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Hollow Structure에서의 희생층 평탄화 제작 공정
윤용섭,배기덕,최형,전찬봉,노광춘 대한전기학회 2004 전기학회논문지C Vol.53 No.10-C
Two fabrication approaches are proposed to planarize the sacrificial layer over hollow structures. One is the photoresist filling method that makes use of photolithography, thermal curing and plasma ashing. The other is the lamination method that is applying pressure and temperature to the organic film over the hollow structures. The fabrication results are compared with those of CMP process. Trenches and cavities with various dimensions have been made for the porposed process. Upon measuring the planarization levels, they are dependent on planarization methods and the geometrical size of hollow structures. The photoresist filling method is so strongly dependent on the width and depth of trenches that we have problems to use it for large dimensional trenches. To the contrary, the flatness of sacrificial layer over the trenches was found to be almost independent of trench dimensions for the lamination method. A CMP process shows the most excellent results, but the fabrication is complicated and the access to it is not so easy. It is important to choose the proper planarization method by considering the required flatness levels, materials to be planarized, and connection between the planarization step and the previous or the following process of it.
추가된 수직전극을 구비한 저전압 구동의 광 스위칭용 정전구동 마이크로 액츄에이터
윤용섭,배기덕,최형,고병천 대한전기학회 2003 전기학회논문지C Vol.52 No.1
- With the progress of optical communication technology recently, the development of micro actuator using MEMS technology has been made for optical switching. The actuation types are various; electrostatic, electromagnetic, and electrostatic +electromagnetic etc. Among them, the electrostatic type is the most popular because of the relative ease of fabrication, integration and shielding as well as low power consumption. However, it needs a high voltage to generate a larger driving force. To overcome this problem, we proposed a new type of electrostatic actuator with an extra vertical electrode in addition to the horizontal one. The vertical electrode also plays a role of making the stable angular rotation as a stopper. From the theoretical analysis and experiment, we find the actuation voltage can be reduced up to 50 % of that of the conventional one.
휴대폰 전자파와 인체의 상호 영향 및 뼈 유사 물질 합성 연구
윤용섭,김인광,전중창,박위상 한국전자파학회 1999 한국전자파학회논문지 Vol.10 No.2
A simulation using the finite-difference time-domain method to analyze the electromagnetic interactions between a cellular phone and the human body was conducted, and a synthesis of a bone-equivalent material to make a human head phantom was performed. A test model of the cellular phone was fabricated to measure its reflection coefficient and radiation pattern in the free space. Various effects of the human body on the characteristics of the phone, such as input impedance, reflection coefficient, radiation pattern, and radiation efficiency are analyzed as the distance between the head and the phone antenna varies. When the phone was operated close to the head, the resonant frequency of the antenna decreased by up to 12%. With the output power of 0.6W, as long as the distance was larger than 30mm, the 1-g averaged peak SAR was below the ANSI/IEEE safety guideline, 1.6 W/kg. To synthesize the bone-equivalent material, an epoxy with hardener and a graphite powder were used as basis ingredients, and a small amount of a conducting epoxy was added to control the conductivity of the material. A material having a relative permittivity of 18.04 and a conductivity of 0.347, which are close to those of the bone at 850 MHz, was synthesized. 유한차분 시간영역 수치해석 기법을 사용하여 휴대폰과 인체 간의 전자파 결합 현상을 시율레이션하였고, 인체 두부의 모형을 제작하기 위한 생체 뼈 유사 물질의 합성에 관한 연구를 수행했다. 휴대폰 모형을 제작 하여 자유 공간에서 안테나 반사계수 및 복사 패턴을 측정하였다. 인체와 안테나 사이의 거리를 매개 변수로 하여 안테나의 입력 임피던스, 반사계수, 복사 패턴, 효율, 그리고 인체 두부의 전력 홉수량을 계산하였다. 인 체 근접 효과에 의하여 안테나 공진 주파수가 약 12 %까지 감소되었으며, 출력이 0.6W일 때, 두부와 안테나 사이의 거리가 30mm이상 떨어져 있을 경우, l-g 평균 최대 SAR가 ANSVIEEE 안전 기준인 1.6 W /kg 이 하로 계산되었다. 뼈 유사 물질의 합성에는 에폭시, 응고제, 그리고 흑연 분말을 기본 물질로 하고, 전도도를 제어하기 위해 소량의 전도성 에폭시를 첨가하였다. 850 MHz에서 비유전율이 18.04, 전도도가 0.347로서 생체 뼈의 특성에 매우 근접하는 시료가 합성되었음을 보였다.