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전자빔 리소그래피에서 0.3μm 리지스트 패턴을 위한 工程許容範圍
유기수,최금란,유흥우 圓光大學校 基礎自然科學硏究所 1993 基礎科學硏究誌 Vol.12 No.2
전자빔 直接 露光方法에 의해서 64 M bit DRAM을 위한 0.3㎛ 線幅 리지스트 斷面形狀에 대한 工程 許容範圍를 컴퓨터 시뮬레이션으로 계산하였다. 시료 구성은 0.3㎛의 W을 입히지 않은 Si기판과 W을 입힌 Si기판으로 구성한 3층 리지스트系로 하였다. 공정 허용범위는 0.2㎛ 단일선과 0.2㎛선 -0.4㎛선간 거리의 평행선에서 0.3㎛ 線幅과 0.3㎛ 線間 距離를 위한 리지스트 단면형상으로 전자빔의 에너지와 전자빔 조사법을 달리하면서 계산하였다. 그리고 평행선의 외각선은 補助 露光法에 의해서 중앙선의 공정 허용범위와 같게 하였다. This study describes the electron beam direct writing technology for 64M bit DRAMs including a resist process for 0.3㎛ fabrication. The delineation capability of 0.3㎛ lines is estimated by evaluating process latitudes with computer simulation. The trilayer resist system consists of layers on bare silicon substrate covered with 0.3㎛ tungsten. The behaviour of developed resist profiles under different conditions of direct writing technology and electron energy is presented in case of 0.2㎛ isolated line and a grating of 0.2㎛/0.4㎛ lines and spaces. The results show that the higher electron energy makes the process latitude larger and the resist patterns on W layer is less effective than bare Si substrate, however the process latitudes of two beam writing are larger than those of three beam writing. And the proper resist profiles of the grating periphery can be much the same as its center by the subsidiary exposure method.
K-이온化를 위한 全斷面積과 阻止能 : Bethe 理論 The Bethe theory
庾基洙,金鎭城,朴海容 圓光大學校 基礎自然科學硏究所 1983 基礎科學硏究誌 Vol.2 No.1
In 1930 Bethe established a quantum mechanical theory based on the Born approximation, and derived a number of important results concerning the collision cross section and the stopping power for fast particles. However, there has been quite a difficulty in the following his original work(which was published in German), so that we rediscuss the subject in an effort to make the theory more accessible and fruitful for further studies on the motion of election in condensed matters.
庾基洙 圓光大學校 1977 論文集 Vol.11 No.-
The gravitational field is very well explained by Einstein's theory. This has led people to believe that the electromagnetic field should also be ascribed with a similar method. Soon after the appearance of Einstein's theory, a solution of this problem was proposed by H. Weyl.1) The Curvature of space required by Einstein's theory can be discussed in terms of the notion of the parallel displacement of a vector. Weyl's generalization was to suppose that the final vector has a different length as well as a different direction, which is a very natural generalization of Riemannian space. Following the same method Yang and Mills formulated their theory. Then Utiyama proposed a generalization of these two approaches. In fact the Weyl's fieldΦμ was abandoned contrary to Weyl's intention owing to some defects. Many theories on these problems have been proposed, but they are all complicated and rather actificial, and are not generally accepted. Since there have been many discussions about this problem, we will further examine a generalization of Weyl's theory.
유기수,한복섭 대한의용생체공학회 1993 의공학회지 Vol.14 No.3
A study on the biocompatibility of two types of new glass-ceramics materials, metal disc and dental porcelain that were already made for dental artificial tooth in the previous study, have been attempted. The chemical behavior and the Victor's hardness change in she artificial saliva and Ringer's solution have been also investigated. From the experiment of Implantation of glass-ceramics Into dorsal subcutaneous tissue of Sprague-Dawley rats, glass-cerarmics did not show any particular system of rejection for histrocompatibility.
庾基洙 圓光大學校 1973 論文集 Vol.7 No.-
In 1925 W. Heisenberg had just succeeded to break to the old guantum theory in the new. Through the work of many experts, this theory soon acquired a fully developed mathematical formalism. But despite its enormous practical success, the quantum theory of measurement is so contrary to intuition that the experts themselves still do not all agree. The area of disagreement centers primarily around the following: 1. Formally, the result of a measurement is a superposition of vectors and these vectors represent the quantity of observation. 2. This superposition can be reconciled with the fact that we only observe one value. 3. A micro-world compose of just two dynamical entities, a system and an apparatus. 4. This world split into a multiplicity of mutually unobservable but equal real worlds, in each one of which a measurement does give a definite result. On this measurement theory of quantum theory I shall attempt to meet these challenges by discussing numerous thought experiments, each of which are subjected to the question.