scale is getting smaller due to the explosive development. The manufacturing process equipment for such products with ultra-fine precision is very sensitive to ultra-small vibrations flowing from the floor, resulting in problems of production defects and yield degradation. The vibration criteria are a standard that regulates the vibration environment of the floor where such precision process equipment will be installed. The BBN vibration criteria defined the allowable vibration velocity level in the frequency domain with a flat and inclined line and presented a rating according to it. However, the actual vibration criteria have appeared with various magnitudes in the frequency domain according to the dynamic characteristics of individual equipment. In this study, the relationship between the relative motion of two major points in the equipment and the vibration magnitude of the floor is presented using the frequency response function of a simple 3-DOF model. It is describing the magnitudes according to the frequency of the floor vibration that guarantees the allowable relative motion and this can be used as the vibration criteria. In order to obtain the vibration criteria experimentally a method of extracting through a modal test was introduced and verified analytically. It provides vulnerable frequency and magnitude to floor vibration in consideration of the dynamic characteristics of individual equipment. And it is possible to know necessary to improve the dynamic characteristics of the equipment, and it can be used to check the vibration compatibility of the place where the equipment will be installed.
안채헌(An, Chae-Hun),임광혁(Yim, Kwang-Hyeok),진경복(Jin, Kyong-Bok),임경화(Rim, Kyung-Hwa) 한국소음진동공학회 2007 한국소음진동공학회 논문집 Vol.17 No.7
In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.
An Active Tuned Mass Damper for Vibration Reduction of Ultra-High-Precision Equipment
최정희(Jeong Hee Choi),안채헌(Chae Hun An) Korean Society for Precision Engineering 2021 한국정밀공학회지 Vol.38 No.1
In an environment where ultra-high-precision equipment is used, vibration inevitably occurs due to various factors. These vibrations generate fatal effects, such as defect generation and reduced production yield, on ultra-high-precision production equipment. Among the multiple methods for solving vibration problems, a Tuned Mass Damper (TMD) is a useful technique that reduces vibration without changing the existing structure by attaching a passive dynamic system consisting of additional mass, spring, and damper. However, it is difficult to realize fine-tuning of the system parameters for optimal performance because the passive elements have structural limitations. An active TMD, which has a form wherein sensors, actuators, and a control device are added to the passive TMD structure, was introduced. It has higher performance than passive TMD because dynamic characteristics can be induced to stable and highly damped by a well-designed control algorithm realized by software in the control device. In this study, an active TMD was developed utilizing passive TMD with a voice coil actuator and attached to the center of both end fixed beam that assumed a single-degree-of-freedom structure. A dual-loop control algorithm using a non-minimum phase system was designed for a high-damped response while retaining stability. The modal test was performed for experimental evaluation and excellent performance of active TMD was verified.
임경화,안채헌,양손,한완희,범희락,Rim, Kyung-Hwa,An, Chae-Hun,Yang, Xun,Han, Wan-Hee,Beom, Hee-Rak 한국반도체디스플레이기술학회 2009 반도체디스플레이기술학회지 Vol.8 No.4
A SMT mounter is a kind of equipment that mounts SMD parts quickly on the printed circuit board. By using linear motors, it is controlled with high speed and precision, which is similar to semi-conductor and display process equipment. It is necessarily used in an assembly process of an electronic device. Mobile devices such as a mobile phone and PDA are required to reduce mount areas due to the demands for high performance and small size. Hence, super small sized and complex mobile devices have been developed. To improve the productivity of the corresponding equipment, designs with large sized, high speed, and multidisciplinary functions have been consistently performed. Meanwhile, a design trend of large size and light-weight on SMT mounter causes a low natural frequency of systems and vibration problems at the high speed operation. In this paper, the dynamic characteristics of the SMD mounter system were investigated through a modal test and transmissibility test, and verified by finite element method. Also, various design improvement was performed to avoid the resonance phenomena.