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UV - excited chlorine radical을 이용한 실리콘 웨이퍼상의 금속 오염물의 건식세정에 관한 연구
손동수(D. S. Son),황병철(B. C. Hwang),조동율(T. Y. Cho),천희곤(H. G. Chun),김경중(K. J. Kim),문대원(D. W. Moon),구경완(K. W. Koo) 한국진공학회(ASCT) 1997 Applied Science and Convergence Technology Vol.6 No.1
본 연구에서는 실리콘 웨이퍼 표면에 존재하는 미량의 Zn, Fe, Ti 금속 오염물들이 UV-excited chlorine radical을 이용한 건식세정 방법으로 제거되는 반응과정을 찾아내고자 하였다. 실리콘 웨이퍼 상에 진공증착법으로 원형패턴이 있는 Zn, Fe, Ti 박막을 증착시켜 상온 및 200℃에서 UV/Cl₂ 세정하였을 때, 염소 래디컬 (Cl*)이 Fe, Zn, Ti와 반응하여 제거되는 것을 반응 전후 광학현미경과 SEM을 통해 표면 형상 변화을 관찰하였고, in-line으로 연결된 XPS를 통해서 반응 후 웨이퍼 표면에 남아있는 화합물의 화학적 결합상태를 관찰하였으며, UV/Cl₂ 세정 후 실리콘 기판이 손상받는 정도를 알기 위해 AFM으로 표면 거칠기를 측정하였다. 광학현미경과 SEM의 분석 결과에 의하면 Zn와 Fe는 쉽게 제기되는 반면 염화물을 형성하기 보다는 휘발성이 적은 산화물을 형성하는 경향이 강한 Ti은 약간만 제거되는 것을 확인하였다. XPS 분석을 통해서 이들 금속 오염물들이 chlorine radical과 반응하여 웨이퍼 표면에 금속 염화물을 형성하고 있는 것을 확인하였고, UV/Cl₂ 세정처리를 하였을 때 실리콘 웨이퍼의 표면 거칠기가 약간 증가하는 것을 알 수 있었다. 지금까지의 결과를 통해 볼 때, 습식세정과 UV/Cl₂ 건식세정을 병행하면 플라즈마 및 레이저를 사용하는 다른 건식세정 방법에 비하여 보다 저온에서 실리콘 기판의 큰 손상 없이 비교적 용이하게 금속 오염물을 제거할 수 있음을 제안하였다. The reaction mechanisms of dry cleaning with UV-excited chlorine radical for Zn, Fe and Ti trace contaminants on the Si wafer have been studied by SEM, AFM and XPS analyses in this work. The patterned Zn, Fe and Ti films were deposited on the Si wafer surface by thermal evaporation and changes in the surface morphology after dry cleaning with Cl₂ and UV/Cl₂ at 200℃ were studied by optical mocroscopy and SEM. In addition, changes in the surface roughness of Si wafer with the cleaning was observed by AFM. The chemical bonding states of the Zn, Fe and Ti deposited silicon surface were observed with in-line XPS analysis. Zn and Fe were easily cleaned in the form of volatile zinc-chloride and iron-chloride as verified by the surface morphology changes. Ti which forms involatile oxides was not easily removed at room temperature but was slightly removed by UV/Cl₂ at elevated temperature of 200℃. It was also found that the surface roughness of the Si wafer increased after Cl₂ and UV/Cl₂ cleaning. Therefore, the metallic contaminants on the Si wafer can be easily removed at lower temperature without surface damage by a continuous process using wet cleaning followed by UV/Cl₂ dry cleaning.
돼지 수정란 이식에 관한 연구 1 . 발정동기화 및 과배란유기
손동수(D . S . Son),이광원(K . W . Lee),최진성(J . S . Choi),김경남(K . N . Kim),강만석(M . S . Kang),지설하(S . H . Chee),박창식(C . S . Park) 한국축산학회 1987 한국축산학회지 Vol.29 No.12
This study was carried out to investigate the effect of synchronization of estrus and induction of superovulation after administration of altrenogest, PMSG and HCG in the multiparous sows weaned at 50-56 days. A total of 100% of the treated sows exhibited estrus within a four-day period. The average number of ovulation points per sow among superovulated breeds such as Landrace, Large White, Duroc and Hampshire was between 17.6 and 24.0.
