http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
이중 파장 보정방법 기반 다이나믹 분광타원편광계의 안정도 최적화
최인호,헤리저데헌거흐 사이드,최석현,황국현,심준보,김대석,Choi, Inho,Kheiryzadehkhanghah, Saeid,Choi, Sukhyun,Hwang, Gukhyeon,Shim, Junbo,Kim, Daesuk 한국반도체디스플레이기술학회 2021 반도체디스플레이기술학회지 Vol.20 No.3
This paper describes a dynamic spectroscopic ellipsometry based on dual-wavelength calibration. DSE provides ellipsometric parameters at rates above 20 Hz, but the interferometer's sensitivity to temperature makes it difficult for that proposed system to maintain stable 𝜟k over long periods of time. To solve this problem, we set up an additional path in the DSE to perform simulations of the polarization phase calibration method using dual wavelengths. Through simulation, we were able to eliminate most of the polarization phase error and maintain a stable 𝜟k in the long-term stability experiment for 10 hours. This is the result that the 𝜟k stability of the proposed system is improved tens of times compared to the existing system.