돼지 수정란이식에 관한 연구 2 . 수정란의 회수 및 이식
이광원(K . W . Lee),손동수(D . S . Son),김상철(S . C . Kim),김일화(I . H . Kim),전대규(D . K . Jeon),유일선(I . S . Ryu),이종관(J . K . Lee),지설하(S . H . Chee),박창식(C . S . Park),석호봉(H . B . Seok) 한국축산학회 1988 한국축산학회지 Vol.30 No.7
This study of embryo transfer was carried out to investigate the possibility of introducing new genetic material into closed herds for disease control and of transporting embryos between countries. The results obtained were summarized as follows: 1. On the basis of the number of ovulation points counted, 69.1% of embryos were recovered. 2. A very high proportion (86.6%) of 1-cell embryos were recovered from the oviducts of donor sows at 37 to 41 hours after first mating. 3. Sixty-seven embryos were transferred to 5 recipients. Four recipients farrowed a total of 18 pigs, giving a survival rate of 26.9%. 4. Average pig weight at birth was 1.46㎏.
홀스타인 젖소에 있어서 수정란 생산에 미치는 제요인 효과
안병석,고문석,김준식,손동수,김일화,이광원,김내수 ( B . S . Ahn,M . S . Ko,J . S . Kim,D . S . Son,I . H . Kim,K . W . Lee,N . S . Kim ) 한국축산학회 1997 한국축산학회지 Vol.39 No.1
The data set of 75 records of Holstein dairy cow donors bred in the National Livestock Research Institute from 1993 to 1995 was used to estimate effects of various factors on embryo recovery. The embryo recovery of superovulated tows was not affected by the factors such as sire of donor cow, breeding years, repeated superovulation and parity of donor cows. However, the production of total embryos and the first gale embryos were decreased significantly(p$lt;0.01) as the donor cows were tested to be higher in milk yield. Least square means of number of embryos according to breeding years and those by repeated superovulations were 9 to 16, 11 to 14 embryos, respectively. Total embryos as well as non-frozen embryos were tend to increase with donor`s parity increase. Number of total collection of embryos decreased in opposition to the increase in the milk yield of the donor cow. It decreased by -2.2±0.8 embryo for total embryos, and by -1.1±0.4 embryo for first grade and by -0.5±0.4 for second Bade as milk yield increased by 1,000 ㎏.
김학규(H . K . Kim),고문석(M . S . Ko),김인철(I . C . Kim),정행기(H . K . Chung),이광원(K . W . Lee),손동수(D . S . Son),김현(H . Kim),지설하(S . H . Chee),박창식(C . S . Park) 한국축산학회 1989 한국축산학회지 Vol.31 No.3
This study was carried out to investigate the effect of aluminium rack distance from liquid nitrogen surface in liquid nitrogen container on post-thaw sperm motility and NAR acrosome in maxi-straws. The post -thaw sperm motility and NAR acrosome for 15 cm from the liquid nitrogen surface were 57% and 56 % after 0.5 h incubation at 37℃, and 31 % and 38 % after 2 h incubation. The straws frozen from 5 cm to 25 cm above the liquid nitrogen surface did not show any significant differences on post-thaw sperm motility and NAR acrosome. The utilization of this deep-freezing method is considered to be acceptable under practical farm conditions.
수정란의 급속 동결융해법에 관한 연구 2 . 비침투성 동결보호제가 급속동결한 마우스 수정란의 생존성에 미치는 영향
석호봉(H . B . Seok),이광원(K . W . Lee),손동수(D . S . Son) 한국축산학회 1991 한국축산학회지 Vol.33 No.7
This experiment was carried out to investigated effects of trehalose and sucrose concentration as a nonpermeable cryoprotectants on in vitro development of mouse embryo frozen-thawed by direct plunging from room temperature to liquid nitrogen. The results obtained from the experiment are as follows: 1. When the embryos frozen-thawed ultrarapidly in 3.5M glycerol and 0.25 or 0.5M sucrose, the proportions of morphologically normal embryos and those developed to expanded blastocysts were slightly higher in 0.5M(l00% and 80%) than in 0.25M(62.5% and 72%), but there was significant difference between those with and without sucrose(p$lt;0.01). 2. In effects of glycerol concentration added to 0.5M sucrose or 0.5M trehalose on in vitro development of frozen-thawed mouse embryos, 3.5M glycerol resulted in a higher embryos survival rate and proportion of embryos developed to expanded blastocysts. Also the group of sucrose (83%) added medium showed significantly higher embryos survival rate than trehalose(65.6%) group(p$lt;0.01). 3. In effects of permeable cryoprotectants added to 0.5M trehalose on in vitro development of the embryos, 3.5M glycerol and 3.5M propanediol resulted in better embryos recovery and survival rates than other dilution of freezing medium. In difference between the groups of glycerol and propanediol in the freezing medium, glycerol resulted in a significantly higher embryos survival rate than propanediol(p$lt;0.01). 4. When the embryos were frozen-thawed ultrarapidly in mixtures of 25% glycerol, 25% propanediol and surcrose solution, highly survival and recovery rates more than 90% were obtained.